VUV / Excimer 120-179 nm (original) (raw)

Wavelength 120-179 nm

126 | 130 | 149 | 157 | 172 nm

Ar2 • F2

VAR

AR

VAR

VAR

λ [nm] AR (0°); R < method AR (45°); R < method
157 0.5% on Fluoride EBE 0.75% on Fluoride EBE
172 0.5% on Fluoride EBE 0.75% on Fluoride EBE

HR

HR

HR

HR

λ [nm] HR (0°); R > method HR (45°); R > method
126 84% on Fluoride EBE 75% on Fluoride EBE
130 85% on Fluoride EBE 80% on Fluoride EBE
149 91% on Fluoride EBE 89% on Fluoride EBE
157 94% (goal 97%) on Fluoride EBE 93% (goal 95%) on Fluoride EBE
172 95% on Fluoride EBE 94% on Fluoride EBE

TFP

POLARIZER

TFP

TFP

λ [nm] AOI method
157 Rp < 0.3%, Rs > 87% 72° on CaF2 EBE

VA

VARIABLES

VA

VA

λ [nm] 0°→ 45°; T = method
157 75% → 2% on CaF2 EBE
10% → 70% on CaF2 EBE

LASEROPTIK has longtime experience with coatings in the Vacuum Ultraviolet (VUV) range (120-179 nm), especially for 157 nm including dedicated metrology.

The main reason for losses in this spectrum is absorption of water and hydrocarbons. VUV-CaF2 substrates are used to counter these losses. A surface roughness of σRMS < 0.3 nm helps to decrease the losses for all coatings.

We guarantee LIDT > 400 mJ/cm2 with 15 ns pul­ses for HR 157 nm / 0°.

Our mirrors withstand 2.5 billion pulses at 10 mJ/cm2 without any detectable degradation as reported from a longterm test. The values for PR and AR coatings will be in the same range.

All values are given for standard coatings. Customized coatings available for all types.

Coating methods available:

EBE

Examples

If not mentioned otherwise, all values and diagrams are given

... for the standard substrate material used in the described wavelength area (mostly Fused Silica or CaF2).

... without consideration of the rear surface.

... with EBE coating technique for a good cost-performance ratio.

Customized coatings are available for all types.

–––– dashed lines show the zoomed curve with the stated magnification

AR 157 nm / 0°

[B-00768]AR 157 nm / 0°

157 nm: R < 0.5%

HR 157 nm / 0°

[B-00649]HR 157 nm / 0°

157 nm: R > 94% (goal R > 97%)

R 50% 157 nm / 45°

[B-06013]R 50% 157 nm / 45°

157 nm: R ± 5%

TFP 157 nm / 72°

[B-01280]TFP 157 nm / 72°

157 nm: Rp < 0.3%, Rs > 87%

VA 157 nm / 0-45° T 75-1%

[B-11719]VA 157 nm / 0-45° T 75-1%

157 nm: 0°: T > 70% (goal T > 75%);
45°: T < 2% (goal T < 1%)

Al + Protection Layer - VUV

[B-02250-01]Al + Protection Layer - VUV

120-220 nm /0°: R > 65%