Binnig and Rohrer Nanotechnology Center, IBM Research Zurich (original) (raw)
Cleanroom
A large cleanroom for micro- and nanofabrication provides researchers with a flexible environment and tools for lithography, wet processing, dry etching, thermal processes, thin-film deposition or metrology and characterization.
This cleanroom facility — in combination with four ETH Zurich professorships located at the Binnig and Rohrer Nanotechnology Center — is the centerpiece of a 10-year strategic partnership in nanoscience between IBM Research, ETH Zurich and EMPA, where scientists can research novel nanoscale structures and devices to drive the future of information technology and nanoscience.