Characterization of Ion Beam Synthesized Materials Using Microscope-Spectrophotometry (original) (raw)

Abstract

In this paper, the technique of microscope-spectrophotometry, used to nondestructively characterize the microstructure of ion beam synthesized iron-disilicide layers, is described. The results obtained agree extremely well, in terms of layer thickness and interfacial roughness, with those from Rutherford backscattering. The results also show that it is possible to interpret the measured spectral reflectance data in terms of: 1) defect annealing; 2) iron redistribution; and 3) phase transformations from the β to the α phase.

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Authors and Affiliations

  1. Department of Mineralogy, Natural History Museum, London, SW7 5BD, UK
    Rachel M. Geatches & Alan J. Criddle
  2. Department of Electrical and Electronic Engineering, University of Surrey, Guildford, Surrey, GU2 5XH, UK
    Rachel M. Geatches, Karen J. Reeson, Mark S. Finney, Milton A. Harry & Roger P. Webb
  3. GEC-Marconi Materials Technology Ltd, Towcester, Northamptonshire, NN12 8EQ, UK
    Peter J. Pearson

Authors

  1. Rachel M. Geatches
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  2. Karen J. Reeson
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  3. Alan J. Criddle
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  4. Mark S. Finney
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  5. Milton A. Harry
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  6. Roger P. Webb
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  7. Peter J. Pearson
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Geatches, R.M., Reeson, K.J., Criddle, A.J. et al. Characterization of Ion Beam Synthesized Materials Using Microscope-Spectrophotometry.MRS Online Proceedings Library 316, 813–818 (1993). https://doi.org/10.1557/PROC-316-813

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