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Papers by Anindarupa Chunder
Advanced Materials, Jul 13, 2008
Minimization and control of line-edge roughness (LER) and contact-edge roughness (CER) is one of ... more Minimization and control of line-edge roughness (LER) and contact-edge roughness (CER) is one of the current challenges limiting EUV line-space and contact hole printability. One significant contributor to feature roughness and CD variability in EUV is photon shot noise (PSN); others are the physical and chemical processes in photoresists, known as resist stochastic effect. Different approaches are available to mitigate each of these contributions. In order to facilitate this mitigation, it is important to assess the magnitude of each of these contributions separately from others. In this paper, we present and test a computational approach based on the concept of an 'ideal resist'. An ideal resist is assumed to be devoid of all resist stochastic effects. Hence, such an ideal resist can only be simulated as an 'ideal resist model' (IRM) through explicit utilization of the Poisson statistics of PSN 2 or direct Monte Carlo simulation of photon absorption in resist. LER estimated using IRM, thus quantifies the exclusive contribution of PSN to LER. The result of the simulation study done using IRM indicates higher magnitude of contribution (60%) from PSN to LER with respect to total or final LER for a sufficiently optimized high dose 'state of the art' EUV chemically amplified resist (CAR) model.
Journal of the American Ceramic Society, 2008
Solid preceramic polyaluminasilazane was synthesized through the reaction between liquid cyclosil... more Solid preceramic polyaluminasilazane was synthesized through the reaction between liquid cyclosilazane and aluminum trisec-butoxide at 1601C. Electrospinning of polyaluminasilazane/ polyethyleneoxide (1/0.0001 mass ratio) in chloroform solutions generated smooth fibers while the electrospun fibers from the chloroform/N,N-dimethylformamide solutions had submicrometer structures on the fiber surfaces. Smooth and rough SiCNO ceramic fibers were obtained by the pyrolysis of the green fibers with an 80% yield. Superhydrophobic mats of ceramic fibers were fabricated via a chemical vapor deposition of perfluorosilane onto the rough fibers. These superhydrophobic mats possess good chemical and thermal stability.
Macromolecular Rapid Communications, Feb 16, 2010
The Journal of Physical Chemistry C, Aug 17, 2010
Reduced graphene oxide (RGO) composites containing tetrasulfonate salt of copper phthalocyanine (... more Reduced graphene oxide (RGO) composites containing tetrasulfonate salt of copper phthalocyanine (TSCuPc) are fabricated through the reduction of graphene oxide in the presence of water-soluble TSCuPc. The interaction between RGO monolayer and ...
High yield assembly and electron transport properties of reduced graphene oxide field effect tran... more High yield assembly and electron transport properties of reduced graphene oxide field effect transistors DAEHA JOUNG, We demonstrate high yield fabrication of field effect transistors (FET) using chemically reduced graphene oxide (RGO) sheets which is compatible with complimentary metals oxide semiconductor technology. The RGO sheets suspended in water were assembled between prefabricated gold source and drain electrodes using ac dielectrophoresis (DEP). All of the devices showed FET behavior with the application of a gate bias with the majority of them demonstrating ambipolar behavior with a maximum hole and electron mobilities of 4.0 and 1.5 cm 2 /Vs respectively. Current-voltage characteristic of the FET devices measured at different temperature follow power law behavior with I∞V n with n=1 at low bias while n is as high as 3 at high bias voltage. The temperature dependence of the resistance show Efros-Shklovskii variable range hopping behavior proving that RGO devices are similar to that of disordered granular system. High yield assembly of RGO FET will have significant impact in scaled up fabrication of graphene based nanoelectronic devices.
Journal of Photopolymer Science and Technology, 2015
Volume 13: Nano-Manufacturing Technology; and Micro and Nano Systems, Parts A and B, 2008
This paper describes the design and fabrication of a switchable thermosensitive polymer with an i... more This paper describes the design and fabrication of a switchable thermosensitive polymer with an integrated microheater as a smart surface platform for wettabilty control. The thermoresponsive surface is synthesized on a glass substrate using the polymer poly (N-...
Optical Microlithography XXVIII, 2015
Advances in Patterning Materials and Processes XXXII, 2015
Materials Express, 2011
... of metal nanoparticles has been reported previously, though not very extensively.3841 The en... more ... of metal nanoparticles has been reported previously, though not very extensively.3841 The enhancement mechanism was attributed to similar effect as the surface enhanced Raman scattering (SERS ... 18. H. Chen, X. Liu, H. Muthuraman, J. Zou, Q. Dai, J. Wang, and Q. Huo, Adv ...
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, 2007
This paper describes a passive microfluidic valve, which has an integrated superhydrophobic surfa... more This paper describes a passive microfluidic valve, which has an integrated superhydrophobic surface in one of the channels to selectively inhibit the flow of water based reagents and pass aqueous solutions containing surfactants. The microchannels were fabricated by standard photolithography and wet etching techniques. The superhydrophobic polymer patch was fabricated using the layer-by-layer (LBL) deposition technique, in which multiple layers
Journal of Power Sources, 2011
Multi-walled carbon nanotube (MWCNT)/polyaniline (PANI)/MnO2 (MPM) ternary coaxial structures are... more Multi-walled carbon nanotube (MWCNT)/polyaniline (PANI)/MnO2 (MPM) ternary coaxial structures are fabricated as supercapacitor electrodes via a simple wet chemical method. The electrostatic interaction between negative poly(4-styrenesulfonic acid) (PSS) molecules and positive Mn2+ ions causes the generation of MnO2 nanostructures on MWCNT surfaces while the introduction of PANI layers with appropriate thickness on MWCNT surfaces facilitates the formation of MWCNT/PANI/MnO2 ternary
Journal of Photopolymer Science and Technology, 2014
ABSTRACT To extend the scaling beyond the most widely used poly(styrene-b-methyl methacrylate) (P... more ABSTRACT To extend the scaling beyond the most widely used poly(styrene-b-methyl methacrylate) (PS-b-PMMA), organic high-χ block copolymers (BCPs) were developed. Vertically oriented BCP domains were obtained by simple coat and bake process without application of an additional layer of a topcoat material. In addition, process-friendly conditions including low bake temperature (< 200 °C) and short bake time (≤ 5 min) provided a simple scheme to integrate these high-χ block copolymers to standard lithography process and pre-patterns defined by 193i lithography. Successful demonstration of directed self-assembly of these high-χ block copolymers on 193i-defined guiding pre-patterns offers a simple route to access well-aligned perpendicular lamellae and cylinders with a pitch less than 20 nm.
We examine photo-response and positional dependent photocurrent generation in chemically reduced ... more We examine photo-response and positional dependent photocurrent generation in chemically reduced graphene oxide (RGO) thin film under near infrared illumination. We have observed that the photocurrent depends strongly on the position of laser spot with maximum photocurrent occurring at the metal-film interface. A slow time constant (˜2.8 seconds) was observed and the photocurrent exhibits a linear dependence on the incident
SID Symposium Digest of Technical Papers, 2008
Advanced Materials, Jul 13, 2008
Minimization and control of line-edge roughness (LER) and contact-edge roughness (CER) is one of ... more Minimization and control of line-edge roughness (LER) and contact-edge roughness (CER) is one of the current challenges limiting EUV line-space and contact hole printability. One significant contributor to feature roughness and CD variability in EUV is photon shot noise (PSN); others are the physical and chemical processes in photoresists, known as resist stochastic effect. Different approaches are available to mitigate each of these contributions. In order to facilitate this mitigation, it is important to assess the magnitude of each of these contributions separately from others. In this paper, we present and test a computational approach based on the concept of an 'ideal resist'. An ideal resist is assumed to be devoid of all resist stochastic effects. Hence, such an ideal resist can only be simulated as an 'ideal resist model' (IRM) through explicit utilization of the Poisson statistics of PSN 2 or direct Monte Carlo simulation of photon absorption in resist. LER estimated using IRM, thus quantifies the exclusive contribution of PSN to LER. The result of the simulation study done using IRM indicates higher magnitude of contribution (60%) from PSN to LER with respect to total or final LER for a sufficiently optimized high dose 'state of the art' EUV chemically amplified resist (CAR) model.
Journal of the American Ceramic Society, 2008
Solid preceramic polyaluminasilazane was synthesized through the reaction between liquid cyclosil... more Solid preceramic polyaluminasilazane was synthesized through the reaction between liquid cyclosilazane and aluminum trisec-butoxide at 1601C. Electrospinning of polyaluminasilazane/ polyethyleneoxide (1/0.0001 mass ratio) in chloroform solutions generated smooth fibers while the electrospun fibers from the chloroform/N,N-dimethylformamide solutions had submicrometer structures on the fiber surfaces. Smooth and rough SiCNO ceramic fibers were obtained by the pyrolysis of the green fibers with an 80% yield. Superhydrophobic mats of ceramic fibers were fabricated via a chemical vapor deposition of perfluorosilane onto the rough fibers. These superhydrophobic mats possess good chemical and thermal stability.
Macromolecular Rapid Communications, Feb 16, 2010
The Journal of Physical Chemistry C, Aug 17, 2010
Reduced graphene oxide (RGO) composites containing tetrasulfonate salt of copper phthalocyanine (... more Reduced graphene oxide (RGO) composites containing tetrasulfonate salt of copper phthalocyanine (TSCuPc) are fabricated through the reduction of graphene oxide in the presence of water-soluble TSCuPc. The interaction between RGO monolayer and ...
High yield assembly and electron transport properties of reduced graphene oxide field effect tran... more High yield assembly and electron transport properties of reduced graphene oxide field effect transistors DAEHA JOUNG, We demonstrate high yield fabrication of field effect transistors (FET) using chemically reduced graphene oxide (RGO) sheets which is compatible with complimentary metals oxide semiconductor technology. The RGO sheets suspended in water were assembled between prefabricated gold source and drain electrodes using ac dielectrophoresis (DEP). All of the devices showed FET behavior with the application of a gate bias with the majority of them demonstrating ambipolar behavior with a maximum hole and electron mobilities of 4.0 and 1.5 cm 2 /Vs respectively. Current-voltage characteristic of the FET devices measured at different temperature follow power law behavior with I∞V n with n=1 at low bias while n is as high as 3 at high bias voltage. The temperature dependence of the resistance show Efros-Shklovskii variable range hopping behavior proving that RGO devices are similar to that of disordered granular system. High yield assembly of RGO FET will have significant impact in scaled up fabrication of graphene based nanoelectronic devices.
Journal of Photopolymer Science and Technology, 2015
Volume 13: Nano-Manufacturing Technology; and Micro and Nano Systems, Parts A and B, 2008
This paper describes the design and fabrication of a switchable thermosensitive polymer with an i... more This paper describes the design and fabrication of a switchable thermosensitive polymer with an integrated microheater as a smart surface platform for wettabilty control. The thermoresponsive surface is synthesized on a glass substrate using the polymer poly (N-...
Optical Microlithography XXVIII, 2015
Advances in Patterning Materials and Processes XXXII, 2015
Materials Express, 2011
... of metal nanoparticles has been reported previously, though not very extensively.3841 The en... more ... of metal nanoparticles has been reported previously, though not very extensively.3841 The enhancement mechanism was attributed to similar effect as the surface enhanced Raman scattering (SERS ... 18. H. Chen, X. Liu, H. Muthuraman, J. Zou, Q. Dai, J. Wang, and Q. Huo, Adv ...
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, 2007
This paper describes a passive microfluidic valve, which has an integrated superhydrophobic surfa... more This paper describes a passive microfluidic valve, which has an integrated superhydrophobic surface in one of the channels to selectively inhibit the flow of water based reagents and pass aqueous solutions containing surfactants. The microchannels were fabricated by standard photolithography and wet etching techniques. The superhydrophobic polymer patch was fabricated using the layer-by-layer (LBL) deposition technique, in which multiple layers
Journal of Power Sources, 2011
Multi-walled carbon nanotube (MWCNT)/polyaniline (PANI)/MnO2 (MPM) ternary coaxial structures are... more Multi-walled carbon nanotube (MWCNT)/polyaniline (PANI)/MnO2 (MPM) ternary coaxial structures are fabricated as supercapacitor electrodes via a simple wet chemical method. The electrostatic interaction between negative poly(4-styrenesulfonic acid) (PSS) molecules and positive Mn2+ ions causes the generation of MnO2 nanostructures on MWCNT surfaces while the introduction of PANI layers with appropriate thickness on MWCNT surfaces facilitates the formation of MWCNT/PANI/MnO2 ternary
Journal of Photopolymer Science and Technology, 2014
ABSTRACT To extend the scaling beyond the most widely used poly(styrene-b-methyl methacrylate) (P... more ABSTRACT To extend the scaling beyond the most widely used poly(styrene-b-methyl methacrylate) (PS-b-PMMA), organic high-χ block copolymers (BCPs) were developed. Vertically oriented BCP domains were obtained by simple coat and bake process without application of an additional layer of a topcoat material. In addition, process-friendly conditions including low bake temperature (< 200 °C) and short bake time (≤ 5 min) provided a simple scheme to integrate these high-χ block copolymers to standard lithography process and pre-patterns defined by 193i lithography. Successful demonstration of directed self-assembly of these high-χ block copolymers on 193i-defined guiding pre-patterns offers a simple route to access well-aligned perpendicular lamellae and cylinders with a pitch less than 20 nm.
We examine photo-response and positional dependent photocurrent generation in chemically reduced ... more We examine photo-response and positional dependent photocurrent generation in chemically reduced graphene oxide (RGO) thin film under near infrared illumination. We have observed that the photocurrent depends strongly on the position of laser spot with maximum photocurrent occurring at the metal-film interface. A slow time constant (˜2.8 seconds) was observed and the photocurrent exhibits a linear dependence on the incident
SID Symposium Digest of Technical Papers, 2008