Jeyakumar Ramanujam - Academia.edu (original) (raw)
Papers by Jeyakumar Ramanujam
Progress in Materials Science
MRS Proceedings
Hydrogen silsesquioxane (HSQ), a low dielectric constant material was deposited by spin coating o... more Hydrogen silsesquioxane (HSQ), a low dielectric constant material was deposited by spin coating on Si substrates. The films were cured between 175°C and 575°C. The cured films were subjected to ion-accelerated hydrogen plasma at different DC bias voltage to reduce the dielectric constant (k) of the films. The effect of ion-accelerated hydrogen plasma on cured films was discussed and compared with (i) non-plasma, and (ii) hydrogen plasma without the accelerating DC bias. Capacitance-Voltage measurements (C-V) and Fourier Transform Infrared Spectroscopy (FTIR) studies were done on these films. The C-V measurement shows that k values increase as the curing temperature increases for all the cases. A PECVD system was used for plasma hydrogenation and ion-accelerated plasma hydrogenation. Depending on the curing temperature the dielectric constant values were found to be, (i) between ∼ 3 and 8.8 for nonplasma films, (ii) between ∼3 and 5.1 for plasma hydrogenated films, (iii) between ∼ 2....
Materials Express
Amorphous silicon films are currently receiving a worldwide renewed and intense research and comm... more Amorphous silicon films are currently receiving a worldwide renewed and intense research and commercial focus for low-cost solar power generation. In this article we review the history and current status of hydrogenated amorphous silicon films (a-Si:H) for thin film photovoltaics, and the role of intrinsic a-Si:H films in heterojunction (a-Si:H/c-Si) solar cells. The focus of this article is on plasma enhanced chemical vapor deposition (PECVD) of these films from silane (SiH 4). Very high frequency (VHF) PECVD deposition and its limitations are discussed. Properties and requirements of intrinsic and doped a-Si:H films are presented. Light-induced degradation of a-Si:H films are reviewed in detail. Current status of single junction a-Si:H solar cells and factors influencing cell performance are also discussed. Since the efficiency and stability of thin film a-Si:H solar cells are low, a-Si:H films can be successfully used in other solar cell technologies such as c-Si based back heterojunction solar cells, where doped a-Si:H films are used at the rear side of the substrate for emitter and back surface field.
Energy Environ. Sci.
Copper indium gallium selenide (CIGS) based solar cells are receiving worldwide attention for sol... more Copper indium gallium selenide (CIGS) based solar cells are receiving worldwide attention for solar power generation.
Transactions on Electrical and Electronic Materials, 2011
Progress in Materials Science, 2016
Since its invention in the 1950s, semiconductor solar cell technology has evolved in great leaps ... more Since its invention in the 1950s, semiconductor solar cell technology has evolved in great leaps and bounds. Solar power is now being considered as a serious leading contender for replacing fossil fuel based power generation. This article reviews the evolution and current state, and potential areas of near future research focus, of leading inorganic materials based solar cells, including bulk crystalline, amorphous thin-films, and nanomaterials based solar cells. Bulk crystalline silicon solar cells continue to dominate the solar power market, and continued efforts at device fabrication improvements, and device topology advancements are discussed. III-V compound semiconductor materials on c-Si for solar power generation are also reviewed. Developments in thin-film based solar cells are reviewed, with a focus on amorphous silicon, copper zinc tin sulfide, cadmium telluride, as well as nanostructured Cadmium telluride. Recent developments in the use of nano-materials for solar power generation, including silicon and gallium arsenide nanowires, are also reviewed. 3 CONTENTS Abstract Contents 7.81. Hot carriers 7.8.2 Quantum dots 7.8.3 Up conversion 7.9 Future outlook 8.0 CZTSSe (Kesterite) solar cells 8.1 CZTSSe materials 8.2 Fabrication approaches 8.3 Device characteristics 8.3.1 Electrical characteristics 8.3.2 The V oc deficit in CZTSSe 8.4 Future direction 9.0 Planar thin-film and nanostructured CdTe solar cells 9.1 Properties of materials used in CdS/CdTe solar cells 9.2 Thin-film CdS/CdTe solar cells 9.2.1 Concepts and preparation methods 9.2.2 CdTe solar cell parameters and properties 9.2.3 Defects in CdTe solar cells 9.2.4 Novelties and improvements 9.3 CdTe nanostructured solar cells 9.3.1 Concepts and advantages 9.3.2 Types of nanostructures and mechanisms of formation 9.3.3 Characteristics of nanostructures and CdTe nanostructured solar cells 9.4 Future direction 10.0 SiNW solar cells 10.1 SiNW formation 10.2 Nanowire solar cell concepts 10.2.1 Axial and radial junctions 10.2.2 Substrate variations and random versus organized SiNWs 10.3 Current status and challenges 10.3.1 Challenges for mass production 10.4 Future outlook on promising concepts 11.0 GaAs and its related nanowires for solar cells 11.1 Basics of GaAs nanowire growth 11.2 GaAs nanowire based PV structures 11.2.1 PV devices based on GaAs nanowire arrays 11.2.2 PV devices based on single GaAS nanowire 11.3 PV devices based on other III-V material nanowire arrays 11.4 Future outlook 12.0 Conclusions
Vacuum, 1999
Parametric investigations of the low-pressure Se vapor selenization process for the formation of ... more Parametric investigations of the low-pressure Se vapor selenization process for the formation of optically transparent single-phase ZnSe "lms from bilayer In/Zn precursors are described. An optimized In/Zn bilayer precursor "lm deposition procedure that eliminates the well-known inhomogeneity problem is described. Selenization reactor pressure controls the reactant availability and the selenization temperature controls the reaction rate. Their e!ect on the crystalline microstructure and optical band gap reveals that the optimal growth occurs at 3503C and 0.5}1 mbar. X-ray photoelectron spectroscopy data con"rm electron charge transfer from Zn to Se leading to ZnSe formation, the absence of multiple valance states for the elements and the formation of single-phase cubic ZnSe. The optical bandgap is 2.68$0.05 eV which decreases marginally with selenization temperature. Electrical resistivity is +10 cm and the donor activation energy 0.25 eV.
Proceedings of SPIE - The International Society for Optical Engineering
Materials Research Bulletin
Thin polycrystalline CuInSe[sub 2] films were cathodically deposited on titanium and SnO[sub 2] c... more Thin polycrystalline CuInSe[sub 2] films were cathodically deposited on titanium and SnO[sub 2] coated glass at potentials ranging from [minus]350 mV to [minus]750 mV vs SCE from aqueous sulfate bath using citric acid as complexing agent. The films were annealed at 425 C in an argon atmosphere and characterized by X-ray diffraction and EPMA. From the XRD analysis the structure of the film was found to be tetragonal. The composition of the as deposited film was found to be 1:1:2 by EPMA. From the optical studies the band gap was found to be 1.02 eV. All the as deposited films were found to be p-type. On post heat treatment at 425 C the films deposited at or above [minus]650 mV changed to n-type whereas below [minus]650 mV p-type films only were obtained.
ABSTRACT Conventional crystalline Si (c-Si) solar cell technology has improved over the last seve... more ABSTRACT Conventional crystalline Si (c-Si) solar cell technology has improved over the last several decades and plays a dominant role in commercial solar power generation. For grid parity (i.e. cost-competitive with traditional grid supply), innovative manufacturable technology is required to achieve high cell efficiency at lower cost. As current technology stands, the cost versus efficiency ratio of traditional bulk c-Si based solar cells is very high due to manufacturing costs associated with high thermal budget and various processing steps that lowers throughput. We have developed a simple low cost spin-coating method to fabricate c-Si solar cells that yields high throughput and lowers production cost. Our low-cost fabrication method and characterization results will be presented. Also, our device modeling studies on high efficiency back heterojunction solar cells, that combines the advantages of SANYO type and SUNPOWER type cells, will be presented. Illustrative process flow wi...
Abstract Cost effective solar cells are very important for solar power to compete with traditiona... more Abstract Cost effective solar cells are very important for solar power to compete with traditional power generation technologies. As current technology stands, the cost versus efficiency ratio of traditional bulk crystalline silicon (c-Si) based solar cells is very high due to manufacturing costs associated with the thermal budget and various processing steps. We demonstrate that bulk crystalline silicon (c-Si) based solar cell with spin-on dopants (SOD) and texturized surface has an efficiency of about 17%. Our SOD process significantly reduces thermal budget and cost/efficiency ratio of the solar cell.
DESCRIPTION International Conference on Green Energy & Expo, Orlando, USA September 21-23, 2015
In commercial solar power generation c-Si solar cells plays a dominant role. To achieve grid pari... more In commercial solar power generation c-Si solar cells plays a dominant role. To achieve grid parity (i.e., cost-competitiveness with traditional grid supply) high efficiency and reduced production costs are very important. There are two approaches [1] to reduce ($/W p) the cost: (i) use spin-on dopants, lower quality Si feedstock, and thinner wafers, and (ii) increase the efficiency using local back surface field, selective emitter and interdigitated back contact design. In other words, the two approaches are: reduce the numerator in $/W p by using cheaper process or increase the denominator by producing high efficiency cells, or both. In this work, three different processes were used for p +-p-n + type c-Si solar cell fabrication. In one process (i.e., top side spin-on process) the p-n junction was formed by using spin-on phosphoric acid followed by rapid thermal processing (RTP) and BSF region was formed by e-beam evaporation of Al followed by RTP. In another process (bottom side ...
RSC Adv., 2014
Cost effective solar cells are paramount for solar power to compete with traditional power genera... more Cost effective solar cells are paramount for solar power to compete with traditional power generation. Here we present results on two low cost, both side textured c-Si solar cells. One solar cell had an Al back surface field (BSF), while the other had boron BSF fabricated by using spin-on boric acid as a p-type dopant. As compared to the Al-BSF solar cell, an improvement in efficiency of 1.7% was observed for a solar cell with boron BSF. Since boron BSF is stronger than Al-BSF, an improvement in efficiency can be attributed to an increase in long wavelength response, collection efficiency and reduced back surface recombination. The boron BSF solar cell showed an efficiency of 12.9% with V oc of 0.56 V, J sc of 32.2 mA cm À2 and FF of 0.72. These parameters are expected to significantly increase further with the addition of layers such as anti-reflection/passivation layers at the front side, and back surface passivation with local back surface field, etc.
2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595), 2002
The issues concerning the integration of polymeric low-permittivity (low-k) dielectrics in amorph... more The issues concerning the integration of polymeric low-permittivity (low-k) dielectrics in amorphous Si (a-Si) thin-film transistor (TFT) arrays have been investigated. A photosensitive spin-on polymer, Photo-Benzocyclobutene (PBCB), has been studied for integration as interlevel dielectric between the transistor and pixel levels in TFT arrays. The dielectric films were characterized by permittivity, stress, and planarization measurements. The dielectric constant was found to be in the range of 2.5-3.5. The degree of planarization was >90%, and the film stress was about 60 MPa. Process parameters have been optimized for integration in TFT arrays. Measurements on test structures showed low leakage current and good electrical contact at via interconnections.
ABSTRACT A photosensitive spin-on polymer, photo-Benzocyclobutene (PBCB), has been studied for us... more ABSTRACT A photosensitive spin-on polymer, photo-Benzocyclobutene (PBCB), has been studied for use as an interlevel dielectric between the transistor and the pixel levels in amorphous Si thin film transistor (a-Si TFT) arrays. PBCB is well suited for the low-temperature processing nature of a-Si technology. Via opening in the photosensitive low-k films by UV illumination, as well as via residue removal techniques by both wet and dry etching schemes have been studied. Conditions have been found for the optimum via sidewall angle. A reactive ion etching (RIE) based dry etching scheme has been developed, and etching at low process pressures (<25 mT) is found to be suitable for the integration process. Measurements on test structures showed low leakage current (<10-10A) and low resistance for via interconnection.
Renewable Energy, 2015
ABSTRACT This paper reports the fabrication of c-Si based solar cells using spin-on dopants. Sola... more ABSTRACT This paper reports the fabrication of c-Si based solar cells using spin-on dopants. Solar cells were developed by texturing both surfaces of the c-Si, and forming the p–n junction by spin-coating the n-type dopant followed by rapid thermal processing (RTP). For back surface field formation on the rear side, a similar spin-coating step was undertaken for one cell and e-beam Al deposition for the other. In the case of double-sided spin-coated cell, simultaneous p–n junction and back surface field were formed in one RTP cycle. Without using high performance features in the device, double-sided spin-on doped cell showed Voc of 600 ± 0.01 mV, Jsc of 33.1 ± 0.03 mA/cm2, FF of 74.26 ± 0.06% and efficiency of 14.74%. As compared to single-sided spin-on doped cell, an improvement in efficiency of about 1.3% has been obtained which can be attributed to boron back surface field. Double-sided spin-on process significantly reduces thermal budget and improves throughput. Besides texturization, high efficiency features have not been used in the device. The results clearly demonstrate that c-Si based solar cells are potentially cost effective to manufacture.
Materials Express, 2011
Over the last few years silicon nanowires have come under intensive research due to their promisi... more Over the last few years silicon nanowires have come under intensive research due to their promising physical properties and potential as active materials in future electronic and optoelectronic applications. This article reviews various bottom-up growth methods of silicon nanowires. Various catalysts, including gold and other metals, as well as non-catalyst initiated growth methods are discussed in detail by comparing recipes including important parameters such as growth temperature, catalyst deposition methods, silicon nanowires diameter obtained, surface quality etc. This is expected to allow for an easier selection of a suitable growth method for a desired application. In addition, this article briefly reviews some of the developments in the field of silicon nanowire electronics and optoelectronics, including theoretical and experimental determination of charge carrier mobilities, visible photoluminescence, as well as a few recent examples of photodetectors and solar cells using silicon nanowires.
Solar Energy Materials and Solar Cells, 2013
ABSTRACT We report on the theoretical investigation of a silicon-based interdigitated back contac... more ABSTRACT We report on the theoretical investigation of a silicon-based interdigitated back contact back heterojunction (BHJ) solar cell that combines the advantages of heterojunction with intrinsic thin layer (HIT) solar cell and point contact back junction c-Si solar cell. Our results show an optimum bandgap for emitter (p-type a-Si:H) layer for this cell to be approximately 1.72 eV. As we increase the bandgap from 1.3 eV to 2.2 eV, the open circuit voltage (Voc) increases from 0.45 V to 0.75 V and then saturates, while the short circuit current density (Jsc) remains constant at 35 mA/cm2 up to about 2.0 eV, and then decreases to zero. Fill factor (FF) increases from 57% to a maximum of 75% as the bandgap increases from 1.3 eV to ∼1.72 eV, respectively, and then decrease to 5% when the bandgap reaches 2.1 eV. Efficiency increases from 7% and reaches a maximum of about 19% at around 1.7 eV and then decreases to zero at 2.1 eV. These results can be correlated to changes in valance band spike (barrier) when emitter bandgap increases from 1.3 eV to 2.2 eV, and are explained in terms of band alignment between p-a-Si:H/i-a-Si:H/n-type-c-Si.
Microelectronic Engineering, 2012
An organic liquid polymer based on methyltriethoxysilane has been synthesized. The material;when ... more An organic liquid polymer based on methyltriethoxysilane has been synthesized. The material;when spin-coated onto wafers and thermally treated;lead to dielectric films of low permittivity;which can be used in hydrogenated amorphous silicon (a-Si:H) thin film transistor (TFT) based large area imaging arrays as an inter-level dielectric between the TFT and pixel levels. Fourier Transform Infrared Spectroscopy (FTIR) shows prominent peaks of Si-CH 3 stretch and Si-O stretch modes. The dielectric constant (k) of the film was found to decrease with increasing curing temperature (T cure). However;k values were < 3 for T cure < 260°C;which is the upper limit for our a-Si:H process. Thermogravimetric analysis showed that major weight loss takes place for up to 200°C;and the film stabilizes thereafter. The stress in the films was found to be compressive;and increased from 50 to 220 MPa when T cure was increased from 250 to 450°C. The low stress for low T cure is a desirable property for film integration.
Progress in Materials Science
MRS Proceedings
Hydrogen silsesquioxane (HSQ), a low dielectric constant material was deposited by spin coating o... more Hydrogen silsesquioxane (HSQ), a low dielectric constant material was deposited by spin coating on Si substrates. The films were cured between 175°C and 575°C. The cured films were subjected to ion-accelerated hydrogen plasma at different DC bias voltage to reduce the dielectric constant (k) of the films. The effect of ion-accelerated hydrogen plasma on cured films was discussed and compared with (i) non-plasma, and (ii) hydrogen plasma without the accelerating DC bias. Capacitance-Voltage measurements (C-V) and Fourier Transform Infrared Spectroscopy (FTIR) studies were done on these films. The C-V measurement shows that k values increase as the curing temperature increases for all the cases. A PECVD system was used for plasma hydrogenation and ion-accelerated plasma hydrogenation. Depending on the curing temperature the dielectric constant values were found to be, (i) between ∼ 3 and 8.8 for nonplasma films, (ii) between ∼3 and 5.1 for plasma hydrogenated films, (iii) between ∼ 2....
Materials Express
Amorphous silicon films are currently receiving a worldwide renewed and intense research and comm... more Amorphous silicon films are currently receiving a worldwide renewed and intense research and commercial focus for low-cost solar power generation. In this article we review the history and current status of hydrogenated amorphous silicon films (a-Si:H) for thin film photovoltaics, and the role of intrinsic a-Si:H films in heterojunction (a-Si:H/c-Si) solar cells. The focus of this article is on plasma enhanced chemical vapor deposition (PECVD) of these films from silane (SiH 4). Very high frequency (VHF) PECVD deposition and its limitations are discussed. Properties and requirements of intrinsic and doped a-Si:H films are presented. Light-induced degradation of a-Si:H films are reviewed in detail. Current status of single junction a-Si:H solar cells and factors influencing cell performance are also discussed. Since the efficiency and stability of thin film a-Si:H solar cells are low, a-Si:H films can be successfully used in other solar cell technologies such as c-Si based back heterojunction solar cells, where doped a-Si:H films are used at the rear side of the substrate for emitter and back surface field.
Energy Environ. Sci.
Copper indium gallium selenide (CIGS) based solar cells are receiving worldwide attention for sol... more Copper indium gallium selenide (CIGS) based solar cells are receiving worldwide attention for solar power generation.
Transactions on Electrical and Electronic Materials, 2011
Progress in Materials Science, 2016
Since its invention in the 1950s, semiconductor solar cell technology has evolved in great leaps ... more Since its invention in the 1950s, semiconductor solar cell technology has evolved in great leaps and bounds. Solar power is now being considered as a serious leading contender for replacing fossil fuel based power generation. This article reviews the evolution and current state, and potential areas of near future research focus, of leading inorganic materials based solar cells, including bulk crystalline, amorphous thin-films, and nanomaterials based solar cells. Bulk crystalline silicon solar cells continue to dominate the solar power market, and continued efforts at device fabrication improvements, and device topology advancements are discussed. III-V compound semiconductor materials on c-Si for solar power generation are also reviewed. Developments in thin-film based solar cells are reviewed, with a focus on amorphous silicon, copper zinc tin sulfide, cadmium telluride, as well as nanostructured Cadmium telluride. Recent developments in the use of nano-materials for solar power generation, including silicon and gallium arsenide nanowires, are also reviewed. 3 CONTENTS Abstract Contents 7.81. Hot carriers 7.8.2 Quantum dots 7.8.3 Up conversion 7.9 Future outlook 8.0 CZTSSe (Kesterite) solar cells 8.1 CZTSSe materials 8.2 Fabrication approaches 8.3 Device characteristics 8.3.1 Electrical characteristics 8.3.2 The V oc deficit in CZTSSe 8.4 Future direction 9.0 Planar thin-film and nanostructured CdTe solar cells 9.1 Properties of materials used in CdS/CdTe solar cells 9.2 Thin-film CdS/CdTe solar cells 9.2.1 Concepts and preparation methods 9.2.2 CdTe solar cell parameters and properties 9.2.3 Defects in CdTe solar cells 9.2.4 Novelties and improvements 9.3 CdTe nanostructured solar cells 9.3.1 Concepts and advantages 9.3.2 Types of nanostructures and mechanisms of formation 9.3.3 Characteristics of nanostructures and CdTe nanostructured solar cells 9.4 Future direction 10.0 SiNW solar cells 10.1 SiNW formation 10.2 Nanowire solar cell concepts 10.2.1 Axial and radial junctions 10.2.2 Substrate variations and random versus organized SiNWs 10.3 Current status and challenges 10.3.1 Challenges for mass production 10.4 Future outlook on promising concepts 11.0 GaAs and its related nanowires for solar cells 11.1 Basics of GaAs nanowire growth 11.2 GaAs nanowire based PV structures 11.2.1 PV devices based on GaAs nanowire arrays 11.2.2 PV devices based on single GaAS nanowire 11.3 PV devices based on other III-V material nanowire arrays 11.4 Future outlook 12.0 Conclusions
Vacuum, 1999
Parametric investigations of the low-pressure Se vapor selenization process for the formation of ... more Parametric investigations of the low-pressure Se vapor selenization process for the formation of optically transparent single-phase ZnSe "lms from bilayer In/Zn precursors are described. An optimized In/Zn bilayer precursor "lm deposition procedure that eliminates the well-known inhomogeneity problem is described. Selenization reactor pressure controls the reactant availability and the selenization temperature controls the reaction rate. Their e!ect on the crystalline microstructure and optical band gap reveals that the optimal growth occurs at 3503C and 0.5}1 mbar. X-ray photoelectron spectroscopy data con"rm electron charge transfer from Zn to Se leading to ZnSe formation, the absence of multiple valance states for the elements and the formation of single-phase cubic ZnSe. The optical bandgap is 2.68$0.05 eV which decreases marginally with selenization temperature. Electrical resistivity is +10 cm and the donor activation energy 0.25 eV.
Proceedings of SPIE - The International Society for Optical Engineering
Materials Research Bulletin
Thin polycrystalline CuInSe[sub 2] films were cathodically deposited on titanium and SnO[sub 2] c... more Thin polycrystalline CuInSe[sub 2] films were cathodically deposited on titanium and SnO[sub 2] coated glass at potentials ranging from [minus]350 mV to [minus]750 mV vs SCE from aqueous sulfate bath using citric acid as complexing agent. The films were annealed at 425 C in an argon atmosphere and characterized by X-ray diffraction and EPMA. From the XRD analysis the structure of the film was found to be tetragonal. The composition of the as deposited film was found to be 1:1:2 by EPMA. From the optical studies the band gap was found to be 1.02 eV. All the as deposited films were found to be p-type. On post heat treatment at 425 C the films deposited at or above [minus]650 mV changed to n-type whereas below [minus]650 mV p-type films only were obtained.
ABSTRACT Conventional crystalline Si (c-Si) solar cell technology has improved over the last seve... more ABSTRACT Conventional crystalline Si (c-Si) solar cell technology has improved over the last several decades and plays a dominant role in commercial solar power generation. For grid parity (i.e. cost-competitive with traditional grid supply), innovative manufacturable technology is required to achieve high cell efficiency at lower cost. As current technology stands, the cost versus efficiency ratio of traditional bulk c-Si based solar cells is very high due to manufacturing costs associated with high thermal budget and various processing steps that lowers throughput. We have developed a simple low cost spin-coating method to fabricate c-Si solar cells that yields high throughput and lowers production cost. Our low-cost fabrication method and characterization results will be presented. Also, our device modeling studies on high efficiency back heterojunction solar cells, that combines the advantages of SANYO type and SUNPOWER type cells, will be presented. Illustrative process flow wi...
Abstract Cost effective solar cells are very important for solar power to compete with traditiona... more Abstract Cost effective solar cells are very important for solar power to compete with traditional power generation technologies. As current technology stands, the cost versus efficiency ratio of traditional bulk crystalline silicon (c-Si) based solar cells is very high due to manufacturing costs associated with the thermal budget and various processing steps. We demonstrate that bulk crystalline silicon (c-Si) based solar cell with spin-on dopants (SOD) and texturized surface has an efficiency of about 17%. Our SOD process significantly reduces thermal budget and cost/efficiency ratio of the solar cell.
DESCRIPTION International Conference on Green Energy & Expo, Orlando, USA September 21-23, 2015
In commercial solar power generation c-Si solar cells plays a dominant role. To achieve grid pari... more In commercial solar power generation c-Si solar cells plays a dominant role. To achieve grid parity (i.e., cost-competitiveness with traditional grid supply) high efficiency and reduced production costs are very important. There are two approaches [1] to reduce ($/W p) the cost: (i) use spin-on dopants, lower quality Si feedstock, and thinner wafers, and (ii) increase the efficiency using local back surface field, selective emitter and interdigitated back contact design. In other words, the two approaches are: reduce the numerator in $/W p by using cheaper process or increase the denominator by producing high efficiency cells, or both. In this work, three different processes were used for p +-p-n + type c-Si solar cell fabrication. In one process (i.e., top side spin-on process) the p-n junction was formed by using spin-on phosphoric acid followed by rapid thermal processing (RTP) and BSF region was formed by e-beam evaporation of Al followed by RTP. In another process (bottom side ...
RSC Adv., 2014
Cost effective solar cells are paramount for solar power to compete with traditional power genera... more Cost effective solar cells are paramount for solar power to compete with traditional power generation. Here we present results on two low cost, both side textured c-Si solar cells. One solar cell had an Al back surface field (BSF), while the other had boron BSF fabricated by using spin-on boric acid as a p-type dopant. As compared to the Al-BSF solar cell, an improvement in efficiency of 1.7% was observed for a solar cell with boron BSF. Since boron BSF is stronger than Al-BSF, an improvement in efficiency can be attributed to an increase in long wavelength response, collection efficiency and reduced back surface recombination. The boron BSF solar cell showed an efficiency of 12.9% with V oc of 0.56 V, J sc of 32.2 mA cm À2 and FF of 0.72. These parameters are expected to significantly increase further with the addition of layers such as anti-reflection/passivation layers at the front side, and back surface passivation with local back surface field, etc.
2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595), 2002
The issues concerning the integration of polymeric low-permittivity (low-k) dielectrics in amorph... more The issues concerning the integration of polymeric low-permittivity (low-k) dielectrics in amorphous Si (a-Si) thin-film transistor (TFT) arrays have been investigated. A photosensitive spin-on polymer, Photo-Benzocyclobutene (PBCB), has been studied for integration as interlevel dielectric between the transistor and pixel levels in TFT arrays. The dielectric films were characterized by permittivity, stress, and planarization measurements. The dielectric constant was found to be in the range of 2.5-3.5. The degree of planarization was >90%, and the film stress was about 60 MPa. Process parameters have been optimized for integration in TFT arrays. Measurements on test structures showed low leakage current and good electrical contact at via interconnections.
ABSTRACT A photosensitive spin-on polymer, photo-Benzocyclobutene (PBCB), has been studied for us... more ABSTRACT A photosensitive spin-on polymer, photo-Benzocyclobutene (PBCB), has been studied for use as an interlevel dielectric between the transistor and the pixel levels in amorphous Si thin film transistor (a-Si TFT) arrays. PBCB is well suited for the low-temperature processing nature of a-Si technology. Via opening in the photosensitive low-k films by UV illumination, as well as via residue removal techniques by both wet and dry etching schemes have been studied. Conditions have been found for the optimum via sidewall angle. A reactive ion etching (RIE) based dry etching scheme has been developed, and etching at low process pressures (<25 mT) is found to be suitable for the integration process. Measurements on test structures showed low leakage current (<10-10A) and low resistance for via interconnection.
Renewable Energy, 2015
ABSTRACT This paper reports the fabrication of c-Si based solar cells using spin-on dopants. Sola... more ABSTRACT This paper reports the fabrication of c-Si based solar cells using spin-on dopants. Solar cells were developed by texturing both surfaces of the c-Si, and forming the p–n junction by spin-coating the n-type dopant followed by rapid thermal processing (RTP). For back surface field formation on the rear side, a similar spin-coating step was undertaken for one cell and e-beam Al deposition for the other. In the case of double-sided spin-coated cell, simultaneous p–n junction and back surface field were formed in one RTP cycle. Without using high performance features in the device, double-sided spin-on doped cell showed Voc of 600 ± 0.01 mV, Jsc of 33.1 ± 0.03 mA/cm2, FF of 74.26 ± 0.06% and efficiency of 14.74%. As compared to single-sided spin-on doped cell, an improvement in efficiency of about 1.3% has been obtained which can be attributed to boron back surface field. Double-sided spin-on process significantly reduces thermal budget and improves throughput. Besides texturization, high efficiency features have not been used in the device. The results clearly demonstrate that c-Si based solar cells are potentially cost effective to manufacture.
Materials Express, 2011
Over the last few years silicon nanowires have come under intensive research due to their promisi... more Over the last few years silicon nanowires have come under intensive research due to their promising physical properties and potential as active materials in future electronic and optoelectronic applications. This article reviews various bottom-up growth methods of silicon nanowires. Various catalysts, including gold and other metals, as well as non-catalyst initiated growth methods are discussed in detail by comparing recipes including important parameters such as growth temperature, catalyst deposition methods, silicon nanowires diameter obtained, surface quality etc. This is expected to allow for an easier selection of a suitable growth method for a desired application. In addition, this article briefly reviews some of the developments in the field of silicon nanowire electronics and optoelectronics, including theoretical and experimental determination of charge carrier mobilities, visible photoluminescence, as well as a few recent examples of photodetectors and solar cells using silicon nanowires.
Solar Energy Materials and Solar Cells, 2013
ABSTRACT We report on the theoretical investigation of a silicon-based interdigitated back contac... more ABSTRACT We report on the theoretical investigation of a silicon-based interdigitated back contact back heterojunction (BHJ) solar cell that combines the advantages of heterojunction with intrinsic thin layer (HIT) solar cell and point contact back junction c-Si solar cell. Our results show an optimum bandgap for emitter (p-type a-Si:H) layer for this cell to be approximately 1.72 eV. As we increase the bandgap from 1.3 eV to 2.2 eV, the open circuit voltage (Voc) increases from 0.45 V to 0.75 V and then saturates, while the short circuit current density (Jsc) remains constant at 35 mA/cm2 up to about 2.0 eV, and then decreases to zero. Fill factor (FF) increases from 57% to a maximum of 75% as the bandgap increases from 1.3 eV to ∼1.72 eV, respectively, and then decrease to 5% when the bandgap reaches 2.1 eV. Efficiency increases from 7% and reaches a maximum of about 19% at around 1.7 eV and then decreases to zero at 2.1 eV. These results can be correlated to changes in valance band spike (barrier) when emitter bandgap increases from 1.3 eV to 2.2 eV, and are explained in terms of band alignment between p-a-Si:H/i-a-Si:H/n-type-c-Si.
Microelectronic Engineering, 2012
An organic liquid polymer based on methyltriethoxysilane has been synthesized. The material;when ... more An organic liquid polymer based on methyltriethoxysilane has been synthesized. The material;when spin-coated onto wafers and thermally treated;lead to dielectric films of low permittivity;which can be used in hydrogenated amorphous silicon (a-Si:H) thin film transistor (TFT) based large area imaging arrays as an inter-level dielectric between the TFT and pixel levels. Fourier Transform Infrared Spectroscopy (FTIR) shows prominent peaks of Si-CH 3 stretch and Si-O stretch modes. The dielectric constant (k) of the film was found to decrease with increasing curing temperature (T cure). However;k values were < 3 for T cure < 260°C;which is the upper limit for our a-Si:H process. Thermogravimetric analysis showed that major weight loss takes place for up to 200°C;and the film stabilizes thereafter. The stress in the films was found to be compressive;and increased from 50 to 220 MPa when T cure was increased from 250 to 450°C. The low stress for low T cure is a desirable property for film integration.