Matthieu Guirardel - Academia.edu (original) (raw)

Uploads

Papers by Matthieu Guirardel

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), 2003

Arrays of silicon-based microcantilevers with passivated aluminum electrodes properly designed ha... more Arrays of silicon-based microcantilevers with passivated aluminum electrodes properly designed have been used to generate microarrays by depositing microspots of biological samples using a direct contact deposition technique. Using this approach, with a single loading, arrays of more than a hundred spots, from the femtoliter to the picoliter range, containing fluorescent-labelled oligonucleotides (15 mers) and proteins were directly patterned on

Sensors and Actuators A: Physical, 2004

This paper describes a cantilever-based microsystem that permits the deposition of picoliter biol... more This paper describes a cantilever-based microsystem that permits the deposition of picoliter biological samples using a contact or non-contact method. Arrays of silicon-based cantilevers have been used to produce DNA microarrays. An electrowetting-on-dielectric (EWOD) principle is applied for the loading of the liquid by controlling surface tension. Deposition is achieved by direct contact between cantilevers and the surface by capillary

Applied Physics Letters, 2003

Sensors and Actuators A: Physical, 2004

We have investigated the static and dynamic behavior of piezoelectric (PZT) actuated SiO2/Si memb... more We have investigated the static and dynamic behavior of piezoelectric (PZT) actuated SiO2/Si membranes with an off-centered PZT patch. Three-dimensional wide-field interferometer has been used to achieve measurement of membrane topography and bending. It is demonstrated that the piezoelectric coefficient d31 can be extracted directly from these three-dimensional static deformation measurements. We have also shown that polarization voltage of an

ETFA 2001. 8th International Conference on Emerging Technologies and Factory Automation. Proceedings (Cat. No.01TH8597), 2001

... being achieved at the expense of the junction depth since the transient enhanced diffusion ca... more ... being achieved at the expense of the junction depth since the transient enhanced diffusion causes ... E. Cocheteau, C.Bergaud, B. Belier, L. Bary, R. Plana, << Formation of ultra-shallow ])+In junctions ... JA Harley and TW Kenny, “l/f noise considerations for the design and process ...

ECS Transactions

This paper exhibits a microsensor solution to allow Love wave acoustic oscillators working under ... more This paper exhibits a microsensor solution to allow Love wave acoustic oscillators working under highly viscous liquid environments. Microfluidic techniques are employed to limit attenuation caused by viscous coupling using a poly(dimethylsiloxane) (PDMS) chip bonded on the Love wave device. Fabrication of PDMS chips is detailed. Several microfluidic chip geometries have been realized. Liquid flows of aqueous glycerol solutions up to 0.939 Pa.s (939cP, 98% glycerol) have been tested. Thanks to insertion losses diminution, we were able to observe the Newtonian to Maxwellian behaviour transition in an oscillator mode. Modelisation using the classical perturbation theory is discussed.

Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004., 2004

In this paper, we studied the dynamic behavior of micromachined piezoelectric membranes (PMs) as ... more In this paper, we studied the dynamic behavior of micromachined piezoelectric membranes (PMs) as an alternative to QCM biosensors. We use standing waves on our mechanical structures to obtain higher integration density. The 4×4 matrixes of PMs use PZT as a piezoelectric film whose geometries have been drawn by lift-off techniques. Each PM (circular shaped, with a radius equal to 150 μm) can be individually addressed for actuation and/or sensing. Here we show that the same kind of PMs exhibit excellent self-sensing capabilities by using the direct piezoelectric effect of the PZT layer. The open-loop resonant frequencies of several PMs were measured by examining the self-induced charge on the sense electrode using a proximity electronic circuit. We simultaneously performed resonant frequencies measured by means of a dynamic optical interferometer that completely matched the electrical self-sensed resonant spectra. In this case, the PMs were actuated in two different ways, either by using an external transducer or by using the self-actuating (reverse piezoelectric effect) capability of each membrane.

ECS Transactions, 2007

ABSTRACT This paper exhibits a microsensor solution to allow Love wave acoustic oscillators worki... more ABSTRACT This paper exhibits a microsensor solution to allow Love wave acoustic oscillators working under highly viscous liquid environments. Microfluidic techniques are employed to limit attenuation caused by viscous coupling using a poly(dimethylsiloxane) (PDMS) chip bonded on the Love wave device. Fabrication of PDMS chips is detailed. Several microfluidic chip geometries have been realized. Liquid flows of aqueous glycerol solutions up to 0.939 Pa.s (939cP, 98% glycerol) have been tested. Thanks to insertion losses diminution, we were able to observe the Newtonian to Maxwellian behaviour transition in an oscillator mode. Modelisation using the classical perturbation theory is discussed.

Journal of Sensors, 2012

Silicon microcantilevers can be used to measure the rheological properties of complex fluids. In ... more Silicon microcantilevers can be used to measure the rheological properties of complex fluids. In this paper, two different methods will be presented. In the first method, the microcantilever is used to measure the hydrodynamic force exerted by a confined fluid on a sphere that is attached to the microcantilever. In the second method, the measurement of the microcantilever's dynamic spectrum is used to extract the hydrodynamic force exerted by the surrounding fluid on the microcantilever. The originality of the proposed methods lies in the fact that not only may the viscosity of the fluid be measured, but also the fluid's viscoelasticity, that is, both viscous and elastic properties, which are key parameters in the case of complex fluids. In both methods, the use of analytical equations permits the fluid's complex shear modulus to be extracted and expressed as a function of shear stress and/or frequency.

Optical Micro- and Nanometrology in Manufacturing Technology, 2004

ABSTRACT

Review of scientific instruments, 2004

The Journal of Physical Chemistry C, 2012

Surface-enhanced Raman scattering (SERS)-based microfluidic platforms are investigated to optimiz... more Surface-enhanced Raman scattering (SERS)-based microfluidic platforms are investigated to optimize the detection of biomolecules using silver nanoparticles. The method is established using pefloxacin (an antibacterial agent) as a probe. We first monitor the continuous SERS signal of a 10 −5 M pefloxacin solution diffusing continuously into a silver nanoparticle stream across the shared interface separating the two-phase, segmented microfluidic laminar flow system. Diffusion of the pefloxacin adsorbate begins immediately after the two streams merge, generating silver aggregates and producing a huge enhancement of the Raman bands of pefloxacin. We show that the evolution of the SERS signal presents a diffusion-like behavior, whose dynamics can be easily monitored as the signal measured in the flow-wise direction is proportional to the reaction time. Finally, we demonstrate that it is possible to optimize SERS intensity spectra by adding a controlled amounts of chloride ions through a side channel to control silver particles aggregation and further enhance Raman scattering.

Sensors and Actuators B: Chemical, 2010

Love wave acoustic sensors have shown through the years a great potentiality regarding measuremen... more Love wave acoustic sensors have shown through the years a great potentiality regarding measurements in liquid environments, especially in the field of biosensors. Their high sensitivity to surface perturbations make them also good candidates for micro-rheology. In this paper, we demonstrate that a Love wave sensor response is also very sensitive to the molecular structure of polymers by investigating its behavior to aqueous poly(ethylene glycol) solutions of various molecular weights. We also report the ability of this type of sensor to determine the critical molecular weight between entanglements (M c ).

Sensors and Actuators B: Chemical, 2010

In this paper authors report a method to determine the complex shear modulus of fluids using a Lo... more In this paper authors report a method to determine the complex shear modulus of fluids using a Love wave acoustic sensor in oscillator mode. A combined measurement of frequency shift and insertion losses associated with the perturbation theory gives access to the storage modulus G and the loss modulus G of poly(dimethylsiloxane)s.

Sensors and Actuators B: Chemical, 2005

... Full-size table. View Within Article. ... The dip-and-dry technique consists of a repetitive ... more ... Full-size table. View Within Article. ... The dip-and-dry technique consists of a repetitive succession of the following steps: dipping of the sensor into the analyte solution, rinsing and drying it then carrying out the measurement of the resonant frequency of the sensor. ...

Sensors and Actuators A: Physical, 2008

This paper exhibits a microfluidic solution to allow Love wave acoustic oscillators working under... more This paper exhibits a microfluidic solution to allow Love wave acoustic oscillators working under highly viscous liquid environments. Attenuation caused by viscous coupling is limited by using a poly(dimethylsiloxane) (PDMS) chip bonded on the Love wave device. Liquid volume required for a measurement is thus minimized to the microliter order. Thanks to insertion losses decrease, the non-Newtonian behavior of silicone oils up to 30 Pa s can be observed in oscillator mode. Numerical simulations based on the transfer matrix method have been performed to modelize the sensor response.

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), 2003

Arrays of silicon-based microcantilevers with passivated aluminum electrodes properly designed ha... more Arrays of silicon-based microcantilevers with passivated aluminum electrodes properly designed have been used to generate microarrays by depositing microspots of biological samples using a direct contact deposition technique. Using this approach, with a single loading, arrays of more than a hundred spots, from the femtoliter to the picoliter range, containing fluorescent-labelled oligonucleotides (15 mers) and proteins were directly patterned on

Sensors and Actuators A: Physical, 2004

This paper describes a cantilever-based microsystem that permits the deposition of picoliter biol... more This paper describes a cantilever-based microsystem that permits the deposition of picoliter biological samples using a contact or non-contact method. Arrays of silicon-based cantilevers have been used to produce DNA microarrays. An electrowetting-on-dielectric (EWOD) principle is applied for the loading of the liquid by controlling surface tension. Deposition is achieved by direct contact between cantilevers and the surface by capillary

Applied Physics Letters, 2003

Sensors and Actuators A: Physical, 2004

We have investigated the static and dynamic behavior of piezoelectric (PZT) actuated SiO2/Si memb... more We have investigated the static and dynamic behavior of piezoelectric (PZT) actuated SiO2/Si membranes with an off-centered PZT patch. Three-dimensional wide-field interferometer has been used to achieve measurement of membrane topography and bending. It is demonstrated that the piezoelectric coefficient d31 can be extracted directly from these three-dimensional static deformation measurements. We have also shown that polarization voltage of an

ETFA 2001. 8th International Conference on Emerging Technologies and Factory Automation. Proceedings (Cat. No.01TH8597), 2001

... being achieved at the expense of the junction depth since the transient enhanced diffusion ca... more ... being achieved at the expense of the junction depth since the transient enhanced diffusion causes ... E. Cocheteau, C.Bergaud, B. Belier, L. Bary, R. Plana, << Formation of ultra-shallow ])+In junctions ... JA Harley and TW Kenny, “l/f noise considerations for the design and process ...

ECS Transactions

This paper exhibits a microsensor solution to allow Love wave acoustic oscillators working under ... more This paper exhibits a microsensor solution to allow Love wave acoustic oscillators working under highly viscous liquid environments. Microfluidic techniques are employed to limit attenuation caused by viscous coupling using a poly(dimethylsiloxane) (PDMS) chip bonded on the Love wave device. Fabrication of PDMS chips is detailed. Several microfluidic chip geometries have been realized. Liquid flows of aqueous glycerol solutions up to 0.939 Pa.s (939cP, 98% glycerol) have been tested. Thanks to insertion losses diminution, we were able to observe the Newtonian to Maxwellian behaviour transition in an oscillator mode. Modelisation using the classical perturbation theory is discussed.

Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004., 2004

In this paper, we studied the dynamic behavior of micromachined piezoelectric membranes (PMs) as ... more In this paper, we studied the dynamic behavior of micromachined piezoelectric membranes (PMs) as an alternative to QCM biosensors. We use standing waves on our mechanical structures to obtain higher integration density. The 4×4 matrixes of PMs use PZT as a piezoelectric film whose geometries have been drawn by lift-off techniques. Each PM (circular shaped, with a radius equal to 150 μm) can be individually addressed for actuation and/or sensing. Here we show that the same kind of PMs exhibit excellent self-sensing capabilities by using the direct piezoelectric effect of the PZT layer. The open-loop resonant frequencies of several PMs were measured by examining the self-induced charge on the sense electrode using a proximity electronic circuit. We simultaneously performed resonant frequencies measured by means of a dynamic optical interferometer that completely matched the electrical self-sensed resonant spectra. In this case, the PMs were actuated in two different ways, either by using an external transducer or by using the self-actuating (reverse piezoelectric effect) capability of each membrane.

ECS Transactions, 2007

ABSTRACT This paper exhibits a microsensor solution to allow Love wave acoustic oscillators worki... more ABSTRACT This paper exhibits a microsensor solution to allow Love wave acoustic oscillators working under highly viscous liquid environments. Microfluidic techniques are employed to limit attenuation caused by viscous coupling using a poly(dimethylsiloxane) (PDMS) chip bonded on the Love wave device. Fabrication of PDMS chips is detailed. Several microfluidic chip geometries have been realized. Liquid flows of aqueous glycerol solutions up to 0.939 Pa.s (939cP, 98% glycerol) have been tested. Thanks to insertion losses diminution, we were able to observe the Newtonian to Maxwellian behaviour transition in an oscillator mode. Modelisation using the classical perturbation theory is discussed.

Journal of Sensors, 2012

Silicon microcantilevers can be used to measure the rheological properties of complex fluids. In ... more Silicon microcantilevers can be used to measure the rheological properties of complex fluids. In this paper, two different methods will be presented. In the first method, the microcantilever is used to measure the hydrodynamic force exerted by a confined fluid on a sphere that is attached to the microcantilever. In the second method, the measurement of the microcantilever's dynamic spectrum is used to extract the hydrodynamic force exerted by the surrounding fluid on the microcantilever. The originality of the proposed methods lies in the fact that not only may the viscosity of the fluid be measured, but also the fluid's viscoelasticity, that is, both viscous and elastic properties, which are key parameters in the case of complex fluids. In both methods, the use of analytical equations permits the fluid's complex shear modulus to be extracted and expressed as a function of shear stress and/or frequency.

Optical Micro- and Nanometrology in Manufacturing Technology, 2004

ABSTRACT

Review of scientific instruments, 2004

The Journal of Physical Chemistry C, 2012

Surface-enhanced Raman scattering (SERS)-based microfluidic platforms are investigated to optimiz... more Surface-enhanced Raman scattering (SERS)-based microfluidic platforms are investigated to optimize the detection of biomolecules using silver nanoparticles. The method is established using pefloxacin (an antibacterial agent) as a probe. We first monitor the continuous SERS signal of a 10 −5 M pefloxacin solution diffusing continuously into a silver nanoparticle stream across the shared interface separating the two-phase, segmented microfluidic laminar flow system. Diffusion of the pefloxacin adsorbate begins immediately after the two streams merge, generating silver aggregates and producing a huge enhancement of the Raman bands of pefloxacin. We show that the evolution of the SERS signal presents a diffusion-like behavior, whose dynamics can be easily monitored as the signal measured in the flow-wise direction is proportional to the reaction time. Finally, we demonstrate that it is possible to optimize SERS intensity spectra by adding a controlled amounts of chloride ions through a side channel to control silver particles aggregation and further enhance Raman scattering.

Sensors and Actuators B: Chemical, 2010

Love wave acoustic sensors have shown through the years a great potentiality regarding measuremen... more Love wave acoustic sensors have shown through the years a great potentiality regarding measurements in liquid environments, especially in the field of biosensors. Their high sensitivity to surface perturbations make them also good candidates for micro-rheology. In this paper, we demonstrate that a Love wave sensor response is also very sensitive to the molecular structure of polymers by investigating its behavior to aqueous poly(ethylene glycol) solutions of various molecular weights. We also report the ability of this type of sensor to determine the critical molecular weight between entanglements (M c ).

Sensors and Actuators B: Chemical, 2010

In this paper authors report a method to determine the complex shear modulus of fluids using a Lo... more In this paper authors report a method to determine the complex shear modulus of fluids using a Love wave acoustic sensor in oscillator mode. A combined measurement of frequency shift and insertion losses associated with the perturbation theory gives access to the storage modulus G and the loss modulus G of poly(dimethylsiloxane)s.

Sensors and Actuators B: Chemical, 2005

... Full-size table. View Within Article. ... The dip-and-dry technique consists of a repetitive ... more ... Full-size table. View Within Article. ... The dip-and-dry technique consists of a repetitive succession of the following steps: dipping of the sensor into the analyte solution, rinsing and drying it then carrying out the measurement of the resonant frequency of the sensor. ...

Sensors and Actuators A: Physical, 2008

This paper exhibits a microfluidic solution to allow Love wave acoustic oscillators working under... more This paper exhibits a microfluidic solution to allow Love wave acoustic oscillators working under highly viscous liquid environments. Attenuation caused by viscous coupling is limited by using a poly(dimethylsiloxane) (PDMS) chip bonded on the Love wave device. Liquid volume required for a measurement is thus minimized to the microliter order. Thanks to insertion losses decrease, the non-Newtonian behavior of silicone oils up to 30 Pa s can be observed in oscillator mode. Numerical simulations based on the transfer matrix method have been performed to modelize the sensor response.