M Hoummady - Academia.edu (original) (raw)
Papers by M Hoummady
Sensors and Actuators B: Chemical, 1992
Gas sensors using SAW oscillators are now well known. However, the corresponding devices based on... more Gas sensors using SAW oscillators are now well known. However, the corresponding devices based on shear horizontal (SH) plate-mode oscillators have not received so much attention. Although both of them work on a mass-loading effect due to adsorption properties of a chemical coating, SH plate-mode delay-line oscillators are considered to be more sensitive. Few results are available to support this assertion. Using computer simulation, the responses of the two sensor types are calculated and compared when their active chemical layer is the seat of gas-induced physical modifications. The simulation requires a knowledge of several physical constants for both materials (quartz and coating). The theoretical responses are expressed in terms of acoustic-wave phase velocity and calculated for different quartz crystal cuts by a perturbation method involving thickness, density and stiffness of the substrate and its coating. Used under the same conditions, the SH plate-mode device is found to be more sensitive than the SAW-mode one within a particular thickness domain.
Les microcapteurs font partie des microsystemes les plus etudies actuellement en raison des besoi... more Les microcapteurs font partie des microsystemes les plus etudies actuellement en raison des besoins grandissants de controle de processus industriels, mais aussi pour la securite et la protection de l'environnement. Quelques applications relatives aux capteurs micro-usines resonnants a ondes elastiques sont presentees. Ces dispositifs sont bases sur l'exploitation de la variation de frequence des oscillateurs associes. La frequence est une grandeur que l'on peut mesurer avec une tres grande precision, ce qui permet la realisation de capteurs de tres grande resolution. En fonction du domaine d'applications souhaite (mesures en phase gazeuse, en phase liquide, etc...), il est possible d'exploiter les proprietes de differentes ondes elastiques engendrees par des transducteurs interdigites. Ces ondes peuvent se propager dans des materiaux piezoelectriques comme le quartz, le LiNbO 3 ou sur substrat de silicium avec une couche mince piezoelectrique (AlN, ZnO)
Sensors and Actuators A: Physical, 1993
ABSTRACT
Sensors and Actuators B: Chemical, 1993
Review of Scientific Instruments, 1991
ABSTRACT This article presents an acoustic wave viscometer using shear bulk waves excited by inte... more ABSTRACT This article presents an acoustic wave viscometer using shear bulk waves excited by interdigital transducers on quartz. The attenuation of acoustic waves at the quartz‐liquid interface is associated with liquid viscosity. Good agreement is found between theoretical results and experiments. The device can be used for viscosity measurements up to 600 cP. For higher viscosity the high‐frequency rigidity modulus must be taken into account.
Archives des Maladies Professionnelles et de l'Environnement, 2016
The theoretical analysis of the possibility of measuring mass loading variations by means of bulk... more The theoretical analysis of the possibility of measuring mass loading variations by means of bulk wave modes generated with Interdigital Transducers (IDT) is addressed. Elastic waves are generated and detected by means of IDT transducers plated on piezoelectric fields or substrates. It was shown that both surface and bulk elastic waves can be launched by IDT's. The type of elastic
The concept and the operation of micromachined monolithic 2D Microscanner are reported. Quartz ma... more The concept and the operation of micromachined monolithic 2D Microscanner are reported. Quartz material is used for its bulk micromachining capability as well as for its piezoelectric properties. Due to direct and reverse piezoelectric effect, the used design allowed to integrate both actuators and displacement sensor. A finite element calculation was performed to predict the operation principle of the microscanner.
TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers, 1991
The authors report on surface acoustic wave NO2 sensors using quartz as the substrate and copper ... more The authors report on surface acoustic wave NO2 sensors using quartz as the substrate and copper phthalocyanine (Cu-PC) as the chemical interface. The electronics of this self-contained device have been miniaturized and integrated in the measurement cell. The operating temperature is 90°C and the quartz substrate cut was chosen so as to present its compensation point at this temperature. Theoretical
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1997
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1997
1999 7th IEEE International Conference on Emerging Technologies and Factory Automation. Proceedings ETFA '99 (Cat. No.99TH8467), 1999
We show how our ongoing work on remote controlled micro/nano-manipulation can be useful for the d... more We show how our ongoing work on remote controlled micro/nano-manipulation can be useful for the development of miniature, integrated manufacturing for IC development. The basic components for such a system have already been developed and are available. The advantages are reduced clean room volume, reduced dead-volume and exposed area and hence reduced losses of ultra-pure gases, low friction and low
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97), 1997
Reports on the characterization of higher resonant modes of microcantilevers made of silicon nitr... more Reports on the characterization of higher resonant modes of microcantilevers made of silicon nitride thin film. An optical technique (a Fabry-Perot interferometer with optical beam deflection technique combination) has been used to measure resonant frequencies, normal displacement and angular deflections in order to characterize mode vibrations. From the measurement of higher flexural mode resonant frequencies of one microcantilever, the mechanical
IEEE 1988 Ultrasonics Symposium Proceedings., 1988
ABSTRACT
Le Journal de Physique Colloques, 1990
-Les transducteurs à peignes interdigités, déposés sur un substrat piézoélectrique, peuvent excit... more -Les transducteurs à peignes interdigités, déposés sur un substrat piézoélectrique, peuvent exciter et détecter-des ondes acoustiques de nature très différente (ondes de Rayleigh, ondes confinées sous la surface, ondes de volume, etc.). Dans le cas du uartz (coups Y* 01, si le transducteur est tourné de 90' par rapport à l'axe cristallin X, seu%s les ondes transversales horizontales sont excitées. Leurs directions, comme Our toutes les ondes de volume, sont déterminbes par la fréquence du signal appliqué. k transducteur d'excitation émet un faisceau acoustique qui, en se réfléchissant sur la surface inférieure, se diri e alors vers la surface supérieure, où il peut être détecté par un second transducteur. Le guifage des ondes est diï aux réflexions successives sur les faces parallèles de la laque de quartz, Si elle est de faible é aisseur, l'interférence des ondes incidentes avec ?es ondes réfléchies, donne naissance à $es modes de plaque se propageant à des fréquences discrhtes. Les résultats de cette étude, à la fois théorique et expérimentale, sont présentés sous les deux aspects d'ondes guidées et de modes de plaque.
Proceedings of IEEE Ultrasonics Symposium, 1993
Shear horizontal acoustic plate mode (SH-APM) devices have been investigated as gravimetric senso... more Shear horizontal acoustic plate mode (SH-APM) devices have been investigated as gravimetric sensors in many applications for measurements in liquid and in gas phases. The temperature behavior has not been examined in those applications. Thermal effects appear as parasitic and as an important limiting factor of the ultimate sensitivity of SH-APM sensors. In this paper, temperature sensitivity is modelled and
Sensors and Actuators B: Chemical, 1992
Gas sensors using SAW oscillators are now well known. However, the corresponding devices based on... more Gas sensors using SAW oscillators are now well known. However, the corresponding devices based on shear horizontal (SH) plate-mode oscillators have not received so much attention. Although both of them work on a mass-loading effect due to adsorption properties of a chemical coating, SH plate-mode delay-line oscillators are considered to be more sensitive. Few results are available to support this assertion. Using computer simulation, the responses of the two sensor types are calculated and compared when their active chemical layer is the seat of gas-induced physical modifications. The simulation requires a knowledge of several physical constants for both materials (quartz and coating). The theoretical responses are expressed in terms of acoustic-wave phase velocity and calculated for different quartz crystal cuts by a perturbation method involving thickness, density and stiffness of the substrate and its coating. Used under the same conditions, the SH plate-mode device is found to be more sensitive than the SAW-mode one within a particular thickness domain.
Les microcapteurs font partie des microsystemes les plus etudies actuellement en raison des besoi... more Les microcapteurs font partie des microsystemes les plus etudies actuellement en raison des besoins grandissants de controle de processus industriels, mais aussi pour la securite et la protection de l'environnement. Quelques applications relatives aux capteurs micro-usines resonnants a ondes elastiques sont presentees. Ces dispositifs sont bases sur l'exploitation de la variation de frequence des oscillateurs associes. La frequence est une grandeur que l'on peut mesurer avec une tres grande precision, ce qui permet la realisation de capteurs de tres grande resolution. En fonction du domaine d'applications souhaite (mesures en phase gazeuse, en phase liquide, etc...), il est possible d'exploiter les proprietes de differentes ondes elastiques engendrees par des transducteurs interdigites. Ces ondes peuvent se propager dans des materiaux piezoelectriques comme le quartz, le LiNbO 3 ou sur substrat de silicium avec une couche mince piezoelectrique (AlN, ZnO)
Sensors and Actuators A: Physical, 1993
ABSTRACT
Sensors and Actuators B: Chemical, 1993
Review of Scientific Instruments, 1991
ABSTRACT This article presents an acoustic wave viscometer using shear bulk waves excited by inte... more ABSTRACT This article presents an acoustic wave viscometer using shear bulk waves excited by interdigital transducers on quartz. The attenuation of acoustic waves at the quartz‐liquid interface is associated with liquid viscosity. Good agreement is found between theoretical results and experiments. The device can be used for viscosity measurements up to 600 cP. For higher viscosity the high‐frequency rigidity modulus must be taken into account.
Archives des Maladies Professionnelles et de l'Environnement, 2016
The theoretical analysis of the possibility of measuring mass loading variations by means of bulk... more The theoretical analysis of the possibility of measuring mass loading variations by means of bulk wave modes generated with Interdigital Transducers (IDT) is addressed. Elastic waves are generated and detected by means of IDT transducers plated on piezoelectric fields or substrates. It was shown that both surface and bulk elastic waves can be launched by IDT's. The type of elastic
The concept and the operation of micromachined monolithic 2D Microscanner are reported. Quartz ma... more The concept and the operation of micromachined monolithic 2D Microscanner are reported. Quartz material is used for its bulk micromachining capability as well as for its piezoelectric properties. Due to direct and reverse piezoelectric effect, the used design allowed to integrate both actuators and displacement sensor. A finite element calculation was performed to predict the operation principle of the microscanner.
TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers, 1991
The authors report on surface acoustic wave NO2 sensors using quartz as the substrate and copper ... more The authors report on surface acoustic wave NO2 sensors using quartz as the substrate and copper phthalocyanine (Cu-PC) as the chemical interface. The electronics of this self-contained device have been miniaturized and integrated in the measurement cell. The operating temperature is 90°C and the quartz substrate cut was chosen so as to present its compensation point at this temperature. Theoretical
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1997
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1997
1999 7th IEEE International Conference on Emerging Technologies and Factory Automation. Proceedings ETFA '99 (Cat. No.99TH8467), 1999
We show how our ongoing work on remote controlled micro/nano-manipulation can be useful for the d... more We show how our ongoing work on remote controlled micro/nano-manipulation can be useful for the development of miniature, integrated manufacturing for IC development. The basic components for such a system have already been developed and are available. The advantages are reduced clean room volume, reduced dead-volume and exposed area and hence reduced losses of ultra-pure gases, low friction and low
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97), 1997
Reports on the characterization of higher resonant modes of microcantilevers made of silicon nitr... more Reports on the characterization of higher resonant modes of microcantilevers made of silicon nitride thin film. An optical technique (a Fabry-Perot interferometer with optical beam deflection technique combination) has been used to measure resonant frequencies, normal displacement and angular deflections in order to characterize mode vibrations. From the measurement of higher flexural mode resonant frequencies of one microcantilever, the mechanical
IEEE 1988 Ultrasonics Symposium Proceedings., 1988
ABSTRACT
Le Journal de Physique Colloques, 1990
-Les transducteurs à peignes interdigités, déposés sur un substrat piézoélectrique, peuvent excit... more -Les transducteurs à peignes interdigités, déposés sur un substrat piézoélectrique, peuvent exciter et détecter-des ondes acoustiques de nature très différente (ondes de Rayleigh, ondes confinées sous la surface, ondes de volume, etc.). Dans le cas du uartz (coups Y* 01, si le transducteur est tourné de 90' par rapport à l'axe cristallin X, seu%s les ondes transversales horizontales sont excitées. Leurs directions, comme Our toutes les ondes de volume, sont déterminbes par la fréquence du signal appliqué. k transducteur d'excitation émet un faisceau acoustique qui, en se réfléchissant sur la surface inférieure, se diri e alors vers la surface supérieure, où il peut être détecté par un second transducteur. Le guifage des ondes est diï aux réflexions successives sur les faces parallèles de la laque de quartz, Si elle est de faible é aisseur, l'interférence des ondes incidentes avec ?es ondes réfléchies, donne naissance à $es modes de plaque se propageant à des fréquences discrhtes. Les résultats de cette étude, à la fois théorique et expérimentale, sont présentés sous les deux aspects d'ondes guidées et de modes de plaque.
Proceedings of IEEE Ultrasonics Symposium, 1993
Shear horizontal acoustic plate mode (SH-APM) devices have been investigated as gravimetric senso... more Shear horizontal acoustic plate mode (SH-APM) devices have been investigated as gravimetric sensors in many applications for measurements in liquid and in gas phases. The temperature behavior has not been examined in those applications. Thermal effects appear as parasitic and as an important limiting factor of the ultimate sensitivity of SH-APM sensors. In this paper, temperature sensitivity is modelled and