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Research paper thumbnail of Utilisation of FIB/SEM Technology in the Assembly of an Innovative Micro-CMM Probe

The measurement of features from the micro- and precision manufacturing industries requires low u... more The measurement of features from the micro- and precision manufacturing industries requires low uncertainties and nano-scale resolution. These are best delivered through ultra precise co-ordinate measuring machines (CMMs). However, current CMMs are often restricted by the relatively large and insensitive probes used. This paper focuses on the assembly challenges of a novel micro- CMM probe. The probe is comprised of a 70 μm glass sphere, attached to a solid tungsten-carbide shaft of diameter less than 100 μm, joined to a piezoelectric flexure structure. The assembly requirements are for positional accuracy of ±0.5 μm, angle between the shaft and flexure of 90°± 0.29° and that the components be undamaged by the process. A combined Focused Ion Beam and Scanning Electron Microscope machine (FIB/SEM) with integrated nanoresolution manipulators was used. The investigation has evaluated potential assembly and joining solutions, identified modifications to existing equipment and product design and produced a set of prototypes.

Research paper thumbnail of In Situ Microassembly

The 21st century sees significant breakthroughs in fabricating micro devices in the quest of mini... more The 21st century sees significant breakthroughs in fabricating micro devices in the quest of miniaturising. Most micro parts have been manufactured in the range of less than 1mm. However, they are built based on material that is process dependant, resulting in monolithic parts. For example the Integrated Circuits, Micro Electro Mechanical System (MEMS) are silicon based, and on their own do not constitute a complex system that requires various functions. To pursue fully functional and miniaturised complex devices, microassembly is therefore necessary. However, microassembly processes differ from the assembly processes in the macro world. Microassembly encounters sticking effects in parts handling, adhesive forces from electrostatic attraction, van der Walls forces and surface tension [1, 2]. This paper envisions microassembly processes by using an innovative approach. It departs from the traditional assembly process by utilising the Projection Micro Stero Lithography, with a positioning algorithm to assemble micro parts without traditional handling and joining, named in situ microassembly process.

Research paper thumbnail of Application of Microstereolithography Technology in Micromanufacturing

Stereolithography (SL) technology is the mostly widely used Rapid Prototyping (RP) process in whi... more Stereolithography (SL) technology is the mostly widely used Rapid Prototyping (RP) process in which complex structures are fabricated in a layer-by-layer fashion. Currently Microstereolithography (MSL) is undergoing fast development. In this paper, the development of MSL and its application in micromanufacturing are reviewed. One promising direction for the development of MSL is the assembly-free process, through which a complex structure can be manufactured in a single process thus avoids the extra assembly procedure. With the assembly-free process, the manufacturing cost can be greatly reduced and the manufacturing reliability dramatically improved. The assembly-free process may play an important role in the future fabrication practice.

Research paper thumbnail of Application of a DFµA Methodology to facilitate the assembly of a Micro/Nano Measurement Device

A lack of well defined Design for Microassembly (DFμA) methodologies to enable an increased trans... more A lack of well defined Design for Microassembly (DFμA) methodologies to enable an increased transfer of prototypes from the research lab to production on industrial scale has been identified. The main benefit of such a methodology is the adaptation of the design by matching it with microassembly process characteristics. In addition there needs to be a push in metrology equipment to respond to the ongoing trend of miniaturisation, enabling quality assurance for three dimensional products with nanometer scale features. The presented paper addresses these two gaps by utilising a novel DFuA methodology to enable a state-of-the-art CMM stylus assembly, which is characterised by extremely rigid and challenging requirements. The design of the parts to be assembled is shown. Furthermore the selection of the most suitable assembly equipment is supported. Finally the actual assembly system is described and illustrated as proof of validation.

Research paper thumbnail of Utilisation of FIB/SEM Technology in the Assembly of an Innovative Micro-CMM Probe

The measurement of features from the micro- and precision manufacturing industries requires low u... more The measurement of features from the micro- and precision manufacturing industries requires low uncertainties and nano-scale resolution. These are best delivered through ultra precise co-ordinate measuring machines (CMMs). However, current CMMs are often restricted by the relatively large and insensitive probes used. This paper focuses on the assembly challenges of a novel micro- CMM probe. The probe is comprised of a 70 μm glass sphere, attached to a solid tungsten-carbide shaft of diameter less than 100 μm, joined to a piezoelectric flexure structure. The assembly requirements are for positional accuracy of ±0.5 μm, angle between the shaft and flexure of 90°± 0.29° and that the components be undamaged by the process. A combined Focused Ion Beam and Scanning Electron Microscope machine (FIB/SEM) with integrated nanoresolution manipulators was used. The investigation has evaluated potential assembly and joining solutions, identified modifications to existing equipment and product design and produced a set of prototypes.

Research paper thumbnail of In Situ Microassembly

The 21st century sees significant breakthroughs in fabricating micro devices in the quest of mini... more The 21st century sees significant breakthroughs in fabricating micro devices in the quest of miniaturising. Most micro parts have been manufactured in the range of less than 1mm. However, they are built based on material that is process dependant, resulting in monolithic parts. For example the Integrated Circuits, Micro Electro Mechanical System (MEMS) are silicon based, and on their own do not constitute a complex system that requires various functions. To pursue fully functional and miniaturised complex devices, microassembly is therefore necessary. However, microassembly processes differ from the assembly processes in the macro world. Microassembly encounters sticking effects in parts handling, adhesive forces from electrostatic attraction, van der Walls forces and surface tension [1, 2]. This paper envisions microassembly processes by using an innovative approach. It departs from the traditional assembly process by utilising the Projection Micro Stero Lithography, with a positioning algorithm to assemble micro parts without traditional handling and joining, named in situ microassembly process.

Research paper thumbnail of Application of Microstereolithography Technology in Micromanufacturing

Stereolithography (SL) technology is the mostly widely used Rapid Prototyping (RP) process in whi... more Stereolithography (SL) technology is the mostly widely used Rapid Prototyping (RP) process in which complex structures are fabricated in a layer-by-layer fashion. Currently Microstereolithography (MSL) is undergoing fast development. In this paper, the development of MSL and its application in micromanufacturing are reviewed. One promising direction for the development of MSL is the assembly-free process, through which a complex structure can be manufactured in a single process thus avoids the extra assembly procedure. With the assembly-free process, the manufacturing cost can be greatly reduced and the manufacturing reliability dramatically improved. The assembly-free process may play an important role in the future fabrication practice.

Research paper thumbnail of Application of a DFµA Methodology to facilitate the assembly of a Micro/Nano Measurement Device

A lack of well defined Design for Microassembly (DFμA) methodologies to enable an increased trans... more A lack of well defined Design for Microassembly (DFμA) methodologies to enable an increased transfer of prototypes from the research lab to production on industrial scale has been identified. The main benefit of such a methodology is the adaptation of the design by matching it with microassembly process characteristics. In addition there needs to be a push in metrology equipment to respond to the ongoing trend of miniaturisation, enabling quality assurance for three dimensional products with nanometer scale features. The presented paper addresses these two gaps by utilising a novel DFuA methodology to enable a state-of-the-art CMM stylus assembly, which is characterised by extremely rigid and challenging requirements. The design of the parts to be assembled is shown. Furthermore the selection of the most suitable assembly equipment is supported. Finally the actual assembly system is described and illustrated as proof of validation.

Research paper thumbnail of ADMINISTRAÇÃO DO TEMPO: RESPONSABILIDADE + FLEXIBILIDADE

Research paper thumbnail of ADMINISTRAÇÃO DO TEMPO: RESPONSABILIDADE + FLEXIBILIDADE

Research paper thumbnail of Utilisation of FIB/SEM Technology in the Assembly of an Innovative Micro-CMM Probe

The measurement of features from the micro- and precision manufacturing industries requires low u... more The measurement of features from the micro- and precision manufacturing industries requires low uncertainties and nano-scale resolution. These are best delivered through ultra precise co-ordinate measuring machines (CMMs). However, current CMMs are often restricted by the relatively large and insensitive probes used. This paper focuses on the assembly challenges of a novel micro- CMM probe. The probe is comprised of a 70 μm glass sphere, attached to a solid tungsten-carbide shaft of diameter less than 100 μm, joined to a piezoelectric flexure structure. The assembly requirements are for positional accuracy of ±0.5 μm, angle between the shaft and flexure of 90°± 0.29° and that the components be undamaged by the process. A combined Focused Ion Beam and Scanning Electron Microscope machine (FIB/SEM) with integrated nanoresolution manipulators was used. The investigation has evaluated potential assembly and joining solutions, identified modifications to existing equipment and product design and produced a set of prototypes.

Research paper thumbnail of In Situ Microassembly

The 21st century sees significant breakthroughs in fabricating micro devices in the quest of mini... more The 21st century sees significant breakthroughs in fabricating micro devices in the quest of miniaturising. Most micro parts have been manufactured in the range of less than 1mm. However, they are built based on material that is process dependant, resulting in monolithic parts. For example the Integrated Circuits, Micro Electro Mechanical System (MEMS) are silicon based, and on their own do not constitute a complex system that requires various functions. To pursue fully functional and miniaturised complex devices, microassembly is therefore necessary. However, microassembly processes differ from the assembly processes in the macro world. Microassembly encounters sticking effects in parts handling, adhesive forces from electrostatic attraction, van der Walls forces and surface tension [1, 2]. This paper envisions microassembly processes by using an innovative approach. It departs from the traditional assembly process by utilising the Projection Micro Stero Lithography, with a positioning algorithm to assemble micro parts without traditional handling and joining, named in situ microassembly process.

Research paper thumbnail of Application of Microstereolithography Technology in Micromanufacturing

Stereolithography (SL) technology is the mostly widely used Rapid Prototyping (RP) process in whi... more Stereolithography (SL) technology is the mostly widely used Rapid Prototyping (RP) process in which complex structures are fabricated in a layer-by-layer fashion. Currently Microstereolithography (MSL) is undergoing fast development. In this paper, the development of MSL and its application in micromanufacturing are reviewed. One promising direction for the development of MSL is the assembly-free process, through which a complex structure can be manufactured in a single process thus avoids the extra assembly procedure. With the assembly-free process, the manufacturing cost can be greatly reduced and the manufacturing reliability dramatically improved. The assembly-free process may play an important role in the future fabrication practice.

Research paper thumbnail of Application of a DFµA Methodology to facilitate the assembly of a Micro/Nano Measurement Device

A lack of well defined Design for Microassembly (DFμA) methodologies to enable an increased trans... more A lack of well defined Design for Microassembly (DFμA) methodologies to enable an increased transfer of prototypes from the research lab to production on industrial scale has been identified. The main benefit of such a methodology is the adaptation of the design by matching it with microassembly process characteristics. In addition there needs to be a push in metrology equipment to respond to the ongoing trend of miniaturisation, enabling quality assurance for three dimensional products with nanometer scale features. The presented paper addresses these two gaps by utilising a novel DFuA methodology to enable a state-of-the-art CMM stylus assembly, which is characterised by extremely rigid and challenging requirements. The design of the parts to be assembled is shown. Furthermore the selection of the most suitable assembly equipment is supported. Finally the actual assembly system is described and illustrated as proof of validation.

Research paper thumbnail of Utilisation of FIB/SEM Technology in the Assembly of an Innovative Micro-CMM Probe

The measurement of features from the micro- and precision manufacturing industries requires low u... more The measurement of features from the micro- and precision manufacturing industries requires low uncertainties and nano-scale resolution. These are best delivered through ultra precise co-ordinate measuring machines (CMMs). However, current CMMs are often restricted by the relatively large and insensitive probes used. This paper focuses on the assembly challenges of a novel micro- CMM probe. The probe is comprised of a 70 μm glass sphere, attached to a solid tungsten-carbide shaft of diameter less than 100 μm, joined to a piezoelectric flexure structure. The assembly requirements are for positional accuracy of ±0.5 μm, angle between the shaft and flexure of 90°± 0.29° and that the components be undamaged by the process. A combined Focused Ion Beam and Scanning Electron Microscope machine (FIB/SEM) with integrated nanoresolution manipulators was used. The investigation has evaluated potential assembly and joining solutions, identified modifications to existing equipment and product design and produced a set of prototypes.

Research paper thumbnail of In Situ Microassembly

The 21st century sees significant breakthroughs in fabricating micro devices in the quest of mini... more The 21st century sees significant breakthroughs in fabricating micro devices in the quest of miniaturising. Most micro parts have been manufactured in the range of less than 1mm. However, they are built based on material that is process dependant, resulting in monolithic parts. For example the Integrated Circuits, Micro Electro Mechanical System (MEMS) are silicon based, and on their own do not constitute a complex system that requires various functions. To pursue fully functional and miniaturised complex devices, microassembly is therefore necessary. However, microassembly processes differ from the assembly processes in the macro world. Microassembly encounters sticking effects in parts handling, adhesive forces from electrostatic attraction, van der Walls forces and surface tension [1, 2]. This paper envisions microassembly processes by using an innovative approach. It departs from the traditional assembly process by utilising the Projection Micro Stero Lithography, with a positioning algorithm to assemble micro parts without traditional handling and joining, named in situ microassembly process.

Research paper thumbnail of Application of Microstereolithography Technology in Micromanufacturing

Stereolithography (SL) technology is the mostly widely used Rapid Prototyping (RP) process in whi... more Stereolithography (SL) technology is the mostly widely used Rapid Prototyping (RP) process in which complex structures are fabricated in a layer-by-layer fashion. Currently Microstereolithography (MSL) is undergoing fast development. In this paper, the development of MSL and its application in micromanufacturing are reviewed. One promising direction for the development of MSL is the assembly-free process, through which a complex structure can be manufactured in a single process thus avoids the extra assembly procedure. With the assembly-free process, the manufacturing cost can be greatly reduced and the manufacturing reliability dramatically improved. The assembly-free process may play an important role in the future fabrication practice.

Research paper thumbnail of Application of a DFµA Methodology to facilitate the assembly of a Micro/Nano Measurement Device

A lack of well defined Design for Microassembly (DFμA) methodologies to enable an increased trans... more A lack of well defined Design for Microassembly (DFμA) methodologies to enable an increased transfer of prototypes from the research lab to production on industrial scale has been identified. The main benefit of such a methodology is the adaptation of the design by matching it with microassembly process characteristics. In addition there needs to be a push in metrology equipment to respond to the ongoing trend of miniaturisation, enabling quality assurance for three dimensional products with nanometer scale features. The presented paper addresses these two gaps by utilising a novel DFuA methodology to enable a state-of-the-art CMM stylus assembly, which is characterised by extremely rigid and challenging requirements. The design of the parts to be assembled is shown. Furthermore the selection of the most suitable assembly equipment is supported. Finally the actual assembly system is described and illustrated as proof of validation.

Research paper thumbnail of ADMINISTRAÇÃO DO TEMPO: RESPONSABILIDADE + FLEXIBILIDADE

Research paper thumbnail of ADMINISTRAÇÃO DO TEMPO: RESPONSABILIDADE + FLEXIBILIDADE