selçuk utaş - Academia.edu (original) (raw)
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Norwegian University of Science and Technology
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Papers by selçuk utaş
Journal of materials science. Materials in electronics, Mar 1, 2024
This paper presents a conceptual framework for experimental research combined with numerical anal... more This paper presents a conceptual framework for experimental research combined with numerical analysis on direct current (DC) glow discharges in microscale planar gas discharge-semiconductor systems (GDSS). In the experimental section, several structural and elemental analyses, including SEM, EDAX, AFM, and near-infrared absorption spectra measurements were carried out for compound semiconductor zinc selenide (ZnSe) cathode sample. Argon (Ar) was charged into the plasma reactor cell of GDSS at pressures of 100 Torr subatmospheric and 760 Torr atmospheric, respectively, by a vacuum pump-gas filling station. Glow discharge light emissions from plasma, excited under three different intensity levels (dark, weak, strong) of infrared beam illumination on ZnSe cathode electrode, were measured by using a phomultiplier tube that is sensitive to UV-Visible wavelengths. In the numerical analysis section, simulation studies were carried out on the two-dimensional gas discharge-semiconductor microplasma system (GDSµPS) cell models using the finite-element method (FEM) solver COMSOL Multiphysics DC plasma program. Calculations and predictions were based on mixture-averaged diffusion drift theory and Maxwellian electron energy distribution function. GDSµPS cell was modeled in a square chamber with planar anode/cathode electrode pair coupled at a 50 µm discharge gap. Single side of ZnSe cathode was finely micro-digitated to increase the effective surface area for enhanced electron emission to the gas discharge cell. The electrical equivalent circuit (EEC) of the proposed model was driven by 1.0 kV DC voltage source. Binary Ar/H 2 gas medium in a mixture of 3:2 molar ratio was introduced to the gas discharge chamber at constant 200 Torr subatmospheric pressure. Simulations were run for normal glow discharges to exhibit the electrical fast transient glow discharge behaviours from electron field emission state to self-sustained normal
Journal of Energy Systems
The features of the plasma cell with the InGaAs/InP detector are explored. The detector is compos... more The features of the plasma cell with the InGaAs/InP detector are explored. The detector is composed of InGaAs and InP wafers. Mean electron energies, migrative electron flux and current densities are evaluated by theoretical simulation analyses. The results helped to understand the uncertain plasma parameters and made the plasma structure more understandable, thereby, the complex plasma reactions can be solved via the COMSOL package. New plasma studies have focused on uniform discharges. However, the optimization of the plasma structure should be ascertained in order to explain the complex physical and chemical features in the complicated media having different discharge mechanisms. The non-thermal plasmas are famous especially for the microelectronic systems and surface processes such as etching and purification.
Journal of materials science. Materials in electronics, Mar 1, 2024
This paper presents a conceptual framework for experimental research combined with numerical anal... more This paper presents a conceptual framework for experimental research combined with numerical analysis on direct current (DC) glow discharges in microscale planar gas discharge-semiconductor systems (GDSS). In the experimental section, several structural and elemental analyses, including SEM, EDAX, AFM, and near-infrared absorption spectra measurements were carried out for compound semiconductor zinc selenide (ZnSe) cathode sample. Argon (Ar) was charged into the plasma reactor cell of GDSS at pressures of 100 Torr subatmospheric and 760 Torr atmospheric, respectively, by a vacuum pump-gas filling station. Glow discharge light emissions from plasma, excited under three different intensity levels (dark, weak, strong) of infrared beam illumination on ZnSe cathode electrode, were measured by using a phomultiplier tube that is sensitive to UV-Visible wavelengths. In the numerical analysis section, simulation studies were carried out on the two-dimensional gas discharge-semiconductor microplasma system (GDSµPS) cell models using the finite-element method (FEM) solver COMSOL Multiphysics DC plasma program. Calculations and predictions were based on mixture-averaged diffusion drift theory and Maxwellian electron energy distribution function. GDSµPS cell was modeled in a square chamber with planar anode/cathode electrode pair coupled at a 50 µm discharge gap. Single side of ZnSe cathode was finely micro-digitated to increase the effective surface area for enhanced electron emission to the gas discharge cell. The electrical equivalent circuit (EEC) of the proposed model was driven by 1.0 kV DC voltage source. Binary Ar/H 2 gas medium in a mixture of 3:2 molar ratio was introduced to the gas discharge chamber at constant 200 Torr subatmospheric pressure. Simulations were run for normal glow discharges to exhibit the electrical fast transient glow discharge behaviours from electron field emission state to self-sustained normal
Journal of Energy Systems
The features of the plasma cell with the InGaAs/InP detector are explored. The detector is compos... more The features of the plasma cell with the InGaAs/InP detector are explored. The detector is composed of InGaAs and InP wafers. Mean electron energies, migrative electron flux and current densities are evaluated by theoretical simulation analyses. The results helped to understand the uncertain plasma parameters and made the plasma structure more understandable, thereby, the complex plasma reactions can be solved via the COMSOL package. New plasma studies have focused on uniform discharges. However, the optimization of the plasma structure should be ascertained in order to explain the complex physical and chemical features in the complicated media having different discharge mechanisms. The non-thermal plasmas are famous especially for the microelectronic systems and surface processes such as etching and purification.