Kathleen Dunn | SUNY Polytechnic Institute (original) (raw)

Papers by Kathleen Dunn

Research paper thumbnail of Enhancement of Copper Wetting via Surfactant-Based Post-Treatment of Ultra-Thin Atomic Layer Deposited Tantalum Nitride Liners

MRS Proceedings, 2003

The influence of surfactant-based liner post-treatment on the wetting and nucleation characterist... more The influence of surfactant-based liner post-treatment on the wetting and nucleation characteristics of ultra-thin copper (Cu) films has been examined, employing ultra-thin atomic layer deposited (ALD) tantalum nitride (TaNx) as liner material. This surfactant-based posttreatment consists of in-situ exposure of the liner to a metal-organic source containing a low surface free energy metal (Sn) surfactant, which is a potential candidate for enhancing the wetting of Cu on liner surfaces and subsequently suppressing island-type growth of Cu, due to both the high atomic volume and low surface free energy of the surfactant relative to Cu. A methodology involving thermally-enhanced de-wetting of Cu, promoted by annealing Cu/liner stacks in a forming gas (95% Ar, 5% H2) ambient under several applied thermal budgets (annealing at 350°C for 30 minutes, and at 600°C for 4, 12, and 48 hrs, respectively), was utilized to both elucidate and quantify the wetting properties of Cu on liners, via de...

Research paper thumbnail of Spatial Resolution Limits for X-ray Microanalysis of Bulk Samples

Microscopy and Microanalysis, 2003

Research paper thumbnail of Carbon Nanotube Interconnects

Dekker Encyclopedia of Nanoscience and Nanotechnology, Second Edition - Six Volume Set (Print Version), 2008

Research paper thumbnail of Dislocation Arrangement in a Thick LEO GaN Film on Sapphire

MRS Proceedings, 1999

Diffraction-contrast TEM, focused probe electron diffraction, and high-resolution X-ray diffracti... more Diffraction-contrast TEM, focused probe electron diffraction, and high-resolution X-ray diffraction were used to characterize the dislocation arrangements in a 16[.proportional]m thick coalesced GaN film grown by MOVPE LEO. As is commonly observed, the threading dislocations that are duplicated from the template above the window bend toward (0001). At the coalescence plane they bend back to lie along [0001] and thread to the surface. In addition, three other sets of dislocations were observed. The first set consists of a wall of parallel dislocations lying in the coalescence plane and nearly parallel to the substrate, with Burgers vector (b) in the (0001) plane. The second set is comprised of rectangular loops with b = 1/3 [11 20] (perpendicular to the coalescence boundary) which originate in the coalescence boundary and extend laterally into the film on the (1 100). The third set of dislocations threads laterally through the film along the [1 100] bar axis with 1/3<11 20>-typ...

Research paper thumbnail of <title>Conductive carbon nanotubes for semiconductor metrology</title>

Instrumentation, Metrology, and Standards for Nanomanufacturing IV, 2010

This paper presents an evaluation of e-beam assisted deposition and welding of conductive carbon ... more This paper presents an evaluation of e-beam assisted deposition and welding of conductive carbon nanotube (c-CNT) tips for electrical scanning probe microscope measurements. Variations in CNT tip conductivity and contact resistance during fabrication were determined as a function of tip geometry using tunneling AFM (TUNA). Conductive CNT tips were used to measure 2D dopant concentration as a function of annealing conditions in BF 2-implanted samples.

Research paper thumbnail of Atomic layer deposition of tantalum nitride for ultrathin liner applications in advanced copper metallization schemes

Journal of Materials Research, 2004

A metal–organic thermal atomic layer deposition (ALD) approach was developed for the growth of ul... more A metal–organic thermal atomic layer deposition (ALD) approach was developed for the growth of ultrathin tantalum nitride (TaNx) films by alternate pulses of tert-butylimido trisdiethylamido tantalum (TBTDET) and ammonia (NH3). An optimized ALD process window was established by investigating saturation of film-growth rate versus TBTDET and NH3 exposures, as controlled by the length of reactant pulses and the duration of the inert gas purge cycles separating the reactant pulses. The resulting low-temperature (250 °C) ALD process yielded uniform, continuous, and conformal TaNx films with a Ta:N ratio of 1:1. Carbon and oxygen impurity levels were in the 5–8 at.% range. Associated film conformality in 100-nm trench structures with 11:1 aspect ratio was nearly 100%.

Research paper thumbnail of Study of copper-refractory metal interfaces via solid-state wetting for emerging nanoscale interconnect applications

Journal of Materials Research, 2006

Solid-state wetting experiments were carried out to derive the work of adhesion (adhesion energy)... more Solid-state wetting experiments were carried out to derive the work of adhesion (adhesion energy) of pertinent Cu/liner interfaces via the Young–Dupré equation using contact-angle measurements of the Cu equilibrium crystal shape on Ta and TaNx liners. Four types of liner surfaces were examined: untreated sputtered Ta (uSp-Ta), untreated sputtered TaNx (uSp-TaN), untreated atomic layer deposited (ALD) TaNx (uALD-TaN), and indium surfactant-treated ALD TaNx (tALD-TaN). All Cu-liner stacks were subsequently annealed at 600 °C for 48 h in a forming gas (95% Ar/5% H2) ambient. For Cu/uSp-Ta, the work of adhesion was found to be 2170 mJ/m2, corresponding to an average contact angle of 74°, while for Cu/uSp-TaN, the work of adhesion amounted to 1850 mJ/m2 for an average contact angle of 85°. Alternatively, the work of adhesion for Cu/uALD-TaN was determined to be 1850 mJ/m2, corresponding to an average contact angle of 85°, while for Cu/tALD-TaN, the work of adhesion was 2280 mJ/m2, at an ...

Research paper thumbnail of Spectroellipsometric characterization of Au-Y2O3–stabilized ZrO2 nanocomposite films

Journal of Materials Research, 2005

Nanocomposite thin films consisting of Au nanoparticles embedded in yttria-stabilized zirconia (Y... more Nanocomposite thin films consisting of Au nanoparticles embedded in yttria-stabilized zirconia (YSZ) were synthesized at room temperature by radio frequency magnetron co-sputtering from YSZ and Au targets and subsequently annealed in an argon atmosphere. Au microstructure and particle size were characterized as a function of annealing temperature from 600 to 1000 °C by x-ray diffraction, transmission electron microscopy, scanning electron microscopy, and Rutherford backscattering spectroscopy. Spectroscopic ellipsometry was also used to determine the optical constants of the resulting films. In particular, the refractive index of the nanocomposites was found to undergo an anomalous dispersion in the spectral region where the extinction coefficient achieves its maximum. Additionally, the incorporation of Au in the YSZ matrix was found to increase the refractive index in comparison to that of YSZ. At annealing temperatures higher than 800 °C, a good agreement was found between experim...

Research paper thumbnail of Correlating surface segregation and microstructural evolution of electrochemically deposited copper

Applied Physics Letters, 2012

ABSTRACT Electroplating bath additives become problematic when incorporated into electrochemicall... more ABSTRACT Electroplating bath additives become problematic when incorporated into electrochemically deposited copper as impurities. The surface segregation of these impurities during spontaneous microstructural transformation was monitored by secondary ion mass spectrometry and found to be no different than the surface chemistry of the non-transforming plated samples or even sputtered copper. The results show that microstructural transformation of electroplated copper progresses despite the presence of impurities, suggesting foreign constituents are not in fact responsible for grain boundary pinning in these films.

Research paper thumbnail of Sidewall Texture and Microstructure of iPVD Copper Seed in Narrow Damascene Trenches

Journal of the Electrochemical Society, 2013

ABSTRACT Impurities incorporated into copper during electrochemical deposition have long been pos... more ABSTRACT Impurities incorporated into copper during electrochemical deposition have long been postulated to inhibit grain growth in narrow interconnects. In this article we examine an alternative possible origin for the microstructural differences observed between narrow and wide lines. Specifically, the iPVD Cu seed layers in wide (1 mu m) and narrow (70 nm) lines differ significantly in microstructure and texture, as analyzed by transmission electron microscopy and electron diffraction. The seed in the wide lines has a polycrystalline microstructure similar to that seen in blanket films, with strong 111 texture in the field and sidewalls, and 112 texture at the bottom of the trench. Although the field between the 70 nm lines is also strongly 111-textured, the seed on the sidewalls and bottom of the trenches are largely untextured and, in fact, not entirely crystalline. This results in a higher energy, metastable microstructure which can contribute an additional driving force for the rapid nucleation and recrystallization of polycrystalline copper in the trenches before the overburden can transform and force the creation of bamboo grains in the lines.

Research paper thumbnail of Understanding and Controlling Cu Protrusions in 3D TSV Processing

International Symposium on Microelectronics, 2012

Research paper thumbnail of Helium Ion Beam Microscopy for Copper Grain Identification in BEOL Structures

Grain size determination in advanced metallization structures requires a technique with resolutio... more Grain size determination in advanced metallization structures requires a technique with resolution ~2 nm, with a high signal-to-noise ratio and high orientation-dependant contrast for unambiguous identification of grain boundaries. Ideally, such a technique would also be capable of high-throughput and rapid time-to-knowledge. The Helium Ion Microscope (HIM) offers one possibility for achieving these aims in a single platform. This article

Research paper thumbnail of Improving Palliative Care Team Meetings: Structure, Inclusion, and "Team Care

The American journal of hospice & palliative care, Jan 20, 2015

Increasing demands on palliative care teams point to the need for continuous improvement to ensur... more Increasing demands on palliative care teams point to the need for continuous improvement to ensure teams are working collaboratively and efficiently. This quality improvement initiative focused on improving interprofessional team meeting efficiency and subsequently patient care. Meeting start and end times improved from a mean of approximately 9 and 6 minutes late in the baseline period, respectively, to a mean of 4.4 minutes late (start time) and ending early in our sustainability phase. Mean team satisfaction improved from 2.4 to 4.5 on a 5-point Likert-type scale. The improvement initiative clarified communication about patients' plans of care, thus positively impacting team members' ability to articulate goals to other professionals, patients, and families. We propose several recommendations in the form of a team meeting "toolkit."

Research paper thumbnail of Spinal cord injury and sexuality in married or partnered men: activities, function, needs, and predictors of sexual adjustment

Archives of sexual behavior, 2001

The sexual behaviors, functioning, needs, and sexual satisfaction levels of men with spinal cord ... more The sexual behaviors, functioning, needs, and sexual satisfaction levels of men with spinal cord injuries (SCI) were studied. A sample of 50 men with SCI (median age = 50; median age at injury = 25.0), either married or in a committed relationship, responded to an anonymous survey of a large southern California regional spinal injury rehabilitation center. Multiple regression analyses indicated that perceived partner satisfaction, relationship quality, and sexual desire were significant predictors of sexual satisfaction and behavior. Erectile function, level of genital sensation, and orgasmic capacity all varied widely in the sample, as well. However, none of these variables were significantly related to sexual satisfaction. A varied sexual repertoire was independently related to sexual satisfaction and behavior, but did not offer additional predictive power. Results suggest that for married or partnered men with SCI, relationship factors including partner satisfaction and relations...

Research paper thumbnail of Personalizing Retrieval of Journal Articles for Patient Care

Abstract: this paper and otherwork in the context of PERSIVAL, we collected a corpusof 29,784 med... more Abstract: this paper and otherwork in the context of PERSIVAL, we collected a corpusof 29,784 medical articles in full text, either fromthe web with an automated crawler or via a licensingagreement with Ovid Technologies. The articles appearedin HTML format; we transformed them intoXML using a pipeline we developed on the basis ofpublicly available XML tools. The corpus containsarticles from 20

Research paper thumbnail of Carbon Nanotube Interconnects

Dekker Encyclopedia of Nanoscience and Nanotechnology, Second Edition - Six Volume Set (Print Version), 2008

Research paper thumbnail of MOCVD ZnS:Mn Films: Crystal Structure and Defect Microstructure as a Function of the Growth Parameters

MRS Proceedings, 2001

ABSTRACT Thin film electroluminescent devices employing zinc sulfide doped with manganese are ext... more ABSTRACT Thin film electroluminescent devices employing zinc sulfide doped with manganese are extensively used for applications in which the weight, brightness and mechanical robustness requirements preclude the use of other types of displays such as cathode ray tubes or liquid crystal displays. The physical, optical and electrical properties of phosphors such as ZnS:Mn can often depend strongly on microstructure, which in turn depends on the growth and processing of the film. For this study, ZnS:Mn layers were fabricated by metalorganic chemical vapor deposition (MOCVD) in the 250°-500°C range on an Al2TiO/ In2SnO5 /glass stack. Selected samples were then subjected to a post-deposition anneal in H2S/Ar at 700°C for up to 4 hours. The microstructure of the ZnS:Mn films was examined by Transmission Electron Microscopy (TEM). For all growth and annealing conditions, the films consisted of columnar grains whose column axis was parallel to the growth direction, and which widened laterally through the thickness of the films. For the as-deposited films, the crystal structure was found to be predominantly 2H structure, with the 8H polytype being identified in the low-temperature ZnS:Mn films. The 700°C post-deposition annealing was found to initiate a solid state transformation to the cubic (3C) ZnS crystal structure. All films contained high densities of stacking faults and microtwins, whose role in the 2H-3C transformation is discussed. Also discussed are initial Ultrasonic Force Microscopy (UFM) results which suggest a correlation between the defect microstructure and the elastic response of the material.

Research paper thumbnail of Epitaxial Growth of InGaAs on a Borosilicate-Glass- Bonded Compliant Substrate

This paper reports early results of a new approach to fabrication of a universal compliant substr... more This paper reports early results of a new approach to fabrication of a universal compliant substrate. A layer of borosilicate glass is grown on top of a GaAs handle wafer; a 10 nm thick single crystal GaAs template layer is then bonded to the glass. At typical deposition temperatures, the glass can flow to accommodate strain. A 4mum thick film

Research paper thumbnail of Relationship of aluminum grain size to the grain size of polycrystalline silicon produced by the aluminum induced crystallization of amorphous silicon

2009 34th IEEE Photovoltaic Specialists Conference (PVSC), 2009

The aluminum-induced crystallization and layer exchange process shows great promise for convertin... more The aluminum-induced crystallization and layer exchange process shows great promise for converting a-Si into large-grained poly-Si for solar cell applications. To investigate the relationship between the grain size of Al and the final grain size of poly-Si, a series of samples were deposited by RF magnetron sputtering 165 nm of Al onto SiN/SiO2 coated (100) silicon substrates. The Al grain size was varied by vacuum annealing prior to the deposition of 195 nm of a-Si. Completion of the layer exchange process resulted in poly-Si films which were then characterized with plan view TEM. The average Si grain size was found to increase as a function of increasing Al grain size, consistent with the grain-boundary nucleation model for this process. The largest average Si grain size of 4.9 ± 1.92 ¿m corresponded to the Al sample which was annealed for 24 hours at 550°C. The microstructure of the poly-Si film can therefore be manipulated by altering the properties of the as-deposited Al layer with an isothermal anneal.

Research paper thumbnail of Prospective Evaluation of a Teaching Model to Determine Competency in Performing Flexible Sigmoidoscopies

The American Journal of Gastroenterology, 1998

There are limited objective criteria for determining competency in performing flexible sigmoidosc... more There are limited objective criteria for determining competency in performing flexible sigmoidoscopies. The authors developed a teaching model using eight objective criteria that measured both cognitive and technical skills in performing flexible sigmoidoscopies. The objective was to determine whether the teaching model was a valid method and then to compare it to a commonly used Overall Competence Score or independent observer method. A total of 120 procedures with 10 residents were evaluated using the two methods. Eight objective parameters had been determined before validating the teaching model. Preset criteria determined competency on a single procedure, and competent performance on five procedures in a row determined certification to independently perform procedures. The teaching model was separately tested for validity and then compared with the independent observer method. A total of 120 procedures were graded using the teaching model method: 73 competent and 47 incompetent. Six of the seven objective parameters were associated with competency in the teaching model method. The eighth objective parameter was excluded because of lack of variation. Fifty of the 120 procedures were graded using the independent observer method: 36 competent and 14 incompetent. Two of the seven objective parameters were associated with competency in the independent observer method. Comparison of the two methods revealed seven discrepancies regarding competent and incompetent procedures. The correlation between the two methods was 0.71. The teaching model method offers objective criteria to evaluate skill in performing flexible sigmoidoscopies.

Research paper thumbnail of Enhancement of Copper Wetting via Surfactant-Based Post-Treatment of Ultra-Thin Atomic Layer Deposited Tantalum Nitride Liners

MRS Proceedings, 2003

The influence of surfactant-based liner post-treatment on the wetting and nucleation characterist... more The influence of surfactant-based liner post-treatment on the wetting and nucleation characteristics of ultra-thin copper (Cu) films has been examined, employing ultra-thin atomic layer deposited (ALD) tantalum nitride (TaNx) as liner material. This surfactant-based posttreatment consists of in-situ exposure of the liner to a metal-organic source containing a low surface free energy metal (Sn) surfactant, which is a potential candidate for enhancing the wetting of Cu on liner surfaces and subsequently suppressing island-type growth of Cu, due to both the high atomic volume and low surface free energy of the surfactant relative to Cu. A methodology involving thermally-enhanced de-wetting of Cu, promoted by annealing Cu/liner stacks in a forming gas (95% Ar, 5% H2) ambient under several applied thermal budgets (annealing at 350°C for 30 minutes, and at 600°C for 4, 12, and 48 hrs, respectively), was utilized to both elucidate and quantify the wetting properties of Cu on liners, via de...

Research paper thumbnail of Spatial Resolution Limits for X-ray Microanalysis of Bulk Samples

Microscopy and Microanalysis, 2003

Research paper thumbnail of Carbon Nanotube Interconnects

Dekker Encyclopedia of Nanoscience and Nanotechnology, Second Edition - Six Volume Set (Print Version), 2008

Research paper thumbnail of Dislocation Arrangement in a Thick LEO GaN Film on Sapphire

MRS Proceedings, 1999

Diffraction-contrast TEM, focused probe electron diffraction, and high-resolution X-ray diffracti... more Diffraction-contrast TEM, focused probe electron diffraction, and high-resolution X-ray diffraction were used to characterize the dislocation arrangements in a 16[.proportional]m thick coalesced GaN film grown by MOVPE LEO. As is commonly observed, the threading dislocations that are duplicated from the template above the window bend toward (0001). At the coalescence plane they bend back to lie along [0001] and thread to the surface. In addition, three other sets of dislocations were observed. The first set consists of a wall of parallel dislocations lying in the coalescence plane and nearly parallel to the substrate, with Burgers vector (b) in the (0001) plane. The second set is comprised of rectangular loops with b = 1/3 [11 20] (perpendicular to the coalescence boundary) which originate in the coalescence boundary and extend laterally into the film on the (1 100). The third set of dislocations threads laterally through the film along the [1 100] bar axis with 1/3<11 20>-typ...

Research paper thumbnail of <title>Conductive carbon nanotubes for semiconductor metrology</title>

Instrumentation, Metrology, and Standards for Nanomanufacturing IV, 2010

This paper presents an evaluation of e-beam assisted deposition and welding of conductive carbon ... more This paper presents an evaluation of e-beam assisted deposition and welding of conductive carbon nanotube (c-CNT) tips for electrical scanning probe microscope measurements. Variations in CNT tip conductivity and contact resistance during fabrication were determined as a function of tip geometry using tunneling AFM (TUNA). Conductive CNT tips were used to measure 2D dopant concentration as a function of annealing conditions in BF 2-implanted samples.

Research paper thumbnail of Atomic layer deposition of tantalum nitride for ultrathin liner applications in advanced copper metallization schemes

Journal of Materials Research, 2004

A metal–organic thermal atomic layer deposition (ALD) approach was developed for the growth of ul... more A metal–organic thermal atomic layer deposition (ALD) approach was developed for the growth of ultrathin tantalum nitride (TaNx) films by alternate pulses of tert-butylimido trisdiethylamido tantalum (TBTDET) and ammonia (NH3). An optimized ALD process window was established by investigating saturation of film-growth rate versus TBTDET and NH3 exposures, as controlled by the length of reactant pulses and the duration of the inert gas purge cycles separating the reactant pulses. The resulting low-temperature (250 °C) ALD process yielded uniform, continuous, and conformal TaNx films with a Ta:N ratio of 1:1. Carbon and oxygen impurity levels were in the 5–8 at.% range. Associated film conformality in 100-nm trench structures with 11:1 aspect ratio was nearly 100%.

Research paper thumbnail of Study of copper-refractory metal interfaces via solid-state wetting for emerging nanoscale interconnect applications

Journal of Materials Research, 2006

Solid-state wetting experiments were carried out to derive the work of adhesion (adhesion energy)... more Solid-state wetting experiments were carried out to derive the work of adhesion (adhesion energy) of pertinent Cu/liner interfaces via the Young–Dupré equation using contact-angle measurements of the Cu equilibrium crystal shape on Ta and TaNx liners. Four types of liner surfaces were examined: untreated sputtered Ta (uSp-Ta), untreated sputtered TaNx (uSp-TaN), untreated atomic layer deposited (ALD) TaNx (uALD-TaN), and indium surfactant-treated ALD TaNx (tALD-TaN). All Cu-liner stacks were subsequently annealed at 600 °C for 48 h in a forming gas (95% Ar/5% H2) ambient. For Cu/uSp-Ta, the work of adhesion was found to be 2170 mJ/m2, corresponding to an average contact angle of 74°, while for Cu/uSp-TaN, the work of adhesion amounted to 1850 mJ/m2 for an average contact angle of 85°. Alternatively, the work of adhesion for Cu/uALD-TaN was determined to be 1850 mJ/m2, corresponding to an average contact angle of 85°, while for Cu/tALD-TaN, the work of adhesion was 2280 mJ/m2, at an ...

Research paper thumbnail of Spectroellipsometric characterization of Au-Y2O3–stabilized ZrO2 nanocomposite films

Journal of Materials Research, 2005

Nanocomposite thin films consisting of Au nanoparticles embedded in yttria-stabilized zirconia (Y... more Nanocomposite thin films consisting of Au nanoparticles embedded in yttria-stabilized zirconia (YSZ) were synthesized at room temperature by radio frequency magnetron co-sputtering from YSZ and Au targets and subsequently annealed in an argon atmosphere. Au microstructure and particle size were characterized as a function of annealing temperature from 600 to 1000 °C by x-ray diffraction, transmission electron microscopy, scanning electron microscopy, and Rutherford backscattering spectroscopy. Spectroscopic ellipsometry was also used to determine the optical constants of the resulting films. In particular, the refractive index of the nanocomposites was found to undergo an anomalous dispersion in the spectral region where the extinction coefficient achieves its maximum. Additionally, the incorporation of Au in the YSZ matrix was found to increase the refractive index in comparison to that of YSZ. At annealing temperatures higher than 800 °C, a good agreement was found between experim...

Research paper thumbnail of Correlating surface segregation and microstructural evolution of electrochemically deposited copper

Applied Physics Letters, 2012

ABSTRACT Electroplating bath additives become problematic when incorporated into electrochemicall... more ABSTRACT Electroplating bath additives become problematic when incorporated into electrochemically deposited copper as impurities. The surface segregation of these impurities during spontaneous microstructural transformation was monitored by secondary ion mass spectrometry and found to be no different than the surface chemistry of the non-transforming plated samples or even sputtered copper. The results show that microstructural transformation of electroplated copper progresses despite the presence of impurities, suggesting foreign constituents are not in fact responsible for grain boundary pinning in these films.

Research paper thumbnail of Sidewall Texture and Microstructure of iPVD Copper Seed in Narrow Damascene Trenches

Journal of the Electrochemical Society, 2013

ABSTRACT Impurities incorporated into copper during electrochemical deposition have long been pos... more ABSTRACT Impurities incorporated into copper during electrochemical deposition have long been postulated to inhibit grain growth in narrow interconnects. In this article we examine an alternative possible origin for the microstructural differences observed between narrow and wide lines. Specifically, the iPVD Cu seed layers in wide (1 mu m) and narrow (70 nm) lines differ significantly in microstructure and texture, as analyzed by transmission electron microscopy and electron diffraction. The seed in the wide lines has a polycrystalline microstructure similar to that seen in blanket films, with strong 111 texture in the field and sidewalls, and 112 texture at the bottom of the trench. Although the field between the 70 nm lines is also strongly 111-textured, the seed on the sidewalls and bottom of the trenches are largely untextured and, in fact, not entirely crystalline. This results in a higher energy, metastable microstructure which can contribute an additional driving force for the rapid nucleation and recrystallization of polycrystalline copper in the trenches before the overburden can transform and force the creation of bamboo grains in the lines.

Research paper thumbnail of Understanding and Controlling Cu Protrusions in 3D TSV Processing

International Symposium on Microelectronics, 2012

Research paper thumbnail of Helium Ion Beam Microscopy for Copper Grain Identification in BEOL Structures

Grain size determination in advanced metallization structures requires a technique with resolutio... more Grain size determination in advanced metallization structures requires a technique with resolution ~2 nm, with a high signal-to-noise ratio and high orientation-dependant contrast for unambiguous identification of grain boundaries. Ideally, such a technique would also be capable of high-throughput and rapid time-to-knowledge. The Helium Ion Microscope (HIM) offers one possibility for achieving these aims in a single platform. This article

Research paper thumbnail of Improving Palliative Care Team Meetings: Structure, Inclusion, and "Team Care

The American journal of hospice & palliative care, Jan 20, 2015

Increasing demands on palliative care teams point to the need for continuous improvement to ensur... more Increasing demands on palliative care teams point to the need for continuous improvement to ensure teams are working collaboratively and efficiently. This quality improvement initiative focused on improving interprofessional team meeting efficiency and subsequently patient care. Meeting start and end times improved from a mean of approximately 9 and 6 minutes late in the baseline period, respectively, to a mean of 4.4 minutes late (start time) and ending early in our sustainability phase. Mean team satisfaction improved from 2.4 to 4.5 on a 5-point Likert-type scale. The improvement initiative clarified communication about patients' plans of care, thus positively impacting team members' ability to articulate goals to other professionals, patients, and families. We propose several recommendations in the form of a team meeting "toolkit."

Research paper thumbnail of Spinal cord injury and sexuality in married or partnered men: activities, function, needs, and predictors of sexual adjustment

Archives of sexual behavior, 2001

The sexual behaviors, functioning, needs, and sexual satisfaction levels of men with spinal cord ... more The sexual behaviors, functioning, needs, and sexual satisfaction levels of men with spinal cord injuries (SCI) were studied. A sample of 50 men with SCI (median age = 50; median age at injury = 25.0), either married or in a committed relationship, responded to an anonymous survey of a large southern California regional spinal injury rehabilitation center. Multiple regression analyses indicated that perceived partner satisfaction, relationship quality, and sexual desire were significant predictors of sexual satisfaction and behavior. Erectile function, level of genital sensation, and orgasmic capacity all varied widely in the sample, as well. However, none of these variables were significantly related to sexual satisfaction. A varied sexual repertoire was independently related to sexual satisfaction and behavior, but did not offer additional predictive power. Results suggest that for married or partnered men with SCI, relationship factors including partner satisfaction and relations...

Research paper thumbnail of Personalizing Retrieval of Journal Articles for Patient Care

Abstract: this paper and otherwork in the context of PERSIVAL, we collected a corpusof 29,784 med... more Abstract: this paper and otherwork in the context of PERSIVAL, we collected a corpusof 29,784 medical articles in full text, either fromthe web with an automated crawler or via a licensingagreement with Ovid Technologies. The articles appearedin HTML format; we transformed them intoXML using a pipeline we developed on the basis ofpublicly available XML tools. The corpus containsarticles from 20

Research paper thumbnail of Carbon Nanotube Interconnects

Dekker Encyclopedia of Nanoscience and Nanotechnology, Second Edition - Six Volume Set (Print Version), 2008

Research paper thumbnail of MOCVD ZnS:Mn Films: Crystal Structure and Defect Microstructure as a Function of the Growth Parameters

MRS Proceedings, 2001

ABSTRACT Thin film electroluminescent devices employing zinc sulfide doped with manganese are ext... more ABSTRACT Thin film electroluminescent devices employing zinc sulfide doped with manganese are extensively used for applications in which the weight, brightness and mechanical robustness requirements preclude the use of other types of displays such as cathode ray tubes or liquid crystal displays. The physical, optical and electrical properties of phosphors such as ZnS:Mn can often depend strongly on microstructure, which in turn depends on the growth and processing of the film. For this study, ZnS:Mn layers were fabricated by metalorganic chemical vapor deposition (MOCVD) in the 250°-500°C range on an Al2TiO/ In2SnO5 /glass stack. Selected samples were then subjected to a post-deposition anneal in H2S/Ar at 700°C for up to 4 hours. The microstructure of the ZnS:Mn films was examined by Transmission Electron Microscopy (TEM). For all growth and annealing conditions, the films consisted of columnar grains whose column axis was parallel to the growth direction, and which widened laterally through the thickness of the films. For the as-deposited films, the crystal structure was found to be predominantly 2H structure, with the 8H polytype being identified in the low-temperature ZnS:Mn films. The 700°C post-deposition annealing was found to initiate a solid state transformation to the cubic (3C) ZnS crystal structure. All films contained high densities of stacking faults and microtwins, whose role in the 2H-3C transformation is discussed. Also discussed are initial Ultrasonic Force Microscopy (UFM) results which suggest a correlation between the defect microstructure and the elastic response of the material.

Research paper thumbnail of Epitaxial Growth of InGaAs on a Borosilicate-Glass- Bonded Compliant Substrate

This paper reports early results of a new approach to fabrication of a universal compliant substr... more This paper reports early results of a new approach to fabrication of a universal compliant substrate. A layer of borosilicate glass is grown on top of a GaAs handle wafer; a 10 nm thick single crystal GaAs template layer is then bonded to the glass. At typical deposition temperatures, the glass can flow to accommodate strain. A 4mum thick film

Research paper thumbnail of Relationship of aluminum grain size to the grain size of polycrystalline silicon produced by the aluminum induced crystallization of amorphous silicon

2009 34th IEEE Photovoltaic Specialists Conference (PVSC), 2009

The aluminum-induced crystallization and layer exchange process shows great promise for convertin... more The aluminum-induced crystallization and layer exchange process shows great promise for converting a-Si into large-grained poly-Si for solar cell applications. To investigate the relationship between the grain size of Al and the final grain size of poly-Si, a series of samples were deposited by RF magnetron sputtering 165 nm of Al onto SiN/SiO2 coated (100) silicon substrates. The Al grain size was varied by vacuum annealing prior to the deposition of 195 nm of a-Si. Completion of the layer exchange process resulted in poly-Si films which were then characterized with plan view TEM. The average Si grain size was found to increase as a function of increasing Al grain size, consistent with the grain-boundary nucleation model for this process. The largest average Si grain size of 4.9 ± 1.92 ¿m corresponded to the Al sample which was annealed for 24 hours at 550°C. The microstructure of the poly-Si film can therefore be manipulated by altering the properties of the as-deposited Al layer with an isothermal anneal.

Research paper thumbnail of Prospective Evaluation of a Teaching Model to Determine Competency in Performing Flexible Sigmoidoscopies

The American Journal of Gastroenterology, 1998

There are limited objective criteria for determining competency in performing flexible sigmoidosc... more There are limited objective criteria for determining competency in performing flexible sigmoidoscopies. The authors developed a teaching model using eight objective criteria that measured both cognitive and technical skills in performing flexible sigmoidoscopies. The objective was to determine whether the teaching model was a valid method and then to compare it to a commonly used Overall Competence Score or independent observer method. A total of 120 procedures with 10 residents were evaluated using the two methods. Eight objective parameters had been determined before validating the teaching model. Preset criteria determined competency on a single procedure, and competent performance on five procedures in a row determined certification to independently perform procedures. The teaching model was separately tested for validity and then compared with the independent observer method. A total of 120 procedures were graded using the teaching model method: 73 competent and 47 incompetent. Six of the seven objective parameters were associated with competency in the teaching model method. The eighth objective parameter was excluded because of lack of variation. Fifty of the 120 procedures were graded using the independent observer method: 36 competent and 14 incompetent. Two of the seven objective parameters were associated with competency in the independent observer method. Comparison of the two methods revealed seven discrepancies regarding competent and incompetent procedures. The correlation between the two methods was 0.71. The teaching model method offers objective criteria to evaluate skill in performing flexible sigmoidoscopies.