Thin layers near surfaces by ion implantation (original) (raw)

Indications of bulk property changes from surface ion implantation

Peter Townsend

Philosophical Magazine, 2011

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Ion beam analysis of nanoporous surfaces produced by He-implantation and oxidised by plasma-immersion ion-implantation

P. Gilberd

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2000

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The effect of ion implantation on the properties of Al films

Ivo Rangelow

Applied Surface Science, 1995

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Microstructural evolution during ion beam assisted Deposition

graham hubler

MRS Proceedings, 1994

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Nitrogen profiles in materials implanted via plasma-based ion implantation

Rachel Gouttebaron

Surface & Coatings Technology, 2002

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Structural Evolution of Near-Surface Layers in NiTi Alloy Caused by an Ion Implantation

A. Budziak, Zbigniew Swiatek

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Ion bombardment during thin film deposition and its influence on mechanical and chemical surface properties

Wolfgang Ensinger

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991

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Ion implantation as an efficient surface treatment

Christen Andersen Stræde

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1992

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Structure and Composition of Near-Surface Layers in the Ion-Implanted NiTi Alloy

Alexander Pogrebnjak

2010

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Ion beam deposition in materials research, NIMB Vol. 37-38, 16-21 (1989) RA Zhur, SJ Pennycook, TS Noggle, N Herbots, TE Haynes, BR Appleton

Nicole Herbots

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms, 1989

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Formation of Intermetallic Phases in Ion Implantation

Muhammad Rashid Nawaz

Journal of Mathematics, 2020

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The microstructure of Si surface layers after plasma-immersion He(+) ion implantation and subsequent thermal annealing

Andrey Lomov

Journal of applied crystallography, 2017

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Section X. Metals, ceramics, compound semiconductors AN-APPARATUS FOR COMBINED VAPOR DEPOSITION AND ION IMPLANTATION TO MODIFY THE SURFACE PROPERTIES OF METAL23

Luis Guzman

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The oxidation kinetics of Mg-, Si- and Fe-implanted aluminum by using X-ray photoelectron spectroscopy

Stewart McIntyre

Surface Science, 1999

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Ion beam deposition and in-situ ion beam analysis

Kevin Orrman-Rossiter

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms, 1992

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Inhomogeneous structure of near-surface layers in the ion-implanted NiTi alloy

T. Czeppe, O.yu. Bonchyk, Zbigniew Swiatek

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Ion beams as a means of deposition and in-situ characterization of thin films and thin film layered structures

Orlando Auciello

1992

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An apparatus for combined vapor deposition and ion implantation to modify the surface properties of metals

Lina Guzmán

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987

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Ion implantation, ion beam mixing, and annealing studies of metals in Al2O3, SiC and Si3N4

J. Narayan

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1984

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Depth selective microstructural analysis of ion implanted metals by cross-section transmission electron microscopy and computer simulation

eric gerritsen

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms, 1989

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Analytical electron microscopy of Al2O3 implanted with iron ions

C. McHargue

Journal of Materials Science, 1992

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Ion Implantation for Semiconductor Doping and Materials Modification

Michael Current

Volume 4: Accelerator Applications in Industry and the Environment, 2012

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Formation of thin surface films of Ni-, V- and Co-silicide by low-energy implantation with a metal vapour vacuum arc ion source

Harry Whitlow

Microelectronic Engineering, 1997

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Ion Beam Deposition of Materials At 40–200 Ev: Effect of Ion Energy And Substrate Temperature On Interface, Thin Film And Damage Formation

Nicole Herbots

MRS Proceedings, 1985

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Study of near-surface layers modified by ion implantation in Si wafers by grazing incidence X-ray reflectometry

Zbigniew Werner

Journal of Alloys and Compounds, 1999

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Donage and in Situ Annealing During Ion Implantation

Devendra Sadana

MRS Proceedings, 1982

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• Surface Disorder Production During Plasma Immersion Implantation And High Energy Ion Implantation. “Nuclear Instruments And Methods In Physics Research B, 118, 1996, 728-732.”

T. Lohner

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Reactive plasma immersion ion implantation for surface passivation

Alexander G . Donchev

Surface & Coatings Technology, 2007

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Characterization of Ti-6A1-4V modified by nitrogen plasma immersion ion implantation

Fernando Alonso

Surface and Coatings Technology, 1997

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Thick and Homogeneous Surface Layers Obtained by Reactive Ion-beam- enhanced Deposition

Luis Guzman

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Group-IV and V ion implantation into nanomaterials and elemental analysis on the nanometre scale

John Kennedy

International Journal of Nanotechnology, 2009

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Film deposition and buried layer formation by mass-analyzed ion beams

Hiroshi Inokawa

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

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