Precipitation and extended defect formation in silicon (original) (raw)

A model for the formation of lattice defects at silicon oxide precipitates in silicon

Jan Vanhellemont

Physica B: Condensed Matter, 2003

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Critical precipitate size revisited and implications for oxygen precipitation in silicon

Jan Vanhellemont

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A criterion for the formation of stacking faults at incoherent spheroidal precipitates and application to silicon oxide in silicon

Jan Vanhellemont

physica status solidi (a), 2006

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Influence of Residual Point Defect Supersaturation on the Formation of Grown-In Oxide Precipitate Nuclei in CZ-Si

Jan Vanhellemont

Journal of The Electrochemical Society, 1998

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From point defects to dislocation loops: A comprehensive modelling framework for self-interstitial defects in silicon

Pedro Castrillo, Martin Jaraiz

Solid State Electronics, 2008

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Extended Defects in Silicon: an Old and New Story

Jan Vanhellemont

Solid State Phenomena, 2004

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Recent progress in the understanding of crystallographic defects in silicon

Jan Vanhellemont

Journal of Crystal Growth, 1993

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Stability of defects in crystalline silicon and their role in amorphization

Lourdes Pelaz

Physical Review B, 2001

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Growth of Oxygen Precipitates and Dislocations in Czochralski Silicon

Robert Falster

IEEE Journal of Photovoltaics

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Stability of Si-Interstitial Defects: From Point to Extended Defects

Jeongnim Kim

Physical Review Letters, 2000

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Metal precipitation at grain boundaries in silicon: Dependence on grain boundary character and dislocation decoration

T. Ciszek

Applied Physics Letters, 2006

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Atomistic analysis of defect evolution and transient enhanced diffusion in silicon

Lourdes Pelaz

Journal of Applied Physics, 2003

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Microscopic underpinnings of defect nucleation and growth in silicon crystal growth and wafer processing

T. Sinno

Materials Science and Engineering: B, 2009

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Transition metal co-precipitation mechanisms in silicon

Matthias Heuer

Acta Materialia, 2007

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Modeling of the Ostwald ripening of extrinsic defects and transient enhanced diffusion in silicon

B. Colombeau

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2002

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DLTS study of nucleation stage of oxygen precipitate in silicon

Irina Antonova

Physica B: Condensed Matter, 1998

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Mechanism for generating interstitial atoms by thermal stress during silicon crystal growth

Koun Shirai

Progress in Crystal Growth and Characterization of Materials, 2019

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Microdefects in silicon and their relation to point defects

Helmut Föll

Journal of Crystal Growth, 1981

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The microscopic mechanism of silicon precipitation in Al/Si system

Natalie Moiseenko, David Fuks

Materials Science and Engineering A-structural Materials Properties Microstructure and Processing, 2006

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Dissolution of extended defects in strained silicon

Chris Olsen

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 2008

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Diffusion-influenced nucleation: a case study of oxygen precipitation in silicon

Kenneth Kelton

Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 2003

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The Precipitation of Nickel and Copper at Grain Boundaries in Silicon

Hans Joachim Möller

MRS Proceedings, 1990

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Investigation of Defect Formation Processes in Silicon with Iron Impurity

Daryabay Esbergenov

2021

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Precipitation in silicon wafers after high temperature preanneal studied by X-ray diffraction methods

Milan Svoboda

Physica B: Condensed Matter, 2012

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Nucleation, growth and dissolution of extended defects in implanted Si: impact on dopant diffusion

D. Mathiot

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1999

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Influence of mechanical defects on the crystal lattice of silicon

David Allen, Thomas Jauß, Patrick McNally

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Nucleation and formation of oxygen precipitates in Czochralski grown silicon annealed under uniform stress conditions

Irina Antonova

Physica B: Condensed Matter, 1998

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Oxygen Related Lattice Defects in Silicon: Present Status

Hugo Bender

MRS Proceedings, 1992

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Complexity of Small Silicon Self-Interstitial Defects

Jeongnim Kim

Physical Review Letters, 2004

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Stress and doping impact on intrinsic point defect behavior in growing single crystal silicon

Jan Vanhellemont

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Stress and doping impact on intrinsic point defects in silicon and germanium

Jan Vanhellemont, Koji Sueoka

2014

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Recombination at Oxide Precipitates in Silicon

Karsten Bothe

Solid State Phenomena, 2011

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Extended Si defects

Jeongnim Kim

Arxiv preprint cond-mat/ …, 1996

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Theoretical study of the impact of stress on the behavior of intrinsic point defects in large-diameter defect-free Si crystals

Jan Vanhellemont, Koji Sueoka

Journal of Crystal Growth, 2013

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Defects in Silicon: From Bulk Crystals to Nanostructures

Magdalena Ciurea

2008

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