A sensitive detection method for capacitive ultrasonic transducers (original) (raw)
Related papers
Micromachined capacitive ultrasonic transducers fabricated using silicon on insulator wafers
Microelectronic Engineering, 2002
Surface micromachined capacitive ultrasonic transducers
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2000
The microfabrication of capacitive ultrasonic transducers
… Systems, Journal of, 1998
Advances in Capacitive Micromachined Ultrasonic Transducers
Micromachines, 2019
Capacitive micromachined ultrasonic transducers for robotic sensing applications
2004
Precision Engineering, 2002
Highly integrated 2-D capacitive micromachined ultrasonic transducers
The characterization of capacitive micromachined ultrasonic transducers in air
Ultrasonics, 2002
New fabrication process for capacitive micromachined ultrasonic transducers
2003
Operating point of Capacitive Micromachined Ultrasonic Transducers with Sub-structural Elements
Electronics and Electrical Engineering, 2012
Characterization of capacitive micromachined ultrasonic transducers
2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014
A new regime for operating capacitive micromachined ultrasonic transducers
Baris Bayram, Butrus Khuri-Yakub
Ultrasonics, …, 2003
Capacitive micromachined ultrasonic transducer technology for medical ultrasound imaging
Proceedings of SPIE, 2005
2002 IEEE Ultrasonics Symposium, 2002. Proceedings.
P4M-3 Experimental Characterization of Capacitive Micromachined Ultrasonic Transducers
… Symposium, 2007
Lamb wave devices using capacitive micromachined ultrasonic transducers
Applied Physics Letters, 2001
IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control, 2009
Dynamic analysis of capacitive micromachined ultrasonic transducers
IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control, 2005
Capacitive micromachined ultrasonic transducer with an open cells structure
Alessandro Stuart Savoia, Riccardo Carotenuto
Conference proceedings : ... Annual International Conference of the IEEE Engineering in Medicine and Biology Society. IEEE Engineering in Medicine and Biology Society. Annual Conference, 2014
2008
… Systems, Journal of, 1999
Micromachining for improvement of integrated ultrasonic transducer sensitivity
IEEE Transactions on Electron Devices, 1990
Lamb wave devices based on capacitive micromachined ultrasonic transducers
2002
Lumped Electromechanical Modeling of Capacitive Micromachined Ultrasonic Transducers
Materials Today: Proceedings, 2016
Minimally invasive capacitive micromachined ultrasonic transducers array for biomedical applications
2008
A Capacitive Micromachined Ultrasonic Transducer Array for Minimally Invasive Medical Diagnosis
IEEE/ASME Journal of Microelectromechanical Systems, 2008
Surface micromachined capacitive ultrasonic immersion transducers
IEEE International Conference on Micro Electro Mechanical Systems, 1998
Fabricating capacitive micromachined ultrasonic transducers with wafer-bonding technology
… Systems, Journal of, 2003