Wet etching of GaAs using synchrotron radiation x rays (original) (raw)
Related papers
Synchrotron-radiation-induced anisotropic wet etching of GaAs
Applied Physics Letters, 1999
Etching of GaAs(100) with Aqueous Ammonia Solution: A Synchrotron-Photoemission Spectroscopy Study
The Journal of Physical Chemistry C, 2010
Sample size effect in photoelectrochemical etching of n-GaAs
Derrick C Mancini, N. Moldovan
Applied Physics Letters, 2000
Utilization of wet chemical etching for revealing defects in GaAs X-ray detector arrays
Vacuum, 2005
The Journal of Physical Chemistry C, 2008
Applied Surface Science, 2004
Chemical etching of (100) GaAs in a sulphuric acid-hydrogen peroxide-water system
Journal of Materials Science, 1987
Characterization of wet-etched GaAs (100) surfaces
Surface and Interface Analysis, 2005
Electrochimica Acta, 2000
Effects of electron cyclotron resonance etching on the ambient (100) GaAs surface
Applied Physics Letters, 1995
Local oxide growth on the n-GaAs surface studied by small area XPS
Surface Science, 1999
Dry etching techniques for GaAs ultra-high vacuum chamber integrated processing
Microelectronic Engineering, 1994
X-ray induced, substrate-carrier mediated deposition of metal on GaAs
Applied Physics Letters, 2006
Melanie Will-Cole -- Please note: Publications & Patents listed under M.W. Cole
Journal of Applied Physics, 1995
Thermal etching of GaAs (1 1 3) surfaces
Journal of Materials Science-materials in Electronics - J MATER SCI-MATER ELECTRON, 1998
Microelectronic Engineering
Reconstruction dependence of the etching and passivation of the GaAs(001) surface
JETP Letters, 2010
Layer-by-layer etching of GaAs (110) with halogenation and pulsed-laser irradiation
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1998
Angle-resolved XPS structural investigation of GaAs surfaces
Journal of Crystal Growth, 2008
The Open Plasma Physics Journal
Ultrasmall device fabrication using dry etching of gaas
Microelectronic Engineering, 1986
Wet etching of InGaP and GaAs in HCl: H3PO4: H2O2
The Journal of Physical Chemistry B, 2000
Photoenhanced wet etching of gallium nitride in KOH-based solutions
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2001
Improvement the InAs, InSb, GaAs and GaSb surface state by nanoscale wet etching
Applied Nanoscience, 2021
Low-energy particle treatment of GaAs surface
Jan Ivanco, E. Pincík, Matej Jergel
Thin Solid Films, 2003
High-rate electron cyclotron resonance etching of GaAs via holes
Materials Science and Engineering: B, 2000
Angle-resolved X-Ray photoelectron spectroscopy for the characterization of GaAs(OO1) surfaces
Journal of Electron Spectroscopy and Related Phenomena, 1987