Studies of Na-irradiated Ni/Si bilayers: Na migration and NiSi formation (original) (raw)

Effects of Ne- and Ar-ion irradiations on Ni/SiO2 bilayers

M. Gustafsson, J. Keinonen

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1999

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Formation of Ni2Si silicide in Ni/Si bilayers by ion beam mixing

A. Guittoum, S. Tobbeche

Vacuum, 2005

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Depth profiling of nitrogen implanted into Si/C and Zr/C bilayers with nuclear reaction analysis

Setsuo Nakao

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2000

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Ion beam synthesis of buried and surface nickel silicides during a single implantation step

Jan Vanhellemont

Applied Surface Science, 1993

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Implantation temperature dependent distribution of NiSi2 formed by ion beam synthesis in silicon

Jan Vanhellemont

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On the structure and magnetism of Ni/Si and Fe/Si bilayers irradiated with 350MeV Au ions

Pradeep Sahoo

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms, 2006

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Interface alloying due to Kr-irradiation on Ni/Si system

Debasish Datta

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms, 2007

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Epitaxial reordering of ion-irradiated NiSi2 layers

Devendra Sadana

Thin Solid Films, 1982

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Chemical bonding and interface analysis of ultrathin silicon-nitride layers produced by ion implantation and Electron Beam Rapid Thermal Annealing (EB-RTA)

Eleni Paloura

Applied Physics A Solids and Surfaces, 1994

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Effect of bilayer geometry on the diffusion of Ni in amorphous Si and the consequent growth of silicides

Dr. Mahamad Ahamad Mohiddon

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 2012

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Nanoscale η-NiSi formation via ion irradiation of Si/Ni/Si

Nasrin Banu

Journal of Applied Physics, 2017

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Formation of thin surface films of Ni-, V- and Co-silicide by low-energy implantation with a metal vapour vacuum arc ion source

Harry Whitlow

Microelectronic Engineering, 1997

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Ion irradiation induced solid-state amorphous reaction in Ni/Ti multilayers

Dragan Toprek

Applied Surface Science, 2013

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Formation of intermetallic phase in Ni/Ti multilayer structure by ion implantation and thermal annealing

Goran Dražič

Intermetallics, 2012

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Radiation Enhanced Diffusion of Nickel in Silicon Diodes

Jan Vobecky

2012

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Structure and Composition of Near-Surface Layers in the Ion-Implanted NiTi Alloy

Alexander Pogrebnjak

2010

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Redistribution of Nickel Ions Embedded within Indium Phosphide Via Low Energy Dual Ion Implantations

Wickramaarachchige J. Lakshantha

Journal of Nuclear Physics, Material Sciences, Radiation and Applications, 2012

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Composition changes in N2+ bombarded Ti/Si bilayers and multilayers: interplay between random and chemically guided effects

MARCO I BONELLI

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1997

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Thin Ni Silicide Formation by Low Temperature-Induced Metal Atom Reaction with Ion Implanted Amorphous Silicon

Yuri Erokhin

MRS Proceedings, 1992

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Strain, interdiffusion, and microstructural evolution under ion irradiation in Ni(111)∕Mo(110) multilayers: Interdependence with elastic properties

Philippe Djemia

Physical Review B, 2005

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Structural characterisation of nitrogen ion implantation into silicon for sensor technology

J. Samitier

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993

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Swift ion irradiations of natFe/57Fe/Si trilayers

Martin Weisheit

Applied Surface Science, 2006

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Depth profiling of high energy nitrogen ions implanted in the 〈100〉, 〈110〉 and randomly oriented silicon crystals

Srdjan Petrovic

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2012

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Structural and Elastic Response of Mo/Ni Multilayers to Ion Irradiation

Philippe Djemia

MRS Proceedings, 2000

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Plasma ion implantation of nitrogen into silicon: high resolution x-ray diffraction

Mario Ueda

Brazilian Journal of Physics, 1999

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Dynamics of the ion beam induced nitridation of silicon

Sanju Deenapanray

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2002

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Xenon-ion-beam modifications of a-SiO2 and Ni/a-SiO2 layers

M. Gustafsson

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1999

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A reinvestigation of Ni2Si thin film growth on Si(111) by TEM and RBS. Evidence of the presence of an interfacial NiSi layer prior to Ni consumption

Roland Mattheis

Physica Status Solidi (a), 1988

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Silicide Formation By High Dose Transition Metal Implants Into Si

Francisco Beltran Sanchez

MRS Proceedings, 1985

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Characterization of silicon doped with sodium upon high-voltage implantation

Yuriy Kudriavtsev

Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 2009

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Effect of swift heavy ion-irradiation on Cr/Fe/Ni multilayers

Ratnesh Gupta

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms, 1999

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Fabrication and nuclear analysis of isotopic 14N and 15N ion-implanted silicon standards

Martin Bolduc

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2008

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The early stages of irradiation induced γ' precipitation in proton irradiated nickel-silicon alloys

Alan Ardell

Journal of Nuclear Materials, 1979

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Formation mechanism and structures of buried oxy-nitride layers produced by ion beam synthesis

Richard Chater

Vacuum, 1986

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