On the correlation between Si+ yields and surface oxygen concentration using in situ SIMS-LEIS (original) (raw)
Related papers
Surface Science, 2007
Modifications in the Si valence band after ion-beam-induced oxidation
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1994
Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms, 1996
2001
Analytical Chemistry, 1970
Towards a model for the formation of positive Si+ ions
Applied Surface Science, 2003
Ultrahigh sensitivity SIMS analysis of oxygen in silicon
Surface and Interface Analysis, 2018
Incorporation of Ambient Oxygen During Silicon Deposition and the Effects of Argon Ion Bombardment
MRS Proceedings, 1990
Applied Surface Science, 2003
Real-time observation of the dry oxidation of the Si (100) surface with ambient …
Applied Physics …, 2008
Ion beam effects in SiOx (x<2) subjected to low energy Ar+, He+ and N2+ bombardment
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2002
Comparison of secondary ion emission induced in silicon oxide by MeV and keV ion bombardment
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1994
SiOx structural modifications by ion bombardment and their influence on electrical properties
Journal of Optoelectronics and Advanced Materials
The Journal of Chemical Physics, 2007
Journal of Applied Physics, 2009
Applied Physics Letters, 2008
Japanese Journal of Applied Physics, 2003
Physical Review B, 2009
Electron capture and loss in the scattering of hydrogen and oxygen ions on a Si surface
Surface Science, 1998
Oxygen O18 method and the search for the ionization mechanism in sputtering of oxygenated surfaces
Applied Surface Science, 2008
Laser-enhanced oxidation of Si
Applied Physics Letters, 1983
STM studies of Si(100)-2×1 oxidation: defect chemistry and Si ejection
Ultramicroscopy, 1992
Surface and Coatings Technology, 2020
High resolution ion scattering study of silicon oxynitridation
Applied Physics Letters, 1996
Surface morphology of Si(100), GaAs(100) and InP(100) following O2+ and Cs+ ion bombardment
Vacuum, 1984
Oxidation of silicon: Further tests for the interfacial silicon emission model
Journal of Applied Physics, 2007
Surface Science, 2002
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
Interactive metal ion-silicon oxidation/reduction processes on fumed silica
2012
Interaction of low-energy oxygen ions with the Si(100) surface
Physical Review B, 1992
Oxygen adsorption on a Si(100) substrate: effects on secondary emission properties
Surface Science, 2001
All-optical determination of initial oxidation of Si(100) and its kinetics
The European Physical Journal B, 2008
Ion beam mixing and oxidation of a Si/Ge-multilayer under oxygen bombardment
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1994