Carbon nanotube growth by PECVD: a review (original) (raw)
Growth of aligned carbon nanotubes by plasma-enhanced chemical vapor deposition: Optimization of growth parameters
Valeriu Filip
Journal of Applied Physics, 2001
View PDFchevron_right
Carbon nanotubes by plasma-enhanced chemical vapor deposition
William Milne
Pure and Applied Chemistry, 2000
View PDFchevron_right
High growth rates and wall decoration of carbon nanotubes grown by plasma-enhanced chemical vapour deposition
Oleg Nerushev
View PDFchevron_right
Growth process conditions of vertically aligned carbon nanotubes using plasma enhanced chemical vapor deposition
William Milne
Journal of Applied Physics, 2001
View PDFchevron_right
Low-temperature growth of carbon nanotubes by plasma-enhanced chemical vapor deposition
Caterina Ducati
Applied Physics Letters, 2003
View PDFchevron_right
Low temperature plasma carbon nanotubes growth on patterned catalyst
Christophe Cardinaud
Microelectronic Engineering, 2006
View PDFchevron_right
Pulsed PECVD for Low-temperature Growth of Vertically Aligned Carbon Nanotubes
Heremba Bailung
Chemical Vapor Deposition, 2014
View PDFchevron_right
Role of carbon atoms in plasma-enhanced chemical vapor deposition for carbon nanotubes synthesis
Nagahiro Saito
Thin Solid Films, 2006
View PDFchevron_right
Dc plasma-enhanced chemical vapour deposition growth of carbon nanotubes and nanofibres: in situ spectroscopy and plasma current dependence
Oleg Nerushev
Applied Physics A, 2007
View PDFchevron_right
Low-Temperature Growth of Multiwalled Carbon Nanotubes by Surface-Wave Plasma-Enhanced Chemical Vapor Deposition Using Catalyst Nanoparticles
Tadashi Sakai
Japanese Journal of Applied Physics, 2009
View PDFchevron_right
Parametric study of synthesis conditions in plasma-enhanced CVD of high-quality single-walled carbon nanotubes
zafar iqbal
Carbon, 2006
View PDFchevron_right
Design and construction of plasma enhanced chemical vapor deposition reactor and directed assembly of carbon nanotubes Scholar Commons Citation
veronica Arroyave Murillo
View PDFchevron_right
Plasma composition during plasma-enhanced chemical vapor deposition of carbon nanotubes
William Milne
Applied Physics Letters, 2004
View PDFchevron_right
Patterned growth of carbon nanotubes obtained by high density plasma chemical vapor deposition
Ronaldo Mansano
Journal of Physics: Conference Series, 2015
View PDFchevron_right
Comparisons on properties and growth mechanisms of carbon nanotubes fabricated by high-pressure and low-pressure plasma-enhanced chemical vapor deposition
Jimmy Hsu
Diamond and Related Materials, 2004
View PDFchevron_right
Effect of catalyst layer thickness and Ar dilution on the plasma deposition of multi-walled carbon nanotubes
ilaria armentano
Diamond and Related Materials, 2003
View PDFchevron_right
Gas-phase and sample characterizations of multiwall carbon nanotube growth using an atmospheric pressure plasma
L. Overzet
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2006
View PDFchevron_right
Effects of ions and atomic hydrogen in plasma-assisted growth of single-walled carbon nanotubes
Kostya Ostrikov
Journal of Applied Physics, 2007
View PDFchevron_right
Dendrimer-assisted low-temperature growth of carbon nanotubes by plasma-enhanced chemical vapor deposition
Timothy Sands
Chemical Communications, 2006
View PDFchevron_right
Plasma-enhanced chemical vapour deposition growth of carbon nanotubes on different metal underlayers
Nele Moelans
Nanotechnology, 2005
View PDFchevron_right
Low temperature plasma chemical vapour deposition of carbon nanotubes
Phillip John
Diamond and Related Materials, 2002
View PDFchevron_right
Growth of Vertically Aligned Carbon Nanotubes by RF-DC Plasma Chemical Vapor Deposition
JUNFU LI
View PDFchevron_right
Plasma Enhanced Chemical Vapour Deposition of Horizontally Aligned Carbon Nanotubes
Matthew T Cole
View PDFchevron_right
Plasma Enhanced Chemical Vapor Deposition Time Effect on Multi-Wall Carbon Nanotube Growth Using C2H2 and H2 as Precursors
Noriah Yusoff
Advanced Materials Research, 2014
View PDFchevron_right
Controlled density of vertically aligned carbon nanotubes in a triode plasma chemical vapor deposition system
yvan bonnassieux
Thin Solid Films, 2006
View PDFchevron_right
Plasma assisted growth of nanotubes and nanowires
Mike Cooke
Surface and Coatings Technology, 2007
View PDFchevron_right
Modeling catalyst nucleation for carbon nanotube growth by chemical-vapor and plasma-enhanced chemical-vapor deposition methods
Yaser Abdi
Journal of Nanoparticle Research, 2009
View PDFchevron_right