Low-power micro gas sensor (original) (raw)

MEMS-based microheaters integrated gas sensors

Nidhi Dhull

Integrated Ferroelectrics, 2018

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Technological processes for microheater and micro-hot-plate in the implementation of a MEM gas sensor

WILFRIDO CALLEJA-ARRIAGA

Gastroenterology, 2005

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Design of the optimum microheater for smart MEMS gas sensor

Hiranmay Saha

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Electro-thermal simulations and modelling of micromachined gas sensor

Yasar Gurbuz

2001 Microelectromechanical Systems Conference (Cat. No. 01EX521)

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Thermal and gas-sensing properties of planar-type micro gas sensor

Noboru Yamazoe

Sensors and Actuators B: Chemical, 2000

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Thermal simulation and optimization of micromachined gas sensor structure

Ivan Hotový

2010

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Characterization of an Embedded Micro-Heater for Gas Sensors Applications

Sergio Nicoletti

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FABRICATION OF MICROHEATER AND INTER- DIGITED ELECTRODES ON SILICON PLATFORM FOR LOW POWER IN-TEGRATED GAS SENSOR APPLICATIONS

Sahadev Roy

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Design and manufacturing of micro heaters for gas sensors

O. Nedelcu, Katrin Persson

4M 2006 - Second International Conference on Multi-Material Micro Manufacture, 2006

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Design and electro-thermal simulation of a polysilicon microheater on a suspended membrane for use in gas sensing

M S Prasad

Indian Journal of …, 2007

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Thermal microsensor with a.c. heating for gas-pressure measurements

Borys Lupyna

Sensors and Actuators A: Physical, 1997

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ACCURATE EXTRACTION OF THE TEMPERATURE OF THE HEATING ELEMENT IN MICROMACHINED GAS SENSORS

Sergio Nicoletti

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Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor

Abdullah Algamili

Micromachines, 2022

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A monolithic CMOS microhotplate-based gas sensor system

Mona E Zaghloul

Sensors Journal, IEEE, 2002

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Design and Simulation of Double-spiral Shape Micro-heater for Gas Sensing Applications

Vineet Sahula

International Frequency Sensor Association Publishing, 2011

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Thermal and mechanical analysis of micromachined gas sensors

J. Morante

Journal of Micromechanics and Microengineering, 2003

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Thermal model for a microhot plate used in a MEM gas sensor

Jose Gonzalez VIdal

2008

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Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology

Uladzimir Fiadosenka

Chemosensors

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Simulation and Fabrication of an Ultra-Low Power Miniature Microbridge Thermal Conductivity Gas Sensor

Ricardo G-Aguilar

Journal of the Electrochemical Society, 2014

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Optimization of a Low-Power Chemoresistive Gas Sensor: Predictive Thermal Modelling and Mechanical Failure Analysis

Alvise Bagolini

Sensors

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Microheaters for Copper Oxide-Based Gas Sensors

Oleg Lupan

2020

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Implementation of CMOS compatible conductance-based micro-gas-sensor system

Muhammad yaqoob Afridi

… Conference on Circuit …, 2001

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Ceramic Micro Heater Technology for Gas Sensors

Petko Petkov, O. Nedelcu, Katrin Persson

2006 International Semiconductor Conference, 2006

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An industrializable Silicon-based microhotplate for metal oxides gas sensors

Adama Konaté

2014

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Development of a low-power thick-film gas sensor deposited by screen-printing technique onto a micromachined hotplate

Benno Margesin

Sensors and Actuators B: Chemical, 2001

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A System for the Dynamic Control and Thermal Characterization of Ultra Low Power Gas Sensors

Pisana Placidi

IEEE Transactions on Instrumentation and Measurement, 2011

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