X-ray lithography-an overview (original) (raw)
Related papers
An overview of x-ray lithography for use in semiconductor device preparation
Vacuum, 1991
Microelectronics Reliability, 1984
Physical and technological limits in optical and x-ray lithography
Microelectronic Engineering, 1987
Design, Characterization, and Packaging for MEMS and Microelectronics, 1999
Sub‐100‐nm x‐ray mask technology using focused‐ion‐beam lithography
1989
Masks for X-Ray-Lithography with a Point-Source Stepper
Journal of Vacuum Science & Technology B, 1992
3D microstructures fabricated by partially opaque X-ray lithography masks
Microelectronic Engineering, 2000
Patterning of 100 nm Features Using X-ray Lithography
Journal of Photopolymer Science and Technology, 1997
Synchrotron-based X-ray lithography at Stanford University
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1988
Extension of x-ray lithography to 50 nm with a harder spectrum
JUAN PABLO JOSE MARIA MALDONADO
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1999
Journal of …, 2010
3-Dimensional Microstructure Fabrication using Multiple Moving Mask Deep X-ray Lithography Process
IEEJ Transactions on Sensors and Micromachines, 2000
Optical properties of x-ray lithography masks
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 1990
Investigation of mask pattern proximity correction to reduce image shortening in X-ray lithography
Microelectronic Engineering, 1998
X-Ray Lithography for Nanofabrication: Is There a Future?
Frontiers in nanotechnology, 2022
Concept, construction and commissioning of an alignment system for deep X-ray lithography
Microelectronic Engineering, 2002
Wavelength Dependence of Exposure Window and Resist Profile in X-Ray-Lithography
Juan Gilberto Ceballos Maldonado
Journal of Vacuum Science & Technology B, 1994
Quality control for deep x-ray lithography (LIGA): a preliminary metrology study
Microsystem Technologies, 2012
Operational simulation of an x-ray lithography cell
Proceedings of the 31st conference on Winter simulation Simulation---a bridge to the future - WSC '99, 1999
Jan G Korvink, Yoshikazu HIRAI, Osamu Tabata
… Systems, Journal of, 2006
Mask technologies for soft-x-ray projection lithography at 13 nm
Applied Optics, 1993
Japanese Journal of Applied Physics, 2002
X-ray lathe: An X-ray lithographic exposure tool for nonplanar objects
Journal of microelectromechanical systems, 1996
High resolution x-ray masks for high aspect ratio microelectromechanical systems (HARMS)
Micromachining and Microfabrication Process Technology VIII, 2003
Fabrication of the X-Ray Mask using the Silicon Dry Etching
Journal of Advanced Mechanical Design Systems and Manufacturing, 2008
Soft X-Ray Lithography for High-Aspect Ratio Sub-Micrometer Structures
TechConnect Briefs, 2012
Monte Carlo simulation of line edge profiles and linewidth control in x-ray lithography
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1985
Electrodeposition Assisted X-ray Lithography: Single Step Approach
Process Simulation of Moving Mask Deep X-Ray Lithography
Mem SR Cent …, 2005
Use of SU-8 photoresist for very high aspect ratio x-ray lithography
Microelectronic Engineering, 2000
Enhanced adhesion buffer layer for deep x-ray lithography using hard x rays
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Lithographic Materials Technologies: 193 nm Imaging and Beyond
MRS Proceedings, 1999
Scientific Reports
Predicting in-plane distortion from electron-beam lithography on x-ray mask membranes
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 1996