Metal hierarchical patterning by direct nanoimprint lithography (original) (raw)
Related papers
Large area sub-100 nm direct nanoimprinting of palladium nanostructures
Nanoimprinting over topography and multilayer three-dimensional printing
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2002
Thin Solid Films, 2009
Nanoimprint Lithography for Functional Three-Dimensional Patterns
Advanced Materials, 2010
ACS Nano, 2016
Patterning 2D Metallic Surfaces by Soft Lithography
MRS Proceedings, 2001
Bilayer, nanoimprint lithography
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000
Photoresist-Free Lithographic Patterning of Solution-Processed Nanostructured Metal Thin Films
Advanced Materials, 2008
Pattern Generation by Using Multistep Room-Temperature Nanoimprint Lithography
IEEE Transactions on Nanotechnology, 2007
Large area nanoimprint by substrate conformal imprint lithography (SCIL)
Advanced Optical Technologies, 2017
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2011
Journal of Nanoscience and Nanotechnology, 2009
Design of Patterned Surfaces with Selective Wetting Using Nanoimprint Lithography
Macromolecular Chemistry and Physics, 2010
Liquid transfer nanoimprint replication on non-flat surfaces for optical applications
Microelectronic Engineering, 2012
Transfer printing of 3D hierarchical gold structures using a sequentially imprinted polymer stamp
Nanotechnology, 2008
Various metallic nano-sized patterns fabricated using an Ag ink printing technique
Electronic Materials Letters, 2012
Toward a Universal Method To Pattern Metals on a Polymer
Chemistry of Materials, 2008
Biomimetic, hierarchical structures on polymer surfaces by sequential imprinting
Applied Surface Science, 2008
Coatings, 2020
Applied Surface Science - APPL SURF SCI, 2011
Three-Dimensional Patterning Using Ultraviolet Curable Nanoimprint Lithography
2009
Effects of thin film properties on metallic pattern formation by direct nanoimprint
Journal of Materials Processing Technology, 2008
A combined-nanoimprint-and-photolithography patterning technique
Microelectronic Engineering, 2004
High-Speed Roll-to-Roll Nanoimprint Lithography on Flexible Plastic Substrates
Nanoimprint lithography: 2D or not 2D? A review
Applied Physics A, 2015
Microelectronic Engineering, 2009
Nanoimprint lithography for organic electronics
Microelectronic Engineering, 2002
International Journal of Nanotechnology, 2014
Stepwise Molding, Etching, and Imprinting to Form Libraries of Nanopatterned Substrates
Langmuir, 2013
Flexible stamp for nanoimprint lithography
18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005., 2005
A Universal Scheme for Patterning of Oxides via Thermal Nanoimprint Lithography
Reusable Stamps for Printing Sub-100 nm Patterns of Functional Nanoparticles
Small, 2012
28 Three-Dimensional Patterning using Ultraviolet Nanoimprint Lithography
2017
Three-Dimensional Patterning Using Ultraviolet Nanoimprint Lithography
Lithography, 2010
Chemical patterning of sub-50-nm half pitches via nanoimprint lithography
Microelectronic Engineering, 2005