Fabrication of high quality factor GaAs/InAsSb photonic crystal microcavities by inductively coupled plasma etching and fast wet etching (original ) (raw )Fabrication of high quality factor photonic crystal microcavities in InAsP∕ InP membranes combining reactive ion beam etching and reactive ion etching
Ivan Prieto
Journal of Vacuum Science & Technology B, 2009
View PDFchevron_right
High quality factor GaAs-based photonic crystal microcavities by epitaxial re-growth
Ivan Prieto
Optics Express, 2013
View PDFchevron_right
Focused ion beam etching for the fabrication of micropillar microcavities made of III-V semiconductor materials
John Rarity
Journal of Vacuum …, 2007
View PDFchevron_right
Enhanced light emission from InAs quantum dots in single-defect photonic crystal microcavities at room temperature
Jen-inn Chyi
Applied Physics Letters, 2005
View PDFchevron_right
Enhanced spontaneous emission from InAs/GaAs quantum dots in pillar microcavities emitting at telecom wavelengths
Philippe Gilet
Optics Letters, 2007
View PDFchevron_right
Fabrication of InAs quantum dots in AlAs∕ GaAs DBR pillar microcavities for single photon sources
Bingyang Zhang
2005
View PDFchevron_right
Continuous and pulsed room temperature lasing behaviour at 1.55 μm on high quality factor photonic crystal microcavities
Luisa Gonzalez
Active Photonic Materials III, 2010
View PDFchevron_right
Detailed analysis of the influence of an inductively coupled plasma reactive-ion etching process on the hole depth and shape of photonic crystals in InP/InGaAsP
Daniel Erni
Journal of Vacuum Science & Technology B, 2007
View PDFchevron_right
Near-infrared single photon sources employing site-selected InAs/InP quantum dot microcavities
Daniel Poitras
Microelectronics Journal, 2005
View PDFchevron_right
InAs/InP quantum-dot pillar microcavities using SiO[sub 2]/Ta[sub 2]O[sub 5] Bragg reflectors with emission around 1.55 μm
Daniel Poitras
Applied Physics Letters, 2004
View PDFchevron_right
Purcell effect of GaAs quantum dots by photonic crystal microcavities
Mano Mano
Chinese Optics Letters, 2009
View PDFchevron_right
Photoluminescence of self-assembled InAs quantum dots embedded in photonic crystal nanocavities with shifted air holes
Jen-inn Chyi
Nanotechnology, 2010
View PDFchevron_right
Fabrication and optical characterization of hexagonal photonic crystal microcavities in InP-based membranes containing InAs∕InP quantum dots
Robin Williams
Journal of Applied Physics, 2005
View PDFchevron_right
InAs/InP quantum-dot pillar microcavities using SiO/TaO Bragg reflectors with emission around 1.55 μm
Daniel Poitras
Applied physics letters, 2004
View PDFchevron_right
GaAs photonic crystal slab nanocavities: Growth, fabrication, and quality factor
Julian Sweet
View PDFchevron_right
Cl[sub 2]∕O[sub 2]-inductively coupled plasma etching of deep hole-type photonic crystals in InP
Huub Salemink
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2006
View PDFchevron_right
High density InAlAs∕GaAlAs quantum dots for non-linear optics in microcavities
Robert Kuszelewicz
Journal of Applied Physics, 2012
View PDFchevron_right
Studies of self-assembled InP quantum dots in planar microcavities
Edgard Goobar , Mattias Hammar
Materials Science and Engineering: B, 2000
View PDFchevron_right
Deep dry etching process development for photonic crystals in InP-based planar waveguides
Huub Salemink
Photonic Crystal Materials and Nanostructures, 2004
View PDFchevron_right
Over 30-fold enhancement of light extraction from free-standing photonic crystal slabs with InGaAs quantum dots at low temperature
Dieter Bimberg
Applied Physics Letters, 2001
View PDFchevron_right
InAs'InP quantum-dot pillar microcavities using SiO 2 'Ta 2 O 5 Bragg reflectors with emission around 1.55 mm
Robin Williams
Appl Phys Lett, 2004
View PDFchevron_right
Experimental demonstration of a high quality factor photonic crystal microcavity
Robin Williams
Applied Physics Letters, 2003
View PDFchevron_right
High aspect ratio etching of GaSb/AlGaAsSb for photonic crystals
Tron Arne Nilsen
MRS Proceedings, 2005
View PDFchevron_right
Optical microcavities fabricated by DBR overgrowth of pyramidal-shaped GaAs mesas
Karl Hu
Journal of Crystal Growth, 2011
View PDFchevron_right
Light emission tuning of In0.5Ga0.5As/In0.05Ga0.95As quantum dots by a two-dimensional photonic crystal
Emanuela Margapoti
Microelectronic Engineering, 2003
View PDFchevron_right
Photonic crystal thin films of GaAs prepared by atomic layer deposition
Martyn Pemble
Applied Physics Letters, 2006
View PDFchevron_right
Advanced and reliable GaAs/AlGaAs ICP-DRIE etching for optoelectronic, microelectronic and microsystem applications
N. Isac
Microelectronic Engineering
View PDFchevron_right
Inductively coupled plasma etching of deep photonic crystal holes in InP using Cl/sub 2/
Fouad Karouta
International Conference on Indium Phosphide and Related Materials, 2005., 2005
View PDFchevron_right