Study of the Factors Affecting the Mechanical, Electrical, and Piezoelectric Properties of PZT Micro-Actuator (original) (raw)
Related papers
Journal of Electrical Engineering and Technology, 2017
PZT thin films for piezoelectric microactuator applications
Sensors and Actuators A-physical, 2002
Journal of the European Ceramic Society, 2010
Characterization and Fatigue of the Converse Piezoelectric Effect in PZT Films for MEMS Applications
Journal of Microelectromechanical Systems, 2015
Properties of Piezoelectric Pzt Thin Films for Microactuator Applications
MRS Proceedings, 1994
Patterned crack-free PZT thick films for micro-electromechanical system applications
The International Journal of Advanced Manufacturing Technology, 2007
Study of correlations between microstructure and piezoelectric properties of PZT thin films
2015
Sensors and Actuators A-physical, 2009
Static/dynamic trade-off performance of PZT thick film micro-actuators
Journal of Micromechanics and Microengineering, 2015
Sensors and Actuators A-physical, 2007
Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor
Sensors and Actuators A-physical, 2007
Low voltage piezocomposite actuators based on PZT tubes and plates
Journal de Physique IV (Proceedings), 2005
Microelectronic Engineering, 2018
Presentation and characterization of novel thick-film PZT microactuators
Physica B: Condensed Matter, 2015
Thin piezoelectric films for micro-electromechanical components
Proceedings of the First Swiss Conference on Materials Research For Engineering Systems, 1994
Novel 3D PZT thin film structure for micromechanics
Journal of Electroceramics, 2007
Fabrication and Characterization of Microstacked PZT Actuator for MEMS Applications
Journal of Microelectromechanical Systems, 2015
Electrically driven cracks in piezoelectric ceramics: experiments and fracture mechanics analysis
Journal of the Mechanics and Physics of Solids, 2002
Performance of Piezoelectric Ceramic Multilayer Components Based on Hard and Soft PZT
Design and fabrication of functionally graded PZT/Pt piezoelectric bimorph actuator
Science and Technology of Advanced Materials, 2002
Characterization of PZT thin films for micromotors
Microelectronic Engineering, 1995
Fabrication and characterization of PZT thin films for micromotors
Integrated Ferroelectrics, 1995
Design of piezoelectric PZT cantilever for actuator application
Fracture criteria for piezoelectric ceramics
2013
Journal of Electroceramics, 2007
Impedance spectroscopy study and electrical behavior of PMN-PZT actuators joined by ceramic slurry
Journal of Electroceramics, 2006
Piezo actuators and piezo motors
2001
Fabrication of Dome-Shaped PZT-Epoxy Actuator Using Sol-Gel and Spin Coating Technique
2013
Fracture of piezoelectric MEMS structures
2005
Advanced piezoelectric materials
2010
Multilayer piezoelectric devices based on PZT
Journal of Materials Science: Materials in Electronics, 1996