Rf probe technology for the next generation of technological plasmas (original) (raw)
Related papers
Remote-coupled sensing of plasma harmonics and process end-point detection
Vacuum, 2000
Performance Evaluation of RF Generators with In-Situ Plasma Process Monitoring Sensors
Journal of Nanoscience and Nanotechnology, 2019
Development of Simple Designs of Multitip Probe Diagnostic Systems for RF Plasma Characterization
Probe Diagnostics of Microwave Plasma at Frequency 2.45 GHz in CW and Pulse Regime
Contributions to Plasma Physics, 2006
A Comparative Study of Single and Double Langmuir Probe Techniques for RF Plasma Characterization
Contributions to Plasma Physics, 1999
Langmuir probe measurement in a radio frequency inductively coupled argon plasma
2004
2019
Electrical probe calibration and power calculation for a miniature 13.56 MHz plasma source
Review of Scientific Instruments, 2011
Probe diagnostics in high pressure high density microwave plasma
Remote sensing of a low pressure plasma in the radio near field
Applied Physics Express
Non-invasive VHF injected signal monitoring in atmospheric pressure plasma and axial DC magnetron
Vacuum, 2008
Measuring Current, Voltage and Impedance in RF Plasmas
Measuring Current, Voltage and Impedance in RF Plasmas, D. Vender, invited paper, FLTPD IV Workshop, Rolduc, The Netherlands (2001)., 2001
Optical Diagnostics for a High.Power, RF-Inductively Coupled Plasma
MRS Proceedings, 1988
Multi-tip Probe Diagnostics for Plasmas: Designs and Applications
2014
Diagnostics and Simulation of Low-Frequency Inductively Coupled Plasmas
AIP Conference Proceedings, 2003
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1998
Plasma imaging and spectroscopy diagnostics developed on 100-500-kA pulsed power devices
Proceedings of the IEEE, 2004
2016 IEEE International Conference on Plasma Science (ICOPS), 2016
Submillimeter-Wavelength Plasma Diagnostics For Semiconductor Manufacturing
AIP Conference Proceedings, 2003
A dc-pulsed capacitively coupled planar Langmuir probe for plasma process diagnostics and monitoring
Plasma Sources Science and Technology, 2012
RF plasma parameter determination by a Langmuir multipoint double probe array
Journal of Physics: Conference Series, 2012
International Journal of Applied Physics and Mathematics
The effect of radio frequency plasma processing reactor circuitry on plasma characteristics
Journal of Applied Physics, 1998
Applications of a laser-induced plasma pathway to testing of electronic modules
IEEE Design & Test of Computers, 2000
Plasma Measurements: An Overview of Requirements and Status
2008
Radio Frequency Metrology for Mobile Atmospheric Pressure Plasma Devices
PIERS Online, 2008
Plasma diagnostics update and consequences on the upgrade of existing sources
AIP Conference Proceedings, 2018
Fully-integrated electronic system for a plasma impedance probe
2008
Diagnostics of downstream microwave electron cyclotron resonance (ECR) plasma
Journal of Physics: Conference Series, 2010