MEMS electrostatic micro-power generator for low frequency operation (original) (raw)
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Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems, 2006
This paper presents a silicon microgenerator, fabricated using standard silicon micromachining techniques, which converts external ambient vibrations into electrical energy. Power is generated by an electromagnetic transduction mechanism with static magnets positioned on either side of a moving coil, which is located on a silicon structure designed to resonate laterally in the plane of the chip. The volume of this device is approximately 100 mm3. ANSYS finite element analysis (FEA) has been used to determine the optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft’s Maxwell 3D software have been performed to determine the voltage generated from a single beam generator design. The predicted voltage levels of 0.7–4.15 V can be generated for a two-pole arrangement by tuning the damping factor to achieve maximum displacement for a given input excitation. Experimental results from the microgenerator demonstrate a maximum power output of 104 nW for 0.4g (g=9.81 m s−1) input acceleration at 1.615 kHz. Other frequencies can be achieved by employing different geometries or materials.
2005
In this paper we report on the design, simulation and fabrication of a microgenerator, which converts external vibrations into electrical energy. Power is generated by means of electromagnetic transduction with static magnets positioned either side of a moving coil located on a silicon structure designed to resonate laterally in the plane of the chip. Previous millimetre scale electromagnetic generators have been fabricated using discrete components and traditional fabrication techniques. In this paper the development and fabrication of a micromachined microgenerator that uses standard silicon-based fabrication techniques and low-cost, batch process is presented. Finite element simulations have been carried out using ANSYS to determine an optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft's Maxwell 2D software have shown voltage levels of 4 to 9V can be generated from the single beam generator designs.
Dynamical Modeling and Simulation of a Laser-micromachined Vibration-based Micro Power Generator
International Journal of Nonlinear Sciences and Numerical Simulation, 2000
The dynamical motion of laser-micromachined copper springs used for a meso-scale vibration-based power generator was successfully modeled using ANSYS to reveal 3 modes of multi-directional vibratory motion due to a pure vertical input vibration. A MATLAB simulation was also used to predict the voltage output of the micro power generator system with coupled electrical and mechanical damping effects. The simulated output matched experimental results closely. These capabilities are essential for the successful design and development of a miniature, low-frequency, and robust micro energy generator that could be potentially used to convert human mechanical energy into usefully electrical power to operate devices such as mobile phones and heart-pacers. Thus far, 1cm 1 meso-scale generators are demonstrated capable of producing up to 4V AC with instantaneous peak power of 80mW, at input frequencies ranging from 60 to 120Hz with ~200μηι input vibration amplitude. A generator capable of producing 2V DC output with 40μ\ν power after voltage rectification, and able to drive a commercial infrared wireless signal transmitter to send 140ms pulse trains with ~60sec power generation time was also demonstrated. The ANSYS model and MATLAB simulation results are presented and compared with the experimental results in this paper.
A micro electromagnetic generator for vibration energy harvesting
Vibration energy harvesting is receiving a considerable amount of interest as a means for powering wireless sensor nodes. This paper presents a small (component volume 0.1 cm 3 , practical volume 0.15 cm 3) electromagnetic generator utilizing discrete components and optimized for a low ambient vibration level based upon real application data. The generator uses four magnets arranged on an etched cantilever with a wound coil located within the moving magnetic field. Magnet size and coil properties were optimized, with the final device producing 46 µW in a resistive load of 4 k from just 0.59 m s −2 acceleration levels at its resonant frequency of 52 Hz. A voltage of 428 mVrms was obtained from the generator with a 2300 turn coil which has proved sufficient for subsequent rectification and voltage step-up circuitry. The generator delivers 30% of the power supplied from the environment to useful electrical power in the load. This generator compares very favourably with other demonstrated examples in the literature, both in terms of normalized power density and efficiency. (Some figures in this article are in colour only in the electronic version)
Design and performance of a microelectromagnetic vibration powered generator
2005
In this paper we report on the design, simulation and initial results of a microgenerator, which converts external vibrations into electrical energy. Power is generated by means of electromagnetic transduction with static magnets positioned either side of a moving coil located on a silicon structure designed to resonate laterally in the plane of the chip. In this paper the development and fabrication of a micromachined microgenerator that uses standard silicon based fabrication techniques and low cost, batch process is presented. Finite element simulations have been carried out using ANSYS to determine an optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft's Maxwell 2D software have shown voltage levels of 4 to 9V can be generated from the single beam generator designs. Initial results at atmospheric pressure yield 0.5µW at 9.81ms -2 and 9.5 kHz and emphasise the importance of reducing unwanted loss mechanisms such as air damping.
A DOUBLE HUMAN SKIN CONTACT BASED SANDWICH STRUCTURED TRIBOELECTRIC MICRO-GENERATOR
This paper reports a wrist-brace type sandwich structured triboelectric microgenerator (S-TEMG) by optimizing the effective surface area per unit volume for harvesting biomechanical energy from double human skins contact. The working mechanism of proposed harvester is based on the charge transfer between the Au electrode on Polydimethylsiloxane (PDMS) and ground via modulating the separation distance between the tribo-charged human skin and PDMS film. Two micro-structured PDMS films were used to improve the performance of device, which were micro-fabricated by using a sand paper template. Owing to the unique structure design, the as-fabricated prototype is capable of producing voltage up to 150 V and 100 µW peak power at a load resistance of 10 MΩ by mild fingers pressing (~0.2 N force) on the device at around 5 Hz frequency.
A rotary electromagnetic microgenerator for energy harvesting from human motions
Journal of Applied Research and Technology, 2016
In this paper, a rotary electromagnetic microgenerator is analyzed, designed and built. This microgenerator can convert human motions to electrical energy. The small size and use of a pendulum mechanism without gear are two main characteristics of the designed microgenerator. The generator can detect small vibrations and produce electrical energy. The performance of this microgenerator is evaluated by being installed peak-to-peak during normal walking. Also, the maximum harvested electrical energy during normal walking is around 416.6 W. This power is sufficient for many applications.
Kinetic Energy Harvesting from Human Hand Movement by Mounting micro Electromagnetic Generator
E3S Web of Conferences, 2019
A comprehensive review of design and experimentation is presented in this research paper on sustainable renewable energy scavenging from Human body movement using Micro electromagnetic kinetic energy harvester to powering wearable, portable electronics, implantable medical devices etc. The body location which is chosen as the harvester is human hand between elbow and shoulder. Human body harvest energy in two ways i,e, mechanical energy and thermal energy. Mechanical energy is of two kinds one is static energy and the other one is kinetic energy. Due to motion or displacement or enforcement excitation the kinetic energy is extracted. The electric charges which remains imbalance on the surface or within a material is static energy. Thermal energy is extracted from the dissipation of heat from human body. Human body parts and organs generate energy through two types of activities are voluntary and involuntary. The energy which are produced by voluntary activities are high as people in...
Electromagnetic micro power generator — A comprehensive survey
2010
This paper presents a comprehensive survey on vibration powered electromagnetic micro generator, which harvest mechanical energy from environment and convert this energy into useful electrical power for micro system and sensor node. The on-going research works on electromagnetic micro generator are reviewed as a background of this paper. Basic theories of micro generator to produce power from ambient motion by damping the suspended proof mass system over the coils are presented. Several important parameters such as the shape, types of magnet, spring and coil property used in designing electromagnetic micro generator as well as power processing circuit are also included. Different designs of micro generator for different environment and application are discussed. Significant challenges in converting the power by each design are also highlighted in this paper.
2019
Batteries had been widely used as the power source for remote electronic devices, but the method of generating energy from the environment had been with a lot of prospects. To ensure constant power supply and avoid complexity of changing batteries for wireless electronics and sensors, especially in the case of usages in remote areas, self-energy generating devices have become a necessity. The authors briefly review alternative to batteries; options such as electrostatic generation, dielectric elastomers and piezoelectric materials which are considered very promising for their capacity to change stains in the material into electrical vitality and be incorporated into electronic gadgets. The paradigm shift in the technological world towards producing electronic devices with focus on reduction in size, cost and energy consumption have constantly considered the generator based on Micro-electro-mechanical systems (MEMS). This article highlights the impacts and challenges of using MEMs based generators for providing power sources in small wireless sensor nodes, in place of batteries.