New Alignment Sensors for Optical Lithography (original) (raw)
Structural and optical properties of InAs quantum dot chains grown on nanoimprint lithography structured GaAs with different pattern orientations
Mihail Dumitrescu
Applied Physics Letters, 2010
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Lateral positioning of InGaAs quantum dots using a buried stressor
Andrei Schliwa
Applied Physics Letters, 2012
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Controlled ordering and positioning of InAs self-assembled quantum dots
Huyn Ah Lee
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000
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Study of the spontaneous alignment of InAs quantum dots along the surface steps as a function of the InAs coverage
Pedro Pablo González Borrero
Thin Solid Films, 2002
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Structural characterization of InAs quantum dot chains grown by molecular beam epitaxy on nanoimprint lithography patterned GaAs(100)
Mihail Dumitrescu
Nanotechnology, 2011
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Size-dependent properties of single InAs quantum dots grown in nanoimprint lithography patterned GaAs pits
Mihail Dumitrescu
Nanotechnology, 2013
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Optical properties of self-assembled InAs quantum islands grown on InP(001) vicinal substrates
gerard GUILLOT
Applied Physics Letters, 2001
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Self-assembling InAs and InP quantum dots for optoelectronic devices
Werner Winter
Thin Solid Films, 2000
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Site-controlled lateral arrangements of InAs quantum dots grown on GaAs(001) patterned substrates by atomic force microscopy local oxidation nanolithography
Luisa Gonzalez
Nanotechnology, 2009
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Impact of the non-planar morphology of pre-patterned substrates on the structural and electronic properties of embedded site-controlled InAs quantum dots
E. Luna
Journal of Applied Physics, 2013
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Modified self-assembly of InAs islands acting as stressors for strain-induced InGaAs(P)/InP quantum dots
Harri Lipsanen
Nanotechnology, 2005
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Selective growth of GaAs nanostructures and subsequent guided self-assembly of InAs quantum dots on nanoimprint lithography patterned SiO2/GaAs substrates
Mihail Dumitrescu
Journal of Crystal Growth, 2011
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Control of density, size and size uniformity of MBE-grown InAs quantum dots by means of substrate misorientation
Robert Suris
Semiconductor Science and Technology, 2002
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InAs/GaAs multiple quantum dot structures grown by LP-MOVPE
J. Pangrac
Thin Solid Films, 2000
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Uniform Formation of Two-dimensional and Three-dimensional InAs Islands on GaAs by Molecular Beam Epitaxy
Toshiyuki KAIZU
Japanese Journal of Applied Physics, 2003
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Strain-induced InAsSbP islands and quantum dots grown by liquid phase epitaxy on a InAs(1 0 0) substrate
K. Gambaryan
Journal of Physics D: Applied Physics, 2008
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Formation of two-dimensional InAs quantum dot arrays by self-organized anisotropic strain engineering on InP (311)B substrates
Paul Soto Rodriguez
Journal of Crystal Growth, 2010
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Selective area growth of InAs quantum dots formed on a patterned GaAs substrate
Yongchun Xin
Applied Physics Letters, 2004
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Study of GaAs spacer layers in InAs/GaAs vertically aligned quantum dot structures
E. Grilli
Thin Solid Films, 2000
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Optical properties of vertically aligned self-assembled InGaAs quantum dot layers on (311)A/B and (100) GaAs substrates
Pedro Pablo González Borrero
Superlattices and Microstructures, 1998
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Strong alignment of self-assembling InP quantum dots
Frank Noll
Physical Review B, 1996
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Self-assembling of In(Ga)As/GaAs quantum dots on (N11) substrates: the (311)A case
Guido Chiantoni
Micron, 2000
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Ordered InAs quantum dots on pre-patterned GaAs (001) by local oxidation nanolithography
Luisa Gonzalez
Journal of Crystal Growth, 2005
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Assembling strained InAs islands by chemical beam epitaxy
Ivan Maximov
Solid-state Electronics, 1996
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Self-assembled quantum dots of InSb grown on InP by atomic layer molecular beam epitaxy: Morphology and strain relaxation
Francesca Peiró
Applied Physics Letters, 1996
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Direct formation of InAs quantum dots grown on InP (001) by solid-source molecular beam epitaxy
Luisa Gonzalez
Applied Physics Letters, 2009
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Strain-compensation in closely stacked quantum dot active regions grown by metal organic chemical vapor deposition
Yongchun Xin
Quantum Dots, Particles, and Nanoclusters III, 2006
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Molecular beam epitaxy growth and characterization of self-assembled InAs quantum dots on (1 0 0) InAlAs/InP substrates
Stephen Myers
Applied Surface Science, 2002
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NUCLEATION MECHANISM OF STRAIN-INDUCED INASSBP QUANTUM DOTS AND PITS AT LIQUID PHASE EPITAXY ON InAs (100) SUBSTRATE
Arpine Simonyan
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Self-organized InAs/GaAs quantum dots grown on (1 0 0) misoriented substrates by molecular beam epitaxy
Harris Liao
Journal of Crystal Growth
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Competition between strain-induced and temperature-controlled nucleation of InAs/GaAs quantum dots
Brian Abbey
Journal of Applied Physics, 2004
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Large array of single, site-controlled InAs quantum dots fabricated by UV-nanoimprint lithography and molecular beam epitaxy
Mihail Dumitrescu
Nanotechnology, 2012
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Self organized InAs quantum dots grown on patterned GaAs substrates
Werner Schrenk, Gottfried Strasser
2006
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Quantum Confinement in InAs/GaAs Systems with Self-Assembled Quantum Dots Grown Using In-Flush Technique
Adam Babiński
Acta Physica Polonica A, 2011
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