MEMS Magnetic Field Source for Frequency Conversion Approaches for ME Sensors (original) (raw)
Related papers
Resonant Magnetic Field Sensors Based On MEMS Technology
Sensors, 2009
A Tunable MEMS Magnetic Sensor
Journal of Microelectromechanical Systems, 2017
Sensors and Actuators A-physical, 2011
Journal of Micromechanics and Microengineering, 2011
A class of micromachined magnetic resonator for high-frequency magnetic sensor applications
Journal of Applied Physics, 2006
MEMS Magnetic Sensor in Standard CMOS
1998
Frequency reconfigurable phase modulated magnetoelectric sensors using ΔE effect
Applied Physics Letters, 2017
Frequency Characterization of a Magnetically Actuated Mems Resonant Biosensor
Proceedings of the International Conference on Biomedical Electronics and Devices, 2011
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), 2017
Optical and capacitive characterization of MEMS magnetic resonator
IEICE Electronics Express, 2016
Journal of Microelectromechanical Systems, 2017
High Isolation, Double-Clamped, Magnetoelectric Microelectromechanical Resonator Magnetometer
Sensors
Stress reconfigurable tunable magnetoelectric resonators as magnetic sensors
Applied Physics Letters, 2013
Magnetic MEMS: key issues and some applications
Sensors and Actuators A: Physical, 2003
A MEMS Resonator as a Power Receiver for Inductively Powered Implantable Sensors
Procedia Engineering, 2015
Mechanical Modeling and Sensitivity Evaluation of an Electrodynamic MEMS Microsensor
A MEMS resonant magnetometer based on capacitive detection
10th International Multi-Conferences on Systems, Signals & Devices 2013 (SSD13), 2013
A Magnetically Excited and Sensed MEMS-Based Resonant Compass
IEEE Transactions on Magnetics, 2006
Contactless Excitation of MEMS Resonant Sensors by Electromagnetic Driving
A micro-LC-resonator fabricated by MEMS technique for high-frequency sensor applications
Sensors and Actuators A: Physical, 2007
Applied Physics Letters, 2014
Resonant mechanical magnetic sensor in standard CMOS
IEEE Electron Device Letters, 2000
Magnetically induced oscillations on a conductive cantilever for resonant microsensors
Sensors and Actuators A …, 2007
Self-Biased 215MHz Magnetoelectric NEMS Resonator for Ultra-Sensitive DC Magnetic Field Detection
Sci. Rep., 2013
Fabrication and Characterization of CMOS-MEMS Magnetic Microsensors
Abdelaziz Almahi, Abdelaziz Ahmed, John O Dennis
Sensors, 2013
Enhancing the Linear Range of MEMS Resonators for Sensing Applications
IEEE Sensors Journal, 2000
Improved Detection of Magnetic Signals by a MEMS Sensor Using Stochastic Resonance