Simulation-guided nanofabrication of high-quality practical tungsten probes (original) (raw)
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8th International Conference on High-capacity Optical Networks and Emerging Technologies, 2011
We compare the sharpness of tungsten probe tips produced by the single-step and two-step dynamic electrochemical etching processes. A small radius of curvature (RoC) of 25 nm or less was routinely obtained when the two-step electrochemical etching (TEE) process was adopted, while the smallest achievable RoC was -10 nm, rendering it suitable for atomic force microscopy (AFM) or scanning tunneling microscopy (STM) applications.
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Fabrication of [001]-oriented tungsten tips for high resolution scanning tunneling microscopy
Scientific reports, 2014
The structure of the [001]-oriented single crystalline tungsten probes sharpened in ultra-high vacuum using electron beam heating and ion sputtering has been studied using scanning and transmission electron microscopy. The electron microscopy data prove reproducible fabrication of the single-apex tips with nanoscale pyramids grained by the {011} planes at the apexes. These sharp, [001]-oriented tungsten tips have been successfully utilized in high resolution scanning tunneling microscopy imaging of HOPG(0001), SiC(001) and graphene/SiC(001) surfaces. The electron microscopy characterization performed before and after the high resolution STM experiments provides direct correlation between the tip structure and picoscale spatial resolution achieved in the experiments.
Physical Review B, 2005
Detailed knowledge of the tip apex structure is necessary for quantitative comparison between theory-based simulations and experimental observations of tip-substrate interactions in scanning probe microscopy ͑SPM͒. Here, we discuss field ion microscopy ͑FIM͒ techniques to characterize and atomically define SPM tungsten tips. The tip radius can be estimated from field emission data, while FIM imaging allows the full atomic characterization of the tip apex. We find that when FIM is applied to tips with a radius of a few nanometers ͑as is desirable for high-resolution atomic force microscopy imaging͒, limitations not apparent with less sharp tips arise; successful resolution of these limitations will extend the utility of FIM. Field evaporation can be used to atomically engineer the apex into a desired atomic configuration. Starting from a W͑111͒ wire, a tip terminating in three atoms can reproducibly be fabricated; due to its geometry and stability, this apex configuration is well suited for application as an atomically defined electrical contact in SPM experiments aimed at understanding contact mechanics at the atomic scale.
e-Journal of Surface Science and Nanotechnology, 2007
We present a method to prepare tungsten tips for use in multi-tip scanning tunneling microscopes. The motivation behind the development comes from a requirement to make very long and conical-shape tips with controlling the cone angle. The method is based on a combination of a "drop-off" method and dynamic electrochemical etching, in which the tip is continuously and slowly drawn up from the electrolyte during etching. Its reproducibility was confirmed by scanning electron microscopy. Comparison in tip shape between the dynamic and static methods was shown.
Advanced methodologies for atomic-scale nanofabrication and dynamic characterization
Proceedings of the 20th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA), 2013
Based on the idea of "setting up a nanolab inside a transmission electron microscopy (TEM)", we review our recent progress in atomic resolution nanofabrication and dynamic characterization of individual nanostructures and nanodevices. The electron beam can be used as a tool to induce nanofabrication on the atomic scale. Additional probes from a special-designed holder provide the possibility to further manipulate and measure the electrical properties of the nanostructures. All phenomena from the in-situ TEM experiments can be recorded in real time with atomic resolution.
Field ion microscope evaluation of tungsten nanotip shape using He and Ne imaging gases
Ultramicroscopy, 2012
Field ion microscopy (FIM) using neon imaging gas was used to evaluate a W(111) nanotip shape during a nitrogen assisted etching and evaporation process. Using appropriate etching parameters a narrow ring of atoms centered about the tip axis appears in a helium generated image. Etching of tungsten atoms continues exclusively on the outside of this well-defined ring. By replacing helium imaging gas with neon, normally inaccessible crystal structure of a tip apex is revealed. Comparison of the original W(111) tip (before etching) and partly etched tip shows no atomic changes at the tip apex revealing extraordinarily spatially selective etching properties of the etching process. This observation is an important step towards a detailed understanding of the nitrogen assisted etching and evaporation process and will lead to better control over atomically defined tip shapes.
Transport-limited electrochemical formation of long nanosharp probes from tungsten
Nanotechnology, 2013
We show that electrochemical formation of long probes with nanosharp tips can be controlled by choosing an appropriate thermodynamic pathway of metal to metal oxide and hydroxide transformation. Currently, convection-limited electropolishing (CLE) is extensively used. Nanosharp probes are produced by electrochemically etching a wire until it breaks into two pieces. This process is difficult to control because of the complexity of the associated hydrodynamic flows. We introduce transport-limited electropolishing (TLE), where the electrochemical reaction results in the formation of metal oxides and hydroxides which form a porous surface layer hindering the flow of electrolyte. The developed TLE method enables one to make long tapered needles. The taper can spread over more than 6 mm while the radius of tip curvature can be decreased down to 30 nm. These needles are strong and were successfully applied for piercing single smooth vascular muscle cells.