Depth profile reconstructions of electronic transport properties in H+ MeV-energy ion-implanted n-Si wafers using photocarrier radiometry (original) (raw)

H ion-implantation energy dependence of electronic transport properties in the MeV range in n-type silicon wafers using frequency-domain photocarrier radiometry

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2007

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H[sup +] ion-implantation energy dependence of electronic transport properties in the MeV range in n-type silicon wafers using frequency-domain photocarrier radiometry

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