Nanofabrication by magnetic focusing of supersonic beams (original) (raw)

References

  1. D. Meschede, H. Metcalf, J. Phys. D 36, R17 (2003)
    Article ADS Google Scholar
  2. V.I. Balykin, P.N. Melent’ev, Nanotechnol. Russ. 4, 425 (2009)
    Article Google Scholar
  3. P. Rai-Choudhury (ed.), Handbook of Microlithography, Micromachining, and Microfabrication (SPIE Optical Engineering Press and the Institution of Electrical Engineers, Bellingham, 1997)
    Google Scholar
  4. L.A. Giannuzzi, F.A. Stevie (eds.), Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice (Springer, Berlin, 2005)
    Google Scholar
  5. B. Wu, A. Kumar, Extreme Ultraviolet Lithography (McGraw-Hill, Bellingham, 2009)
    Google Scholar
  6. J.L. O’Brien, A. Furusawa, J. Vuckovic, Nature Photonics 3, 687 (2009)
    Article ADS Google Scholar
  7. J.A. Schuller, E.S. Barnard, W. Cai, Y.C. Jun, J.S. White, M.L. Brongersma, Nature Mater. 9, 193 (2010)
    Article ADS Google Scholar
  8. V.M. Shalaev, Nature Photonics 1, 41 (2007)
    Article ADS Google Scholar
  9. K.S. Johnson, J.H. Thywissen, N.H. Dekker, K.K. Berggren, A.P. Chu, R. Younkin, M. Prentiss, Science 280, 1583 (1998)
    Article ADS Google Scholar
  10. M. Baker, A.J. Palmer, W.R. MacGillivray, R.T. Sang, Nanotechnology 15, 1356 (2004)
    Article ADS Google Scholar
  11. W. Lu, K.G.H. Baldwin, M.D. Hoogerland, S.J. Buckman, T.J. Senden, T.E. Sheridan, R.W. Boswell, J. Vac. Sci. Technol. B 16, 3846 (1998)
    Article Google Scholar
  12. A. Bard, K.K. Berggren, J.L. Wilbur, J.D. Gillaspy, S.L. Rolston, J.J. McClelland, W.D. Phillips, M. Prentiss, G.M. Whitesides, J. Vac. Sci. Technol. B 15, 1805 (1997)
    Article Google Scholar
  13. P. Engels, S. Salewski, H. Levsen, K. Sengstock, W. Ertmer, Appl. Phys. B 69, 407 (1999)
    Article ADS Google Scholar
  14. Y. Chen, A. Pépin, Electrophoresis 22, 187 (2001)
    Article Google Scholar
  15. A.A. Tseng, Small 1, 594 (2005)
    Article Google Scholar
  16. S.Y. Chou, P.R. Krauss, P.J. Renstrom, Science 272, 85 (1996)
    Article ADS Google Scholar
  17. J.J. McClelland, R.E. Scholten, E.C. Palm, R.J. Celotta, Science 262, 877 (1993)
    Article ADS Google Scholar
  18. G. Timp, R.E. Behringer, D.M. Tennant, J.E. Cunningham, M. Prentiss, K.K. Berggren, Phys. Rev. Lett. 69, 1636 (1992)
    Article ADS Google Scholar
  19. V. Natarajan, R.E. Behringer, G. Timp, Phys. Rev. A 53, 4381 (1996)
    Article ADS Google Scholar
  20. R. Gupta, J.J. McClelland, Z.J. Jabbour, R.J. Celotta, Appl. Phys. Lett. 67, 1378 (1995)
    Article ADS Google Scholar
  21. B. Smeets, P. van der Staten, T. Meijer, C.G.C.H.M. Fabrie, K.A.H. van Leeuwen, Appl. Phys. B 98, 697 (2009)
    Article ADS Google Scholar
  22. K.K. Berggren, A. Bard, J.L. Wilbur, J.D. Gillaspy, A.G. Helg, J.J. McClelland, S.L. Rolston, W.D. Phillips, M. Prentiss, G.M. Whitesides, Science 269, 1255 (1995)
    Article ADS Google Scholar
  23. I.S. Averbukh, R. Arvieu, Phys. Rev. Lett. 87, 163601 (2001)
    Article ADS Google Scholar
  24. W.H. Oskay, D.A. Steck, M.G. Raizen, Phys. Rev. Lett. 89, 163601 (2002)
    Article Google Scholar
  25. W.G. Känders, F. Lison, A. Richter, R. Wynands, D. Meschede, Nature 375, 214 (1995)
    Article ADS Google Scholar
  26. W.G. Kaenders, F. Lison, I. Müller, A. Richter, R. Wynands, D. Meschede, Phys. Rev. A 54, 5067 (1995)
    Article ADS Google Scholar
  27. R.R. Chaustowski, V.Y.F. Leung, K.G.H. Baldwin, Appl. Phys. B 86, 491 (2007)
    Article ADS Google Scholar
  28. P.N. Melentiev, A.V. Zablotskiy, D.A. Lapshin, E.P. Sheshin, A.S. Baturin, V.I. Balykin, Nanotechnology 20, 235301 (2009)
    Article ADS Google Scholar
  29. R. Campargue (ed.), Atom and Molecular Beams: The State of the Art 2000 (Springer, Berlin, 2001)
    Google Scholar
  30. H. Pauly, Atom, Molecule and Clusterbeams I: Basic Theory, Production, and Detection of Thermal Energy Beams (Springer, Berlin, 2000)
    Google Scholar
  31. J.R. Buckland, Ph.D. thesis, University of Cambridge, Cambridge, UK (1998)
  32. M.D. Hoogerland, J.P.J. Driessen, E.J.D. Vredenbregt, H.J.L. Megens, M.P. Schuwer, H.C.W. Beijerinck, K.A.H. van Leeuwen, in Proceedings of the 1994 IEEE International Frequency Control Symposium (IEEE, New York, 1994), p. 651
    Google Scholar
  33. E. Rasel, F.P.D. Santos, F.S. Pavone, F. Perales, C.S. Unnikrishnan, M. Leduc, Eur. J. Phys. D 7, 311 (1999)
    Article ADS Google Scholar
  34. Y.T. Xing, I. Barb, R. Gerritsma, R.J.C. Spreeuw, H. Luigjes, Q.F. Xiao, C. R’etif, J.B. Goedkoop, J. Magn. Magn. Mater. 313, 192 (2007)
    Article ADS Google Scholar
  35. T. Fernholz, R. Gerritsma, S. Whitlock, I. Barb, R.J.C. Spreeuw, Phys. Rev. A 77, 033409 (2008)
    Article ADS Google Scholar
  36. D.W. Keith, M.L. Schattenburg, H.I. Smith, D.E. Pritchard, Phys. Rev. Lett. 61, 1580 (1988)
    Article ADS Google Scholar
  37. E. Narevicius, A. Libson, C.G. Parthey, I. Chavez, J. Narevicius, U. Even, M.G. Raizen, Phys. Rev. Lett. 100, 093003 (2008)
    Article ADS Google Scholar
  38. D. Loss, D.P. DiVincenzo, Phys. Rev. A 57, 120 (1998)
    Article ADS Google Scholar
  39. A. Imamoglu, D.D. Awschalom, G. Burkard, D.P. DiVincenzo, D. Loss, M. Sherwin, Phys. Rev. Lett. 83, 4204 (1999)
    Article ADS Google Scholar

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