Vladimir Stavrov - Academia.edu (original) (raw)

Papers by Vladimir Stavrov

Research paper thumbnail of Direct-Write 3D Nano-Printing of Thermal High-Resolution Nano-Probes

Research paper thumbnail of Direct-Write Fabrication of Electric and Thermal High-Resolution Nanoprobes on Self-Sensing AFM Cantilever

Research paper thumbnail of SelectiveSensitivity of contact MEMS position sensors with sidewall piezoresistors

2017 IEEE 23rd International Symposium for Design and Technology in Electronic Packaging (SIITME), 2017

Some results in characterization of two contact MEMS position sensors with sidewall piezoresistor... more Some results in characterization of two contact MEMS position sensors with sidewall piezoresistors are presented. Devices with in-plane travel range of about 50pm comprise of one and the same symmetrical transducer with two Π-shaped flexures. For first time, just by means of different configuration of the same sidewall piezoresistors in the same flexures, position sensors which are selectively sensitive in X or Y direction were prototyped and tested. Experimentally measured ratio of the displacement sensitivities in Y vs. X direction of the first type sensor was 16.5 and same ratio of the sensitivities in X vs. Y direction of the second type was 27.6.

Research paper thumbnail of Project MECA: Training course in microsystems with piezoresistive feedback

2017 IEEE 23rd International Symposium for Design and Technology in Electronic Packaging (SIITME), 2017

Training course on practical aspects in design, technology and prototype fabrication of microsyst... more Training course on practical aspects in design, technology and prototype fabrication of microsystems with piezoresistive feedback, exploiting the shared infrastructure is presented. The course content is considered in the scope of building a sustainable Knowledge Alliance between the partners in Erasmus+ Project# 562206-EPP-1-2015-1-BG-EPPKA2-KA-MECA

Research paper thumbnail of Flash Lamp Annealing of Phosphorus-Implanted Silicon

Physica Status Solidi (a), 1989

Research paper thumbnail of Optical and electrical properties of nanolaminate dielectric structures

Journal of Physics: Conference Series, 2016

The aim of this study was formation of a multilayered transparent conductive nanolaminate structu... more The aim of this study was formation of a multilayered transparent conductive nanolaminate structure with optimized conductivity vs. transparency parameters. The nanolayered structure comprised one or two thin layers of dielectric materials. The overall electrical conductivity was modified by tuning the size of the planar metal granules. Magnetron sputtering system with three different targets was used for layers deposition. The advantages are: the good reproducibility of a low-temperature process allows for effective process control and, optionally, selective formation of conductive areas in a dielectric structure. Our studies revealed that the relation between the sheet resistance and the maximum transparency in the visible spectral range depends on the size of the metal granules and the film thickness of the dielectric coating. The technology provides transparent conductive coatings with well-controlled optical and electrical properties.

Research paper thumbnail of A monolithic MEMS position sensor for closed-loop high-speed atomic force microscopy

Nanotechnology, 2016

The accuracy and repeatability of atomic force microscopy (AFM) imaging significantly depend on t... more The accuracy and repeatability of atomic force microscopy (AFM) imaging significantly depend on the accuracy of the piezoactuator. However, nonlinear properties of piezoactuators can distort the image, necessitating sensor-based closed-loop actuators to achieve high accuracy AFM imaging. The advent of high-speed AFM has made the requirements on the position sensors in such a system even more stringent, requiring higher bandwidths and lower sensor mass than traditional sensors can provide. In this paper, we demonstrate a way for high-speed, high-precision closed-loop AFM nanopositioning using a novel, miniaturized MEMS position sensor in conjunction with a simple PID controller. The sensor was developed to respond to the need for small, lightweight, high-bandwidth, long-range and subnm-resolution position measurements in high-speed AFM applications. We demonstrate the use of this sensor for closed-loop operation of conventional as well as high-speed AFM operation to provide distortion-free images. The presented implementation of this closed-loop approach allows for positioning precision down to 2.1 Å, reduces the integral nonlinearity to below 0.2%, and allows for accurate closed loop imaging at line rates up to 300 Hz.

Research paper thumbnail of 側壁ピエゾ抵抗と接触MEMS位置センサのSelectiveSensitivity【Powered by NICT】

IEEE Conference Proceedings, 2017

Research paper thumbnail of In-line thickness control of self-sensing cantilevers for advanced AFM applications

2017 40th International Spring Seminar on Electronics Technology (ISSE), 2017

Thickness control data measured at different fabrication stages of atomic force microscopy (AFM) ... more Thickness control data measured at different fabrication stages of atomic force microscopy (AFM) self-sensing cantilevers are presented in this paper. Specifically, the thicknesses of multilayered structures comprising silicon, silicon dioxide and thin patterned layers have been measured in-line during multi-step devices' processing. The data of the electrically detected resonance frequencies of the cantilevers have been correlated with the optically thickness measurement. Data interpretation has revealed that optical measurement of the cantilevers' thickness can provide reliable information for both purposes: pre-selection of completed cantilevers in accordance with the specified resonance frequency and in-line control of double-side patterning.

Research paper thumbnail of Development of a Novel Mechanical Transducer for Force Monitoring Using Micro-Electromechanical Sensor (MEMS)

MEMS piezoresistive sensors are more favourable and attractive option for strain detection due to... more MEMS piezoresistive sensors are more favourable and attractive option for strain detection due to a number of key advantages such as high sensitivity, low noise, better scaling characteristics, low cost and their ability to have the detection electronics circuit further away from the sensor or on the same sensing board. This paper represents the results obtained at characterization of novel transducers to be employed into force monitoring systems. Each transducer comprises a coherently designed mechanical transducer and a position MEMS sensor with very high accuracy. The exploited position MEMS microsensor and the mechanical transducer are presented in this paper. The particular MEMS sensor provides a voltage output signal having sensitivity in the range of 240μV/μm at 1V DC voltage supply. The range of operation of the mechanical transducer is optimized to fit the 300μm travel range of position microsensor. Respectively, the flexures’ stiffness corresponds to achieve the max displa...

Research paper thumbnail of Analysis of existing solutions and development of load cell of force measurement using micro-electromechanical sensor (MEMS)

MEMS piezoresistive strain sensors are more favorable and attractive due to a number of key advan... more MEMS piezoresistive strain sensors are more favorable and attractive due to a number of key advantages such as high sensitivity, low noise, better scaling characteristics, low cost and their ability to have the detection electronics circuit further away from the sensor or on the same sensing board. Moreover, they have high potential for monolithic integration with low-power CMOS electronics. Furthermore, piezoresistive strain sensors need less complicated conditioning circuit. The main objective of this work is to develop a load cell for measure of a force using MEMS sensor. A survey was made available for development of measures of stress, including support platform with MEMS sensor. Analyze of the existing MEMS sensors and MEMS devices, and some methods for their production is discussed. The main aim of the work is to develop an appropriate carrier platform and attached to it silicon MEMS sensors. A decision of support platform for serving as the elastic transmission of the sensor...

Research paper thumbnail of Self-sensing cantilevers with nano-laminated Dielectric-Metal-Dielectric resistors

2017 40th International Spring Seminar on Electronics Technology (ISSE), 2017

Results obtained at integration of nano-laminated Dielectric-Metal-Dielectric (DMD) resistors in ... more Results obtained at integration of nano-laminated Dielectric-Metal-Dielectric (DMD) resistors in silicon MEMS sensors are presented in this paper. Fabrication technology with significantly reduced thermal budged for integration of DMD resistors in four-cantilever device has been developed. The ultrathin layers have been deposited in a consecutive RF sputtering process, without exposure to air, exploiting a lift-off patterning technique. The results proved that: i) very good stability of the DMD resistors was achieved, and ii) strain-sensing behavior of nano-laminated structures has been demonstrated.

Research paper thumbnail of Piezoresistive cantilevers' platform for bio-chemical sensing

2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2021

Recent development in exploitation of self-sensing micro cantilevers for bio-chemical sensing, ar... more Recent development in exploitation of self-sensing micro cantilevers for bio-chemical sensing, are summarized. A method for reduction the power consumption for actuation x400 was developed and advantages of using said sensors in reconfigurable sensor assays, are illustrated with application for Air Quality Monitoring (AQM).

Research paper thumbnail of Piezoresistive MEMS Enabled Solutions for IoT

2021 12th National Conference with International Participation (ELECTRONICA), 2021

The present paper reviews recent developments in the exploitation of contact displacement microse... more The present paper reviews recent developments in the exploitation of contact displacement microsensors with embedded flexures and piezoresistors for monitoring of forces for object recognition. A method for precise calibration of the sensors was developed and the advantages of using those sensors with high dynamic range and digitally tunable sensitivity are illustrated.

Research paper thumbnail of Optical and electrical properties of TiO2/Pt/TiO2 nanolaminate structures

Journal of Physics: Conference Series, 2018

We report the results of a study on the optical and electrical properties of nanolaminate TiO 2 /... more We report the results of a study on the optical and electrical properties of nanolaminate TiO 2 /Pt/TiO 2 structures fabricated using RF magnetron sputtering. The effect was investigated of the discontinuous Pt layer on the optical transmittance, electrical conductivity and morphology of the TiO 2 /Pt/TiO 2 structure. On the basis of the theory of electronic tunneling transport between metal granulates in a dielectric matrix, a new technological approach is proposed of preparing high-sensitivity strain sensors based on resistors with a nanolaminate structure containing Pt granulates.

Research paper thumbnail of Contact Position Microsensors with Travel Ranges between 50μm and 2mm

Procedia Engineering, 2016

Thorough inves aled a certain g wall embedded One goal of the wall piezoresist ween various par e... more Thorough inves aled a certain g wall embedded One goal of the wall piezoresist ween various par e sensors might es and dynami V/μm and 5mV er supply voltag

Research paper thumbnail of Direct-write nanoscale printing of nanogranular tunnelling strain sensors for sub-micrometre cantilevers

Nature Communications, 2016

The sensitivity and detection speed of cantilever-based mechanical sensors increases drastically ... more The sensitivity and detection speed of cantilever-based mechanical sensors increases drastically through size reduction. The need for such increased performance for high-speed nanocharacterization and bio-sensing, drives their sub-micrometre miniaturization in a variety of research fields. However, existing detection methods of the cantilever motion do not scale down easily, prohibiting further increase in the sensitivity and detection speed. Here we report a nanomechanical sensor readout based on electron co-tunnelling through a nanogranular metal. The sensors can be deposited with lateral dimensions down to tens of nm, allowing the readout of nanoscale cantilevers without constraints on their size, geometry or material. By modifying the inter-granular tunnel-coupling strength, the sensors' conductivity can be tuned by up to four orders of magnitude, to optimize their performance. We show that the nanoscale printed sensors are functional on 500 nm wide cantilevers and that their sensitivity is suited even for demanding applications such as atomic force microscopy.

Research paper thumbnail of Mechatronic Scanning System with Integrated Micro Electro Mechanical System Position Sensors

Journal of Theoretical and Applied Mechanics, 2016

In this paper, a study of a mechatronic scanning system for application in the microbiology, micr... more In this paper, a study of a mechatronic scanning system for application in the microbiology, microelectronics research, chemistry, etc. is presented. Integrated silicon micro electro mechanical system (MEMS) position sensor is used for monitoring the displacement of the scanning system. The utilized silicon MEMS sensors with sidewall embedded piezoresistors possess a number of key advantages such as high sensitivity, low noise and extremely low temperature dependence. Design of 2D scanning system with a travel range of 22 × 22 μm2 has been presented in present work. This system includes a Compliant Transmission Mechanism, (CTM) designed as a complex elastic mechanism, comprising four parallelograms. Computer aided desigh (CAD) model and finite element analysis (FEA) of the Compliant Transmission Mechanism mechanisms have been carried out. A prototype of the scanning system is fabricated, based on CAD model. An experimental set-up of an optical system and a correlation technique for ...

Research paper thumbnail of High-Precision Integrated Semiconductor Peizoresistive Detector Devices and Methods Using the Same

Research paper thumbnail of Force monitoring transducers with more than 100,000 scale intervals

SPIE Proceedings, 2015

This paper presents the results obtained at characterization of novel, high performing force tran... more This paper presents the results obtained at characterization of novel, high performing force transducers to be employed into monitoring systems with very high accuracy. Each force transducer comprises of a coherently designed mechanical transducer and a position microsensor with very high accuracy. The range of operation for the mechanical transducer has been optimized to fit the 500μm travel range of the position microsensor. Respectively, the flexures’ stiffness corresponds to achieve the maximum displacement at 70N load force. The position microsensor is a MEMS device, comprising of two rigid elements: an anchored and an actuated ones connected via one monolithic micro-flexure. Additionally, the micro-flexure comprises of two strain detecting cantilevers having four sidewall embedded piezoresistors connected in a Wheatstone bridge. The particular sensor provides a voltage signal having sensitivity in the range of 240μV/μm at 1V DC voltage supply. The experimental set-up for measurement of the load curve of the force transducer has demonstrated an overall force resolution of about 0.6mN. As a result, more than 100,000 scale intervals have been experimentally assessed. The present work forms development of a common approach for accurate measurement of various physical values, when they are transduced in a multi-D displacement. Due to the demonstrated high accuracy, the force transducers with piezoresistive MEMS sensors remove most of the constraints in force monitoring with ppm-accuracy.

Research paper thumbnail of Direct-Write 3D Nano-Printing of Thermal High-Resolution Nano-Probes

Research paper thumbnail of Direct-Write Fabrication of Electric and Thermal High-Resolution Nanoprobes on Self-Sensing AFM Cantilever

Research paper thumbnail of SelectiveSensitivity of contact MEMS position sensors with sidewall piezoresistors

2017 IEEE 23rd International Symposium for Design and Technology in Electronic Packaging (SIITME), 2017

Some results in characterization of two contact MEMS position sensors with sidewall piezoresistor... more Some results in characterization of two contact MEMS position sensors with sidewall piezoresistors are presented. Devices with in-plane travel range of about 50pm comprise of one and the same symmetrical transducer with two Π-shaped flexures. For first time, just by means of different configuration of the same sidewall piezoresistors in the same flexures, position sensors which are selectively sensitive in X or Y direction were prototyped and tested. Experimentally measured ratio of the displacement sensitivities in Y vs. X direction of the first type sensor was 16.5 and same ratio of the sensitivities in X vs. Y direction of the second type was 27.6.

Research paper thumbnail of Project MECA: Training course in microsystems with piezoresistive feedback

2017 IEEE 23rd International Symposium for Design and Technology in Electronic Packaging (SIITME), 2017

Training course on practical aspects in design, technology and prototype fabrication of microsyst... more Training course on practical aspects in design, technology and prototype fabrication of microsystems with piezoresistive feedback, exploiting the shared infrastructure is presented. The course content is considered in the scope of building a sustainable Knowledge Alliance between the partners in Erasmus+ Project# 562206-EPP-1-2015-1-BG-EPPKA2-KA-MECA

Research paper thumbnail of Flash Lamp Annealing of Phosphorus-Implanted Silicon

Physica Status Solidi (a), 1989

Research paper thumbnail of Optical and electrical properties of nanolaminate dielectric structures

Journal of Physics: Conference Series, 2016

The aim of this study was formation of a multilayered transparent conductive nanolaminate structu... more The aim of this study was formation of a multilayered transparent conductive nanolaminate structure with optimized conductivity vs. transparency parameters. The nanolayered structure comprised one or two thin layers of dielectric materials. The overall electrical conductivity was modified by tuning the size of the planar metal granules. Magnetron sputtering system with three different targets was used for layers deposition. The advantages are: the good reproducibility of a low-temperature process allows for effective process control and, optionally, selective formation of conductive areas in a dielectric structure. Our studies revealed that the relation between the sheet resistance and the maximum transparency in the visible spectral range depends on the size of the metal granules and the film thickness of the dielectric coating. The technology provides transparent conductive coatings with well-controlled optical and electrical properties.

Research paper thumbnail of A monolithic MEMS position sensor for closed-loop high-speed atomic force microscopy

Nanotechnology, 2016

The accuracy and repeatability of atomic force microscopy (AFM) imaging significantly depend on t... more The accuracy and repeatability of atomic force microscopy (AFM) imaging significantly depend on the accuracy of the piezoactuator. However, nonlinear properties of piezoactuators can distort the image, necessitating sensor-based closed-loop actuators to achieve high accuracy AFM imaging. The advent of high-speed AFM has made the requirements on the position sensors in such a system even more stringent, requiring higher bandwidths and lower sensor mass than traditional sensors can provide. In this paper, we demonstrate a way for high-speed, high-precision closed-loop AFM nanopositioning using a novel, miniaturized MEMS position sensor in conjunction with a simple PID controller. The sensor was developed to respond to the need for small, lightweight, high-bandwidth, long-range and subnm-resolution position measurements in high-speed AFM applications. We demonstrate the use of this sensor for closed-loop operation of conventional as well as high-speed AFM operation to provide distortion-free images. The presented implementation of this closed-loop approach allows for positioning precision down to 2.1 Å, reduces the integral nonlinearity to below 0.2%, and allows for accurate closed loop imaging at line rates up to 300 Hz.

Research paper thumbnail of 側壁ピエゾ抵抗と接触MEMS位置センサのSelectiveSensitivity【Powered by NICT】

IEEE Conference Proceedings, 2017

Research paper thumbnail of In-line thickness control of self-sensing cantilevers for advanced AFM applications

2017 40th International Spring Seminar on Electronics Technology (ISSE), 2017

Thickness control data measured at different fabrication stages of atomic force microscopy (AFM) ... more Thickness control data measured at different fabrication stages of atomic force microscopy (AFM) self-sensing cantilevers are presented in this paper. Specifically, the thicknesses of multilayered structures comprising silicon, silicon dioxide and thin patterned layers have been measured in-line during multi-step devices' processing. The data of the electrically detected resonance frequencies of the cantilevers have been correlated with the optically thickness measurement. Data interpretation has revealed that optical measurement of the cantilevers' thickness can provide reliable information for both purposes: pre-selection of completed cantilevers in accordance with the specified resonance frequency and in-line control of double-side patterning.

Research paper thumbnail of Development of a Novel Mechanical Transducer for Force Monitoring Using Micro-Electromechanical Sensor (MEMS)

MEMS piezoresistive sensors are more favourable and attractive option for strain detection due to... more MEMS piezoresistive sensors are more favourable and attractive option for strain detection due to a number of key advantages such as high sensitivity, low noise, better scaling characteristics, low cost and their ability to have the detection electronics circuit further away from the sensor or on the same sensing board. This paper represents the results obtained at characterization of novel transducers to be employed into force monitoring systems. Each transducer comprises a coherently designed mechanical transducer and a position MEMS sensor with very high accuracy. The exploited position MEMS microsensor and the mechanical transducer are presented in this paper. The particular MEMS sensor provides a voltage output signal having sensitivity in the range of 240μV/μm at 1V DC voltage supply. The range of operation of the mechanical transducer is optimized to fit the 300μm travel range of position microsensor. Respectively, the flexures’ stiffness corresponds to achieve the max displa...

Research paper thumbnail of Analysis of existing solutions and development of load cell of force measurement using micro-electromechanical sensor (MEMS)

MEMS piezoresistive strain sensors are more favorable and attractive due to a number of key advan... more MEMS piezoresistive strain sensors are more favorable and attractive due to a number of key advantages such as high sensitivity, low noise, better scaling characteristics, low cost and their ability to have the detection electronics circuit further away from the sensor or on the same sensing board. Moreover, they have high potential for monolithic integration with low-power CMOS electronics. Furthermore, piezoresistive strain sensors need less complicated conditioning circuit. The main objective of this work is to develop a load cell for measure of a force using MEMS sensor. A survey was made available for development of measures of stress, including support platform with MEMS sensor. Analyze of the existing MEMS sensors and MEMS devices, and some methods for their production is discussed. The main aim of the work is to develop an appropriate carrier platform and attached to it silicon MEMS sensors. A decision of support platform for serving as the elastic transmission of the sensor...

Research paper thumbnail of Self-sensing cantilevers with nano-laminated Dielectric-Metal-Dielectric resistors

2017 40th International Spring Seminar on Electronics Technology (ISSE), 2017

Results obtained at integration of nano-laminated Dielectric-Metal-Dielectric (DMD) resistors in ... more Results obtained at integration of nano-laminated Dielectric-Metal-Dielectric (DMD) resistors in silicon MEMS sensors are presented in this paper. Fabrication technology with significantly reduced thermal budged for integration of DMD resistors in four-cantilever device has been developed. The ultrathin layers have been deposited in a consecutive RF sputtering process, without exposure to air, exploiting a lift-off patterning technique. The results proved that: i) very good stability of the DMD resistors was achieved, and ii) strain-sensing behavior of nano-laminated structures has been demonstrated.

Research paper thumbnail of Piezoresistive cantilevers' platform for bio-chemical sensing

2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2021

Recent development in exploitation of self-sensing micro cantilevers for bio-chemical sensing, ar... more Recent development in exploitation of self-sensing micro cantilevers for bio-chemical sensing, are summarized. A method for reduction the power consumption for actuation x400 was developed and advantages of using said sensors in reconfigurable sensor assays, are illustrated with application for Air Quality Monitoring (AQM).

Research paper thumbnail of Piezoresistive MEMS Enabled Solutions for IoT

2021 12th National Conference with International Participation (ELECTRONICA), 2021

The present paper reviews recent developments in the exploitation of contact displacement microse... more The present paper reviews recent developments in the exploitation of contact displacement microsensors with embedded flexures and piezoresistors for monitoring of forces for object recognition. A method for precise calibration of the sensors was developed and the advantages of using those sensors with high dynamic range and digitally tunable sensitivity are illustrated.

Research paper thumbnail of Optical and electrical properties of TiO2/Pt/TiO2 nanolaminate structures

Journal of Physics: Conference Series, 2018

We report the results of a study on the optical and electrical properties of nanolaminate TiO 2 /... more We report the results of a study on the optical and electrical properties of nanolaminate TiO 2 /Pt/TiO 2 structures fabricated using RF magnetron sputtering. The effect was investigated of the discontinuous Pt layer on the optical transmittance, electrical conductivity and morphology of the TiO 2 /Pt/TiO 2 structure. On the basis of the theory of electronic tunneling transport between metal granulates in a dielectric matrix, a new technological approach is proposed of preparing high-sensitivity strain sensors based on resistors with a nanolaminate structure containing Pt granulates.

Research paper thumbnail of Contact Position Microsensors with Travel Ranges between 50μm and 2mm

Procedia Engineering, 2016

Thorough inves aled a certain g wall embedded One goal of the wall piezoresist ween various par e... more Thorough inves aled a certain g wall embedded One goal of the wall piezoresist ween various par e sensors might es and dynami V/μm and 5mV er supply voltag

Research paper thumbnail of Direct-write nanoscale printing of nanogranular tunnelling strain sensors for sub-micrometre cantilevers

Nature Communications, 2016

The sensitivity and detection speed of cantilever-based mechanical sensors increases drastically ... more The sensitivity and detection speed of cantilever-based mechanical sensors increases drastically through size reduction. The need for such increased performance for high-speed nanocharacterization and bio-sensing, drives their sub-micrometre miniaturization in a variety of research fields. However, existing detection methods of the cantilever motion do not scale down easily, prohibiting further increase in the sensitivity and detection speed. Here we report a nanomechanical sensor readout based on electron co-tunnelling through a nanogranular metal. The sensors can be deposited with lateral dimensions down to tens of nm, allowing the readout of nanoscale cantilevers without constraints on their size, geometry or material. By modifying the inter-granular tunnel-coupling strength, the sensors' conductivity can be tuned by up to four orders of magnitude, to optimize their performance. We show that the nanoscale printed sensors are functional on 500 nm wide cantilevers and that their sensitivity is suited even for demanding applications such as atomic force microscopy.

Research paper thumbnail of Mechatronic Scanning System with Integrated Micro Electro Mechanical System Position Sensors

Journal of Theoretical and Applied Mechanics, 2016

In this paper, a study of a mechatronic scanning system for application in the microbiology, micr... more In this paper, a study of a mechatronic scanning system for application in the microbiology, microelectronics research, chemistry, etc. is presented. Integrated silicon micro electro mechanical system (MEMS) position sensor is used for monitoring the displacement of the scanning system. The utilized silicon MEMS sensors with sidewall embedded piezoresistors possess a number of key advantages such as high sensitivity, low noise and extremely low temperature dependence. Design of 2D scanning system with a travel range of 22 × 22 μm2 has been presented in present work. This system includes a Compliant Transmission Mechanism, (CTM) designed as a complex elastic mechanism, comprising four parallelograms. Computer aided desigh (CAD) model and finite element analysis (FEA) of the Compliant Transmission Mechanism mechanisms have been carried out. A prototype of the scanning system is fabricated, based on CAD model. An experimental set-up of an optical system and a correlation technique for ...

Research paper thumbnail of High-Precision Integrated Semiconductor Peizoresistive Detector Devices and Methods Using the Same

Research paper thumbnail of Force monitoring transducers with more than 100,000 scale intervals

SPIE Proceedings, 2015

This paper presents the results obtained at characterization of novel, high performing force tran... more This paper presents the results obtained at characterization of novel, high performing force transducers to be employed into monitoring systems with very high accuracy. Each force transducer comprises of a coherently designed mechanical transducer and a position microsensor with very high accuracy. The range of operation for the mechanical transducer has been optimized to fit the 500μm travel range of the position microsensor. Respectively, the flexures’ stiffness corresponds to achieve the maximum displacement at 70N load force. The position microsensor is a MEMS device, comprising of two rigid elements: an anchored and an actuated ones connected via one monolithic micro-flexure. Additionally, the micro-flexure comprises of two strain detecting cantilevers having four sidewall embedded piezoresistors connected in a Wheatstone bridge. The particular sensor provides a voltage signal having sensitivity in the range of 240μV/μm at 1V DC voltage supply. The experimental set-up for measurement of the load curve of the force transducer has demonstrated an overall force resolution of about 0.6mN. As a result, more than 100,000 scale intervals have been experimentally assessed. The present work forms development of a common approach for accurate measurement of various physical values, when they are transduced in a multi-D displacement. Due to the demonstrated high accuracy, the force transducers with piezoresistive MEMS sensors remove most of the constraints in force monitoring with ppm-accuracy.