Fabrication of multi-tiered structures on step and flash imprint lithography templates (original) (raw)

New methods for fabricating step and flash imprint lithography templates

Nanostructure Science, Metrology, and Technology, 2002

Improved step and flash imprint lithography templates for nanofabrication

Microelectronic Engineering, 2003

Indium tin oxide template development for step and flash imprint lithography

Emerging Lithographic Technologies IX, 2005

High resolution templates for step and flash imprint lithography

Journal of Micro/Nanolithography, MEMS, and MOEMS, 2002

Characterization of and imprint results using indium tin oxide-based step and flash imprint lithography templates

John Ekerdt

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2002

Step and flash imprint lithography: a technology review

2000

Hydrogen silsesquioxane for direct electron-beam patterning of step and flash imprint lithography templates

Journal of vacuum science & technology, 2002

Step and flash imprint lithography for manufacturing patterned media

Kim lee

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2009

Step and Flash Imprint Lithography

John Ekerdt

Nanostructure Science and Technology, 2003

Step and flash imprint lithography: Template surface treatment and defect analysis

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 2000

Recent Advances in Step-and-flash Imprint Lithography

Interface, 2002

Step and flash imprint lithography for sub-100-nm patterning

SPIE Proceedings, 2000

Employing Step-and-Flash imprint lithography for gate-level patterning of a MOSFET device

David Onsongo

2003

Step and flash imprint lithography for sub-100-nm patterning

John Ekerdt

Emerging Lithographic Technologies IV, 2000

Employing Step-and-Flash imprint lithography for gate-level patterning of a MOSFET device

Todd Bailey

Emerging Lithographic Technologies VII, 2003

Fabrication of complex 3D structures using Step and Flash Imprint Lithography (S-FIL)

R. Perks, Stefan Dimov

Microelectronic Engineering, 2008

Initial study of the fabrication of step and flash imprint lithography templates for the printing of contact holes

Journal of Micro/Nanolithography, MEMS, and MOEMS, 2004

Image placement issues for ITO-based step and flash imprint lithography templates

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2004