Formation of ohmic contacts to ultra-thin channel AlN/GaN HEMTs (original) (raw)
Related papers
Ti/Al/Mo/Au Ohmic contacts to all-binary AlN/GaN high electron mobility transistors
Applied Physics Letters, 2008
Development and analysis of low resistance ohmic contact to n-AlGaN/GaN HEMT
Diamond and Related Materials, 2007
Ti/Au/Al/Ni/Au low contact resistance and sharp edge acuity for highly scalable AlGaN/GaN HEMTs
IEEE Electron Device Letters, 2018
Dependence of ohmic contact resistance on barrier thickness of AlN/GaN HEMT structures
Solid-state Electronics, 2010
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2020
Electrical and Microstructural Characteristics of Ohmic Contacts formation on AlGaN/GaN HEMT
2009
Very high channel conductivity in low-defect AlN/GaN high electron mobility transistor structures
Applied Physics Letters, 2008
Low Resistance Ti/Al/Mo/Au Ohmic Contacts for AlGaN/GaN Heterostructure Field Effect Transistors
Physica Status Solidi (a), 2002
IEEE Electron Device Letters, 2000
Formation of Ohmic contacts in AlGaN/GaN HEMT structures at 500° C by Ohmic contact recess etching
Microelectronics Reliability, 2009
Low resistance copper-based ohmic contact for AlGaN/GaN high electron mobility transistors
Applied Physics Letters, 2013
2011
Optimization of ohmic contacts on thick and thin AlGaN/GaN HEMTs structures
Superlattices and Microstructures, 2017
AlGaN/GaN Heterostructures in High Electron Mobility Transistors
2018
Japanese Journal of Applied Physics, 2013
Fabrication and Characterization of Thin-Barrier AlGaN/AlN/GaN HEMTs
IEEE Electron Device Letters, 2011
Plasma-assisted ohmic contact for AlGaN/ GaN heterostructure field-effect transistors
Processing methods for low Ohmic contact resistance in AlN/GaN MOSHEMTs
2009
Solid-State Electronics, 2016
Carrier transport mechanism of low resistance Ti/Al/Au ohmic contacts to AlInN/GaN heterostructures
Applied Physics Letters, 2013
Advanced Design of Ultrathin-Barrier AlN/GaN HEMTs
Improved surface morphology and edge definition for ohmic contacts to AlGaN/GaN heterostructures
Gallium Nitride Materials and Devices IV, 2009
Normally-off AlGaN/GaN MOS-HEMT using ultra-thin Al0.45 Ga0.55 N barrier layer
physica status solidi (a), 2017
GaN/AlN superlattice high electron mobility transistor heterostructures on GaN/Si(111)
physica status solidi (b), 2015
Arpan Chakraborty, James Speck
Applied Physics Letters, 2007
physica status solidi (a), 2017
MBE-grown ultra-shallow AlN/GaN HFET technology
2007
High electron mobility transistors based on the AlN/GaN heterojunction
Microelectronic Engineering, 2009