Wideband micromachined capacitive microphones with radio frequency detection (original) (raw)
Related papers
Sanli Ergun, Butrus Khuri-Yakub
2001
Wideband micromachined acoustic sensors with radio frequency detection
Proceedings of SPIE, 2003
Wideband micromachined acoustic sensors with radio frequency detection
Unattended Ground Sensor Technologies and Applications V, 2003
Acoustic Sensing with Capacitive Micromachined Membranes and Radio Frequency Detection
2001
A Review of MEMS Capacitive Microphones
Micromachines
IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control, 2009
A sensitive detection method for capacitive ultrasonic transducers
Applied Physics Letters, 1998
Design and implementation of an acoustic-vibration capacitive MEMS microphone
AIP Advances
Micromachined capacitive ultrasonic transducers fabricated using silicon on insulator wafers
Microelectronic Engineering, 2002
Ultrasonics …, 2005
Highly flexible membrane systems for micromachined microphones-modeling and simulation
High sensitivity capacitive MEMS microphone with spring supported diaphragm
SPIE Proceedings, 2007
New fabrication process for capacitive micromachined ultrasonic transducers
2003
Capacitive micromachined ultrasonic transducers (cmuts) with piston-shaped membranes
IEEE Ultrasonics Symposium, 2005., 2005
Characterization of capacitive micromachined ultrasonic transducers
2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014
Capacitive micromachined ultrasonic transducer with an open cells structure
Alessandro Stuart Savoia, Riccardo Carotenuto
MEMS Capacitive Microphones: Acoustical, Electrical, and Hidden Thermal-Related Issues
IEEE Sensors Journal, 2018
Precision Engineering, 2002
Lumped Electromechanical Modeling of Capacitive Micromachined Ultrasonic Transducers
Materials Today: Proceedings, 2016
Acoustic coupling in capacitive microfabricated ultrasonic transducers: Modeling and experiments
A new regime for operating capacitive micromachined ultrasonic transducers
Baris Bayram, Butrus Khuri-Yakub
Ultrasonics, …, 2003
2002 IEEE Ultrasonics Symposium, 2002. Proceedings.
Goksen Yaralioglu, Butrus Khuri-Yakub
2003
Optimization of the gain-bandwidth product of capacitive micromachined ultrasonic transducers
Ultrasonics, Ferroelectrics and …, 2005
2002
Wafer Bonded Capacitive Micromachined Transducers for Underwater Applications
H. Oguz, Hayrettin Koymen, Selim Olcum, Abdullah Atalar
Design Approaches of MEMS Microphones for Enhanced Performance
Surface micromachined capacitive ultrasonic transducers
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2000
The characterization of capacitive micromachined ultrasonic transducers in air
Ultrasonics, 2002
Dynamic analysis of capacitive micromachined ultrasonic transducers
IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control, 2005