Calibration of step heights and roughness measurements with atomic force microscopes (original) (raw)
Atomic Force Microscopy
Biserka Runje
Tehnički glasnik, 2024
View PDFchevron_right
Influence of measuring parameters on the precision of atomic force microscope in industrial applications
G. Tosello, Giovanni Lucchetta, F. Marinello
International Conferences on Multi-Material Micro Manufacture, 4M/International Conferences on Micro Manufacturing, ICOMM, 2009
View PDFchevron_right
The study of silicon stepped surfaces as atomic force microscope calibration standards with a calibrated AFM at NIST
Rainer Köning
The 1998 international conference on characterization and metrology for ULSI technology, 1998
View PDFchevron_right
Line edge roughness metrology using atomic force microscopes
Theodore Vorburger
Measurement Science and Technology, 2005
View PDFchevron_right
Calibrated scanning force microscope with capabilities in the subnanometre range
Konrad Herrmann
Surface and Interface Analysis, 2002
View PDFchevron_right
Acquisition of high-precision images for non-contact atomic force microscopy
Meghdari Ali
Mechatronics, 2006
View PDFchevron_right
Measurement of the nanoscale roughness by atomic force microscopy: Basic Principles and Applications
Fabio Leite
Atomic Force Microscopy.
View PDFchevron_right
Quantitative assessment of sample stiffness and sliding friction from force curves in atomic force microscopy
Jon Pratt
Journal of Applied Physics, 2010
View PDFchevron_right
Calibration of lateral force measurements in atomic force microscopy with a piezoresistive force sensor
Julien Vitard, Sinan D Haliyo
Review of Scientific Instruments, 2008
View PDFchevron_right
Atomic force microscopy and direct surface force measurements
Ian Larson
Pure and Applied Chemistry, 2005
View PDFchevron_right
Atomic force microscopy and direct surface force measurements (IUPAC Technical Report
Ian Larson
Pure and Applied Chemistry, 2005
View PDFchevron_right
Acquisition of High Precision Images for Non-Contact Atomic Force Microscopy via Direct Identification of Sample Height
Ali Meghdari, Nader Jalili
Dynamic Systems and Control, Parts A and B, 2005
View PDFchevron_right
Design and characterization of MIKES metrological atomic force microscope
Virpi Korpelainen
Precision Engineering, 2010
View PDFchevron_right
Multilaboratory comparison of traceable atomic force microscope measurements of a 70-nm grating pitch standard
Donald Chernoff
Journal of Micro/Nanolithography, MEMS, and MOEMS, 2011
View PDFchevron_right
Traceability for nanometre scale measurements : Atomic force microscopes in dimensional nanometrology
Virpi Korpelainen
2014
View PDFchevron_right
A review of atomic force microscopy imaging systems: application to molecular metrology and biological sciences
Nader Jalili
Mechatronics, 2004
View PDFchevron_right
On the effect of local sample slope during modulus measurements by contact-resonance atomic force microscopy
Matthieu George
Ultramicroscopy, 2018
View PDFchevron_right
Atomic Force Microscopy A Practical Tool for Problem Solving
Donald Chernoff
Microscopy Today
View PDFchevron_right
Optical interference artifacts in contact atomic force microscopy images
Maria Jose Nuevo
Ultramicroscopy, 2002
View PDFchevron_right
Quantitative analytical atomic force microscopy: a cantilever reference device for easy and accurate AFM spring-constant calibration
Peter Cumpson
Measurement Science and Technology, 2004
View PDFchevron_right
Overview of Atomic Force Microscopy Greg Haugstad
Ankith Subramanian
View PDFchevron_right
Accurate analytical measurements in the atomic force microscope: a microfabricated spring constant standard potentially traceable to the SI
Peter Cumpson
Nanotechnology, 2003
View PDFchevron_right
Interlaboratory comparison of traceable atomic force microscope pitch measurements
Theodore Vorburger
Scanning Microscopy 2010, 2010
View PDFchevron_right
Error Sources in Atomic Force Microscopy for Dimensional Measurements: Taxonomy and Modeling
F. Marinello
Journal of Manufacturing Science and Engineering, 2010
View PDFchevron_right
Easy and direct method for calibrating atomic force microscopy lateral force measurements
Martin Guthold
2007
View PDFchevron_right
Fidelity imaging for atomic force microscopy
Sayan Ghosal
Applied Physics Letters, 2015
View PDFchevron_right
Atomic scale patterns formed during surface scanning by atomic force microscopy tips
Juracyr Valente
Applied Physics Letters, 2006
View PDFchevron_right
A novel technique for the in situ calibration and measurement of friction with the atomic force microscope
Mark Rutland
Review of Scientific Instruments, 2005
View PDFchevron_right
Atomic force microscope caliper for critical dimension measurements of micro and nanostructures through sidewall scanning
Danish Hussain
Ultramicroscopy, 2015
View PDFchevron_right
Interlaboratory comparison of traceable atomic force microscope pitch measurements
Donald Chernoff
Scanning Microscopy 2010, 2010
View PDFchevron_right
Atomic Force Microscopy AFM
Nasrin Azad-McGuire
View PDFchevron_right