Calibration of step heights and roughness measurements with atomic force microscopes (original) (raw)

Atomic Force Microscopy

Biserka Runje

Tehnički glasnik, 2024

View PDFchevron_right

Influence of measuring parameters on the precision of atomic force microscope in industrial applications

G. Tosello, Giovanni Lucchetta, F. Marinello

International Conferences on Multi-Material Micro Manufacture, 4M/International Conferences on Micro Manufacturing, ICOMM, 2009

View PDFchevron_right

The study of silicon stepped surfaces as atomic force microscope calibration standards with a calibrated AFM at NIST

Rainer Köning

The 1998 international conference on characterization and metrology for ULSI technology, 1998

View PDFchevron_right

Line edge roughness metrology using atomic force microscopes

Theodore Vorburger

Measurement Science and Technology, 2005

View PDFchevron_right

Calibrated scanning force microscope with capabilities in the subnanometre range

Konrad Herrmann

Surface and Interface Analysis, 2002

View PDFchevron_right

Acquisition of high-precision images for non-contact atomic force microscopy

Meghdari Ali

Mechatronics, 2006

View PDFchevron_right

Measurement of the nanoscale roughness by atomic force microscopy: Basic Principles and Applications

Fabio Leite

Atomic Force Microscopy.

View PDFchevron_right

Quantitative assessment of sample stiffness and sliding friction from force curves in atomic force microscopy

Jon Pratt

Journal of Applied Physics, 2010

View PDFchevron_right

Calibration of lateral force measurements in atomic force microscopy with a piezoresistive force sensor

Julien Vitard, Sinan D Haliyo

Review of Scientific Instruments, 2008

View PDFchevron_right

Atomic force microscopy and direct surface force measurements

Ian Larson

Pure and Applied Chemistry, 2005

View PDFchevron_right

Atomic force microscopy and direct surface force measurements (IUPAC Technical Report

Ian Larson

Pure and Applied Chemistry, 2005

View PDFchevron_right

Acquisition of High Precision Images for Non-Contact Atomic Force Microscopy via Direct Identification of Sample Height

Ali Meghdari, Nader Jalili

Dynamic Systems and Control, Parts A and B, 2005

View PDFchevron_right

Design and characterization of MIKES metrological atomic force microscope

Virpi Korpelainen

Precision Engineering, 2010

View PDFchevron_right

Multilaboratory comparison of traceable atomic force microscope measurements of a 70-nm grating pitch standard

Donald Chernoff

Journal of Micro/Nanolithography, MEMS, and MOEMS, 2011

View PDFchevron_right

Traceability for nanometre scale measurements : Atomic force microscopes in dimensional nanometrology

Virpi Korpelainen

2014

View PDFchevron_right

A review of atomic force microscopy imaging systems: application to molecular metrology and biological sciences

Nader Jalili

Mechatronics, 2004

View PDFchevron_right

On the effect of local sample slope during modulus measurements by contact-resonance atomic force microscopy

Matthieu George

Ultramicroscopy, 2018

View PDFchevron_right

Atomic Force Microscopy A Practical Tool for Problem Solving

Donald Chernoff

Microscopy Today

View PDFchevron_right

Optical interference artifacts in contact atomic force microscopy images

Maria Jose Nuevo

Ultramicroscopy, 2002

View PDFchevron_right

Quantitative analytical atomic force microscopy: a cantilever reference device for easy and accurate AFM spring-constant calibration

Peter Cumpson

Measurement Science and Technology, 2004

View PDFchevron_right

Overview of Atomic Force Microscopy Greg Haugstad

Ankith Subramanian

View PDFchevron_right

Accurate analytical measurements in the atomic force microscope: a microfabricated spring constant standard potentially traceable to the SI

Peter Cumpson

Nanotechnology, 2003

View PDFchevron_right

Interlaboratory comparison of traceable atomic force microscope pitch measurements

Theodore Vorburger

Scanning Microscopy 2010, 2010

View PDFchevron_right

Error Sources in Atomic Force Microscopy for Dimensional Measurements: Taxonomy and Modeling

F. Marinello

Journal of Manufacturing Science and Engineering, 2010

View PDFchevron_right

Easy and direct method for calibrating atomic force microscopy lateral force measurements

Martin Guthold

2007

View PDFchevron_right

Fidelity imaging for atomic force microscopy

Sayan Ghosal

Applied Physics Letters, 2015

View PDFchevron_right

Atomic scale patterns formed during surface scanning by atomic force microscopy tips

Juracyr Valente

Applied Physics Letters, 2006

View PDFchevron_right

A novel technique for the in situ calibration and measurement of friction with the atomic force microscope

Mark Rutland

Review of Scientific Instruments, 2005

View PDFchevron_right

Atomic force microscope caliper for critical dimension measurements of micro and nanostructures through sidewall scanning

Danish Hussain

Ultramicroscopy, 2015

View PDFchevron_right

Interlaboratory comparison of traceable atomic force microscope pitch measurements

Donald Chernoff

Scanning Microscopy 2010, 2010

View PDFchevron_right

Atomic Force Microscopy AFM

Nasrin Azad-McGuire

View PDFchevron_right