Channeling contrast analysis of GaAs side-walls fabricated by laser wet chemical etching (original) (raw)
Related papers
Excimer laser assisted etching of AlGaAs and GaAs
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1995
Thermal etching of GaAs (1 1 3) surfaces
Journal of Materials Science-materials in Electronics - J MATER SCI-MATER ELECTRON, 1998
CH3I vapor etching of masked and patterned GaAs
Journal of Crystal Growth, 1995
Layer-by-layer etching of GaAs (110) with halogenation and pulsed-laser irradiation
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1998
Size-selective laser-induced etching of semi-insulating GaAs: Photoluminescence studies
2009
Materials Science and Engineering: B, 2004
XPS study of laser-annealed ion-implanted GaAs
Surface and Interface Analysis, 1993
Through-wafer via fabrication in gallium arsenide by excimer laser projection patterned etching
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 1993
Characterization of wet-etched GaAs (100) surfaces
Surface and Interface Analysis, 2005
Assessment of Surface Damage of Gallium Arsenide due to Reactive Ion Etching
MRS Proceedings, 1990
A new ellipsometric model of wet and dry etched GaAs surfaces
Thin Solid Films, 1995
Wet etching of GaAs using synchrotron radiation x rays
Derrick C Mancini, N. Moldovan
Journal of Applied Physics, 2001
Melanie Will-Cole -- Please note: Publications & Patents listed under M.W. Cole
Journal of Applied Physics, 1995
Microelectronic Engineering
Synchrotron-radiation-induced anisotropic wet etching of GaAs
Applied Physics Letters, 1999
Etch depth control in bulk GaAs using patterning and real time spectroscopic ellipsometry
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2002
Wavelength dependent laser-induced etching of Cr-O doped GaAs: Morphology studies by SEM and AFM
Bulletin of Materials Science, 2009
Characteristics of in situ Cl2 etched/regrown GaAs/GaAs interfaces
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1993
Modeling of altered layer formation during reactive ion etching of GaAs
Applied Surface Science, 2012
Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 2001
Etching of GaAs by CCl4 and VCl4 in a metalorganic vapor-phase epitaxy reactor
Journal of Crystal Growth, 1998
Sample size effect in photoelectrochemical etching of n-GaAs
Derrick C Mancini, N. Moldovan
Applied Physics Letters, 2000
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2004
Photoreflectance Characterization of Etch-Induced Damage in Dry Etched GaAs
MRS Proceedings, 1993
Preferential chemical etching of blazed gratings in (110)-oriented GaAs
Optics Letters, 1979
Deep levels in implanted, pulse-laser-annealed GaAs
Nuclear Instruments and Methods, 1981