Assessment of non-uniform thin films using spectroscopic ellipsometry and imaging spectroscopic reflectometry
Miloslav Ohlídal
Thin Solid Films, 2013
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Measurement of the thickness distribution and optical constants of non-uniform thin films
A. Majumdar
Measurement Science and Technology, 2011
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Precise Measurement of Thickness Distribution of Non Uniform Thin Films by Imaging Spectroscopic Reflectometry
Miloslav Ohlídal
2009
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Ellipsometric characterisation of thin films non-uniform in thickness
Vilma Buršíková
Thin Solid Films, 2011
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Optical characterization of thin films by the combined method of spectroscopic ellipsometry and spectroscopic photometry
Daniel Franta
Vacuum, 2005
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Ellipsometric determination of the thickness and the refractive index of superficial films deposited on metal mirrors
Simion Jitian
Journal of physics, 2020
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Optical characterization procedure for large thin films
maria teresa gutierrez
Modeling Aspects in Optical Metrology, 2007
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A New Versatile Instrument for Characterization of Thin Films and Multilayers Using Spectroscopic Ellipsometry and Grazing X-Ray Reflectance
P. Boher
physica status solidi (a), 1998
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The Ellipsometrical Analysis of External Reflection of Light on Superficial Films on Solid Substrates
Simion Jitian
American Journal of Optics and Photonics, 2015
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Characterization of thin films based on reflectance and transmittance measurements at oblique angles of incidence
Farshid Manoocheri
Applied Optics, 2006
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Multiple sample analysis of spectroscopic ellipsometry data of semi-transparent films
Kenneth Järrendahl
Thin solid films, 1998
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Determination of Optical Constants of Thin Films and Multilayer Stacks by Use of Concurrent Reflectance, Transmittance, and Ellipsometric Measurements
Rongguang Liang
Applied Optics, 2001
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The dependence of ellipsometric parameters Δ and Ψ on refractive index of superficial film
dr.ing. Adela Berdie
IOP Conference Series: Materials Science and Engineering
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Optical Characterization of Nonabsorbing and Weakly Absorbing Thin Films with the Wavelengths Related to Extrema in Spectral Reflectances
Daniel Franta
Applied Optics, 2001
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Thin-film thickness profile measurement by three wavelength interference color analysis
Katsuichi Kitagawa
Applied Optics, 2013
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Optical Characterization of Thin Solid Films
Miloslav Ohlídal
Springer Series in Surface Sciences, 2018
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Determination of refractive index and layer thickness of nm-thin films via ellipsometry
Christiane Helm
Optics express, 2017
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Analysis of Reflectance and Transmittance Characteristics of Optical Thin Film for Various Film Materials, Thicknesses and Substrates
NASRIN SULTANA
Journal of Electrical & Electronic Systems, 2015
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Transmission and Reflection Ellipsometry of Thin Films and Multilayer Systems
Võ Nhật Trường
Applied Optics, 1998
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Determination of structural parameters characterizing thin films by optical methods: A comparison between scanning angle reflectometry and optical waveguide lightmode spectroscopy
Csilla Gergely
The Journal of Chemical Physics, 2001
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Characterization of thin films by optical techniques
Bouazza Tbib
Characterization of thin films by optical techniques, 2017
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Image scanning ellipsometry for measuring nonuniform film thickness profiles
Joel Plawsky
Applied Optics, 1994
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Determination of the thickness and optical constants of thin films from transmission spectra
Miklós Kubinyi
Thin Solid Films, 1996
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Maxima of the spectral reflectance ratio of polarized waves used to measure the thickness of a nonabsorbing thin film
D. Ciprian, P. Hlubina
Optics and Lasers in Engineering, 2010
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Thin film thickness profile measurement using an interferometric surface profiler
Katsuichi Kitagawa
Optomechatronic Sensors and Instrumentation III, 2007
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Monolayer film analysis by total internal reflection ellipsometry
Viktoras Vaicikauskas
Lithuanian Journal of Physics, 2007
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Thin film thickness profile measurement using an interferometric surface profiler
Katsuichi Kitagawa
2007
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Measurements of the thickness distribution of thin films with a slit-beam-profile reflectometer
dk qing
Optics Letters, 2000
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Multilayer thin-film inspection through measurements of reflection coefficients
Neal Brock
Optics Letters, 2011
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Thin film thickness measurements using Scanning White Light Interferometry
John Walls, Piotr Kaminski
Thin Solid Films, 2014
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Determining thickness and refractive index from free-standing ultra-thin polymer films with spectroscopic ellipsometry
Tom Tiwald
Applied Surface Science, 2017
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Determination Of Optical Constants Of Semiconductor Thin Films By Ellipsometry
Aissa Manallah
2016
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Ellipsometric method for investigation of the optical anisotropy of thin films: theory and calculations
Eugene Bortchagovsky
Thin Solid Films, 1997
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An ellipsometric method for the characterization of macroscopically heterogeneous films
Jürgen P . Rabe
Optics Communications, 1986
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Numerical Algorithm for Spectroscopic Ellipsometry of Thick Transparent Films
Salvador Bosch, JULIO DOMINGO PEREZ TUDELA, A. Canillas
Applied Optics, 1998
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