Nanolithography Study Using Scanning Probe Microscope (original) (raw)
Related papers
Nanofabrication by scanning probe microscope lithography: A review
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2005
Scanning Probe Microscopy in Materials Science
MRS Bulletin, 2004
Mechanical scanning probe nanolithography: modeling and application
Semiconductor Physics Quantum Electronics and Optoelectronics, 2012
Scanning Probe Microscopy – Principle of Operation, Instrumentation, and Probes
2008
Scratching the polymethyl methacrylate and photo resist samples using atomic force microscopy
Scanning probe microscopy of functional materials : nanoscale imaging and spectroscopy
Springer eBooks, 2010
Scratch direction and threshold force in nanoscale scratching using atomic force microscopes
Ampere Tseng, Jun-ichi Shirakashi
Applied Surface Science, 2011
Madridge Journal of Analytical Sciences and Instrumentation
Nanoscale, 2009
NATO Science Series II: Mathematics, Physics and Chemistry, 2005
Measurement of the nanoscale roughness by atomic force microscopy: Basic Principles and Applications
Atomic Force Microscopy.
Nanoscale patterning of Si surface using SPM scratching
Journal of Physics: Conference Series, 2008
Scanning probe microscopy in material science and biology
Giovanni Longo, Marco Girasole
Journal of Physics D: Applied Physics, 2011
2007
Imaging and modification of polymers by scanning tunneling and atomic force microscopy
Journal of Applied Physics, 1988
Introductory Review, Scanning Tunneling Microscopy (STM) & Atomic Force Microscopy (AFM)
Scanning probe microscopy of biological samples and other surfaces
Journal of Microscopy, 1988
Nano-chemistry and scanning probe nanolithographies
Chemical Society Reviews, 2006
Journal of Experimental Nanoscience, 2011
cdn.intechopen.com
Japanese Journal of Applied Physics, 2008
Atomic force microscopy and direct surface force measurements (IUPAC Technical Report
Pure and Applied Chemistry, 2005
Diagnostics of micro-and nanostructure using the scanning probe microscopy
2005
Nano-lithography by electron exposure using an Atomic Force Microscope
Microelectronic Engineering, 1999
Atomic force microscopy lithography as a nanodevice development technique*
Claudio Nicolini, Paolo Faraci
Nanotechnology, 2000
Atomic force microscopy and direct surface force measurements
Pure and Applied Chemistry, 2005
Scanning probe microscopy as a metrology method in micro- and nanostructure investigations
2000
Nanometer scale lithography on silicon, titanium and PMMA resist using scanning probe microscopy
Solid-State Electronics, 1999
Microstructural Characterization of Hierarchical Structured Surfaces by Atomic Force Microscopy
IOP Conference Series: Materials Science and Engineering, 2013