original ) (raw )Development of an ion-beam sputtering system for depositing thin films and multilayers of alloys and compounds
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Applied Surface Science, 2003
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Ion beam deposition in materials research, NIMB Vol. 37-38, 16-21 (1989) RA Zhur, SJ Pennycook, TS Noggle, N Herbots, TE Haynes, BR Appleton
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