Atomic diffusion induced by stress relaxation in InGaAs/GaAs epitaxial layers (original) (raw)

Study of the relaxation process during InGaAs/GaAs (001) growth from in situ real-time stress measurements

Luisa Gonzalez

Applied Physics Letters, 2002

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Photoreflectance study of partially relaxed epitaxial InGaAs on GaAs

J. Serafińczuk

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Strain Relaxation in Compositionally Graded InGaAs/GaAs Heterostructures

Karen L Kavanagh

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Optical study of strained and relaxed epitaxial InxGa1−xAs on GaAs

Claudio Ferrari

Journal of Applied Physics, 1995

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Relationship between surface morphology and strain relaxation during growth of InGaAs strained layers

Christian Lavoie

Applied Physics Letters, 1995

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In situReal-Time X-ray Reciprocal Space Mapping during InGaAs/GaAs Growth for Understanding Strain Relaxation Mechanisms

Itaru Kamiya

Applied Physics Express, 2009

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Epilayer thickness influence on composition modulation of low temperature grown InGaAs/GaAs (001) layers

Luisa Gonzalez

2004

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Relaxation mechanism of InGaAs single and graded layers grown on (111)B GaAs

SERGIO I. MOLINA

Thin Solid Films, 1998

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Combined effects of substrate compliance and film compositional grading on strain relaxation in layer-by-layer semiconductor heteroepitaxy: the case of InAs/In0.50Ga0.50As/GaAs(111)A

Henry Weinberg

Surface Science, 2003

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Growth temperature dependence of strain relaxation during InGaAs/GaAs(001) heteroepitaxy

Itaru Kamiya

Journal of Crystal Growth, 2011

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Composition Modulation in Low Temperature Growth of InGaAs/GaAs System: Influence on Plastic Relaxation

Luisa Gonzalez

Microchimica Acta, 2004

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In situ detection of an initial elastic relaxation stage during growth of In0.2Ga0.8As on GaAs(0 0 1)

Luisa Gonzalez

Applied Surface Science, 2002

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Deep levels in virtually unstrained InGaAs layers deposited on GaAs

Roberto Mosca

Journal of Applied Physics, 1998

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Non-uniform strain relaxation in In x Ga 1− x As layers

Peter Goodhew

Solid-state Electronics, 1996

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Strain induced 2D–3D growth mode transition in molecular beam epitaxy of InxGa1t-xAs on GaAs (001)

Artemis Ceschin

Journal of Crystal Growth, 1991

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Growth phenomena and characteristics of strained In_x Ga_(1− x) As on GaAs

R. Gibala

1989

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Relaxation behavior of undoped InxGa1−xP 0.5<x<0.7 grown on GaAs by atomic layer molecular-beam epitaxy

Luisa Gonzalez

Journal of Applied Physics, 1996

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Kinetics of dislocation-mediated strain relaxation in InGaAs/GaAs heteroepitaxy

Eric Chason, R. Beresford

Journal of Crystal Growth, 2003

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Residual strain measurements in InGaAs metamorphic buffer layers on GaAs

Luca Seravalli

European Physical Journal B, 2007

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Plastic relaxation of metamorphic single layer and multilayer InGaAs/GaAs structures

Paul Fewster

Applied Physics Letters, 1994

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Quantitative imaging of InGaAs/GaAs layers using transmission electron microscopy methods: characterization of stresses and chemical composition

Pierre Stadelmann, P A Buffat

Journal of Crystal Growth, 2002

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Morphology and relaxation in InyGa1−yAs/GaAs multi-layer structures

Luke Lester

Journal of Crystal Growth, 2001

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Lattice tilt, concentration, and relaxation degree of partly relaxed InGaAs/GaAs structures

Ilya Feranchuk

physica status solidi (a), 2011

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Lattice strain measurement of strained In0.1Ga0.9As/GaAs heterostructures by RBS and channeling

A. Siddiqui, Anand Pathak

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1998

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Nucleation, growth, and strain relaxation of lattice-mismatched 3-5 semiconductor epitaxial layers

Louis Guido

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Transmission Electron Microscopy, High Resolution X-Ray Diffraction and Rutherford Backscattering Study of Strain Release in InGaAs/GaAs Buffer Layers

narciso gambacorti

1994

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The temperature dependent variation of bulk and surface composition of InxGa1−xAs on GaAs grown by chemical beam epitaxy studied by RHEED, X-ray diffraction and XPS

A. Ignatiev

Journal of Crystal Growth, 1992

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Effects of buffer layer thickness and film compositional grading on strain relaxation kinetics in InAs/GaAs(111)A heteroepitaxy

R. Pelzel

Surface Science, 2000

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Atomic-resolution study of lattice distortions of buriedInxGa1−xAsmonolayers in GaAs(001)

Michael Bedzyk

Physical Review B, 1999

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Role of strain and growth conditions on the growth front profile of InxGa1−xAs on GaAs during the pseudomorphic growth regime

Paul R Berger

Applied Physics Letters, 1988

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Structure and properties of InGaAs layers grown by low-temperature molecular-beam epitaxy

Nikolay Bert

Semiconductors, 1999

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Comparison of strain relaxation in InGaAsN and InGaAs thin films

Adil A. Chahboun

Applied Physics Letters, 2002

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