Chapter 4: Transparent Film Profilometry (original) (raw)

Chapter 5 Thickness Profile Measurement of Free-Standing Transparent Film 5.1 Background and objectives of the study

Katsuichi Kitagawa

Doctoral Dissertation, University of Tokyo, 2011

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Thin film thickness profile measurement using an interferometric surface profiler

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2007

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Thin film thickness profile measurement using an interferometric surface profiler

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Optomechatronic Sensors and Instrumentation III, 2007

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SICE 2004 Annual Conference , 2004

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Proc. of Symposium on Optical Measurement and Imaging Technology (SOMIT), 2007

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Proc. of JSPE Autumn Meeting, 2007

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Simultaneous measurement of film surface topography and thickness variation using white-light interferometry

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Simultaneous measurement of film surface topography and thickness variation using white-light interferometry

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Surface and thickness profile measurement of a transparent film by three-wavelength vertical scanning interferometry

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Optics Letters, 2014

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Surface and thickness measurement of a transparent film using three-wavelength interferometry

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Proceedings of the 14th euspen International Conference, pp. 189-192 (Dubrovnik; June 2014)

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Thin-film thickness profile measurement by three wavelength interference color analysis

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Applied Optics, 2013

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3-D Shape Measurement of a Transparent Film by White Light Interferometry Katsuichi KITAGAWA

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Proc. of Vision Engineering Workshop (ViEW) 2003, 2003

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Sensitivity Analysis of Transparent Film Thickness Measurement by Three-wavelength Interference Color Analysis Method

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Proc. of JSPE Autumn Meeting, 2013

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Semi-transparent Film Thickness Measurement by Interference Color Analysis

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3-D Shape Measurement of a Transparent Film by White Light Interferometry

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Simultaneous Measurement of Film Surface Topography and Thickness Variation using Three-Wavelength Interferometry

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Interferometry XIV: Applications, 2008

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Transparent film thickness measurement by three-wavelength interference method: An extended application of Global Model Fitting algorithm

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Mechatronics (MECATRONICS) , 2012 9th France-Japan & 7th Europe-Asia Congress on and Research and Education in Mechatronics (REM), 2012 13th Int'l Workshop on, 2012

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Measurements of the thickness distribution of thin films with a slit-beam-profile reflectometer

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Optics Letters, 2000

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Multilayer thin-film inspection through measurements of reflection coefficients

Neal Brock

Optics Letters, 2011

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Application of Fresnel diffraction from a phase step to the measurement of film thickness

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Applied Optics, 2009

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Transmission technique for planar film index-profile measurements

Paul Facq

Optical and Quantum Electronics, 1980

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Characterization of materials and film stacks for accurate surface topography measurement using a white-light optical profiler

Peter J de Groot

Optical Micro- and Nanometrology in Microsystems Technology II, 2008

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Interferometric measurement of refractive index profiles for thin film characterization

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Proceedings of SPIE, 1997

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Film thickness measurement by optical profilometer MicroProf® FRT

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Optical characterization of thin films non-uniform in thickness by a multiple-wavelength reflectance method

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Precise Measurement of Thickness Distribution of Non Uniform Thin Films by Imaging Spectroscopic Reflectometry

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TRANSPARENT INHOMOGENEOUS THIN FILM CHARACTERISATION USING INTERFEROMETRIC TECHNIQUE

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Thin film thickness measurements using Scanning White Light Interferometry

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