Nanoscale fabrication using single-ion impacts (original) (raw)
Changyi Yang2002, Smart Materials and Structures
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Related topics
EngineeringMaterials ScienceCarbon NanotubeSmart MaterialsSmart Materials and StructuresQuantum ComputerIon ImplantationCHEMICAL SCIENCESAtomic Force MicroscopeIon BeamChemical ModificationThin Layer