Large-area synthesis of high electrical performance MoS2 by a commercially scalable atomic layer deposition process (original) (raw)

Perspective: Highly ordered MoS2 thin films grown by multi-step chemical vapor deposition process

Yutaka Wakayama

APL Materials

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MoS2 Functionalization with a Sub-nm Thin SiO2 Layer for Atomic Layer Deposition of High-κ Dielectrics

Johan Meersschaut

Chemistry of Materials, 2017

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Studies on Characterization of MoS2 Thin Films Deposited in Method by Chemical Bath Deposition

Marko Babic

International Journal Of Scientific Research And Education, 2016

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Synthesis of Large-Area MoS 2 Atomic Layers with Chemical Vapor Deposition

Jacob Wang

Advanced Materials, 2012

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Protecting the properties of monolayer MoS2 on silicon based substrates with an atomically thin buffer

Michael Man

Scientific Reports, 2016

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Synthesis of Wrinkled MoS2 Thin Films Using a Two-Step Method Consisting of Magnetron Sputtering and Sulfurization in a Confined Space

Yassine ZAKI

Sustainability, 2024

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Engineering the Growth of MoS2via Atomic Layer Deposition of Molybdenum Oxide Film Precursor

Mario Alia

Advanced Electronic Materials, 2016

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Rapid wafer-scale fabrication with layer-by-layer thickness control of atomically thin MoS2 films using gas-phase chemical vapor deposition

Bellarmine Francis

APL Materials, 2019

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An Effective Route for the Growth of Multilayer MoS2 by Combining Chemical Vapor Deposition and Wet Chemistry

Ziyad Almohaimeed

Advances in Condensed Matter Physics, 2022

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p-type doping in CVD grown MoS2 using Nb

Masihhur Laskar

arXiv (Cornell University), 2013

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Bottom-up water-based solution synthesis for a large MoS2 atomic layer for thin-film transistor applications

WWJD Choi

npj 2D Materials and Applications, 2021

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Green Colloidal Synthesis of MoS2 Nanoflakes

Peter Hutár

Zenodo (CERN European Organization for Nuclear Research), 2023

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Morphology-controlled MoS2 by low-temperature atomic layer deposition

Chengxu Shen

Nanoscale, 2020

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Low Variability in Synthetic Monolayer MoS2 Devices

Saurabh Suryavanshi

ACS Nano, 2017

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High Current Density in Monolayer MoS2 Doped by AlOx

Saurabh Suryavanshi

ACS Nano, 2021

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Towards a uniform and large-scale deposition of MoS 2 nanosheets via sulfurization of ultra- thin Mo-based solid films

Eugenio Cinquanta, Alessandro Molle

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Expanding Interlayer Spacing in MoS2 for Realizing an Advanced Supercapacitor

Ankit Kumar

ACS Energy Letters, 2019

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Chemical Vapor Deposition of MoS2 for Energy Harvesting: Evolution of the Interfacial Oxide Layer

Martin Vondracek

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Site-Selective Integration of MoS2 Flakes on Nanopores by Means of Electrophoretic Deposition

Denis Garoli

ACS Omega

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Direct Chemical Vapor Deposition Growth of Monolayer MoS2 on TiO2 Nanorods and Evidence for Doping-Induced Strong Photoluminescence Enhancement

P K Giri

The Journal of Physical Chemistry C, 2018

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Lateral Growth of MoS 2 2D Material Semiconductors Over an Insulator Via Electrodeposition

Giacomo Piana

Advanced Electronic Materials, 2021

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Thermal conductivity of MoS2 polycrystalline nanosheets

Francesc Alzina

arXiv (Cornell University), 2016

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A vapor-phase-assisted growth route for large-scale uniform deposition of MoS2 monolayer films

Devendra Pareek

RSC Advances

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Continuous ultra-thin MoS2 films grown by low-temperature physical vapor deposition

Christopher Muratore

Applied Physics Letters, 2014

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Improving Electrical Performance of Few-Layer MoS2 FETs via Microwave Annealing

chenyu wen

IEEE Electron Device Letters, 2019

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Growth of Large-Area and Highly Crystalline MoS2 Thin Layers on Insulating Substrates

Keng-ku Liu

Nano Letters, 2012

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Rapid Wafer-Scale Growth of Polycrystalline 2H-MoS2 by Pulsed Metal–Organic Chemical Vapor Deposition

Irina Kalish

Chemistry of Materials, 2017

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Large-Area Growth of Uniform Single-Layer MoS2 Thin Films by Chemical Vapor Deposition

Woong Choi

Nanoscale research letters, 2015

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NaCl-Assisted CVD Growth of Large-Area High-Quality Trilayer MoS2 and the Role of the Concentration Boundary Layer

madan pancholi

Crystal Growth & Design, 2021

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Large-area MoS 2 grown using H 2 S as the sulphur source

Sorin Lazar

2D Materials, 2015

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Chemical vapor deposition merges MoS2 grains into high-quality and centimeter-scale films on Si/SiO2

Rapti Ghosh

RSC Advances, 2022

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Wafer-scale MoS2 thin layers prepared by MoO3 sulfurization

Chi-Te Liang Chi-Te Liang

Nanoscale, 2012

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Atomic-level insights through spectroscopic and transport measurements into the large-area synthesis of MoS2 thin films

Asma Alkabsh

MRS Communications, 2018

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Large-Area MoS2 Films Grown on Sapphire and GaN Substrates by Pulsed Laser Deposition

Antal Koos

Nanomaterials, 2023

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Application-Oriented Growth of a Molybdenum Disulfide (MoS2) Single Layer by Means of Parametrically Optimized Chemical Vapor Deposition

Alessandro Molle

Materials

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