Comparison of leakage behaviors in p- and n-type metal-oxide-semiconductor capacitors with hafnium silicon oxynitride gate dielectric by electron-beam-induced current (original) (raw)

Observation of leakage sites in a hafnium silicon oxynitride gate dielectric of a metal-oxide-semiconductor field-effect transistor device by electron-beam-induced current

Yasushi Akasaka, Naoki Fukata

Applied Physics Letters, 2006

View PDFchevron_right

Simulation of electron transmittance and tunnel current in n+ Poly-Si-HfSiOxN-Trap-SiO2-Si(100) capacitors using analytical and numerical approaches

Khairurrijal Khairurrijal

View PDFchevron_right

Comparison of electrical stress-induced charge carrier generation/trapping and related degradation of SiO2 and HfO2/SiO2 gate dielectric stacks

Piyas Samanta

Microelectronics Reliability, 2010

View PDFchevron_right

Leakage characteristics of advanced MOS capacitors with hafnium silicate dielectric and Ru electrode

Fred Roozeboom

2006 International Conference on Advanced Semiconductor Devices and Microsystems, 2006

View PDFchevron_right

Electron and hole components of tunneling currents through an interfacial oxide-high-k gate stack in metal-oxide-semiconductor capacitors

Khairurrijal Khairurrijal

Journal of Applied Physics, 2010

View PDFchevron_right

Stress-induced leakage current in p/sup +/ poly MOS capacitors with poly-Si and poly-Si/sub 0.7/Ge/sub 0.3/ gate material

C. Salm

IEEE Electron Device Letters, 2000

View PDFchevron_right

A Novel Approach in Separating the Roles of Electrons and Holes in Causing Degradation in Hf-Based MOSFET Devices by Using Stress-Anneal Technique

Jack Le

IEEE Electron Device Letters, 2007

View PDFchevron_right

Charge Trapping Characterization Methodology for the Evaluation of Hafnium-based Gate Dielectric Film Systems

Chadwin Young

View PDFchevron_right

Minority carrier tunneling and stress-induced leakage current for p< sup>+ gate MOS capacitors with poly-Si and poly-Si< sub> 0.7 Ge< sub> 0.3 gate material

C. Salm

1999

View PDFchevron_right

Electron Tunnel Current through HfO[sub 2]∕SiO[sub 2] Nanometer-thick Layers with a Trapped Charge: Effects of Electron Incident Angle and Silicon Substrate Orientation

Khairurrijal Khairurrijal

2011

View PDFchevron_right

A Theoretical Study on Electron Tunneling Current in Isotropic High-κ Dielectric Stack-Based MOS Capacitors with Charge Trapping

Khairurrijal Khairurrijal

View PDFchevron_right

An Analysis of Electron Direct Tunneling Current through a High-K MOS Capacitor by Including the Effect of a Trap between HfO[sub 2] and SiO[sub 2] Interfaces

Khairurrijal Khairurrijal

2011

View PDFchevron_right

A model of the stress induced leakage current in gate oxides

A. Paccagnella

2001

View PDFchevron_right

Experiments and modelling to determine trapped holes and slow states in Fowler-Nordheim stressed MOS capacitors

B. Sagnes

Microelectronic Engineering, 1995

View PDFchevron_right

Characterization of High-K Gate Dielectrics using MOS Capacitors

IJSRP Journal

View PDFchevron_right

Irradiation effect on dielectric properties of hafnium and gadolinium oxide gate dielectrics

H. García

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2009

View PDFchevron_right

Trap-Related Carrier Transports in p-FET with Poly-Si/HfSiON Gate Stack

Ryu Hasunuma

Extended Abstracts of the 2008 International Conference on Solid State Devices and Materials, 2008

View PDFchevron_right

Degradation of oxides in metal-oxide-semiconductor capacitors under high-field stress

Rajendra Patrikar

Journal of Applied Physics, 1993

View PDFchevron_right

Charge trapping and detrapping characteristics in hafnium silicate gate dielectric using an inversion pulse measurement technique

Se jong Rhee

Applied Physics Letters, 2005

View PDFchevron_right

Stress-Induced Positive Charge in Hf-Based Gate Dielectrics: Impact on Device Performance and a Framework for the Defect

Guido Groeseneken

IEEE Transactions on Electron Devices, 2000

View PDFchevron_right

The Effect of Electron Incident Angle on Transmittance and Tunneling Current in an Anisotropic Metal-Oxide-Semiconductor Capacitor with High-K Dielectric Gate Stack

Khairurrijal Khairurrijal

2010

View PDFchevron_right

Evidence of hafnia oxygen vacancy defects in MOCVD grown Hf x Si 1− x O y ultrathin gate dielectrics gated with Ru electrode

Milan Tapajna

Microelectronic Engineering, 2007

View PDFchevron_right

Analysis of electron direct tunneling current through very-thin gate oxides in MOS capacitors with the parallel-perpendicular kinetic energy components and anisotropic masses

Khairurrijal Khairurrijal

Brazilian Journal of Physics, 2010

View PDFchevron_right

The Electrical and Material Characterization of Hafnium Oxynitride Gate Dielectrics With TaN-Gate Electrode

Se jong Rhee

IEEE Transactions on Electron Devices, 2004

View PDFchevron_right

Influence of neutral hole traps in thin gate oxides on MOS device degradation during Fowler-Nordheim stress

Piyas Samanta

1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. Proceedings

View PDFchevron_right

On the role of interface states in low-voltage leakage currents of metal–oxide–semiconductor structures

Giuseppe Iannaccone

Applied Physics Letters, 2002

View PDFchevron_right

Leakage current conduction, hole injection, and time-dependent dielectric breakdown ofn-4H-SiC MOS capacitors during positive bias temperature stress

PIYAS SAMANTA

Journal of Applied Physics, 2017

View PDFchevron_right

A novel transient characterization technique to investigate trap properties in HfSiON gate dielectric MOSFETs-from single electron emission to PBTI recovery transient

Denny Tang

IEEE Transactions on Electron Devices, 2000

View PDFchevron_right