A New Method to Fabricate Metal Tips for Scanning Probe Microscopy (original) (raw)

Indirect tip fabrication for Scanning Probe Microscopy

Siebe Bouwstra

Microelectronic Engineering, 1996

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Advances in Manufacturing of Molded Tips for Scanning Probe Microscopy

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Fabrication of arrays of nanometer size test structures for scanning probe microscope tips characterization*

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 1994

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Nanofabrication of sensors on cantilever probe tips for scanning multiprobe microscopy

Zhisheng Shi

Applied Physics Letters, 1996

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Tip-based nano-manufacturing and -metrology

Ivo Rangelow

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Porous thin films for the characterization of atomic force microscope tip morphology

Doug Vick

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Sub-5 nm AFM Tip Characterizer Based on Multilayer Deposition Technology

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Fabrication of High Performance Probes for Atomic Force Microscope Afm

Medhat Samaan

University of Waterloo, 2021

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New SPM concept for accurate and repeatable tip positioning

Pierre Eyben, Danielle Vanhaeren

Microelectronic Engineering, 2009

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Piezoresistive sensors for scanning probe microscopy

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On the design of piezoresistive silicon cantilevers with stress concentration regions for scanning probe microscopy applications

Roberto Gomez

Journal of Micromechanics and Microengineering, 2000

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Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping

Pierre Eyben

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Atomic force microscope integrated into a scanning electron microscope for fabrication and metrology at the nanometer scale

Ivo Rangelow

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Scanning probe microscopy imaging of metallic nanocontacts

Peter Grutter

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Batch fabrication of insulated conductive scanning probe microscopy probes with reduced capacitive coupling

Yigezu Birhane

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High-aspect ratio metal tips attached to atomic force microscopy cantilevers with controlled angle, length, and radius for electrostatic force microscopy

Yoichi Miyahara

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A versatile multipurpose scanning probe microscope

M. Labardi

Journal of Microscopy, 2003

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Micromachined fountain pen as a tool for atomic force microscope based nanoelectrochemical metal deposition

miko elwenspoek

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Superhard, conductive coatings for atomic force microscopy cantilevers

Paul Leiderer

Applied Physics Letters, 2001

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SNOM/AFM microprobe integrated with piezoresistive cantilever beam for multifunctional surface analysis

Ivo Rangelow

Microelectronic Engineering, 2002

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Integrating micro- and nanoelectrodes into atomic force microscopy cantilevers using focused ion beam techniques

Alois Lugstein

Applied Physics Letters, 2002

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DRIE based novel technique for AFM probes fabrication

Guillermo Villanueva

Microelectronic Engineering, 2007

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Nanolithography Study Using Scanning Probe Microscope

sheij sadegh

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