Magnetron Research Papers - Academia.edu (original) (raw)

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- by
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- Computer Science, Materials Science, Microelectronics, Microstructure
- by Gary Selwyn
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- Engineering, Technology, Plasma Processing, Thin Films

This paper presents a modification to conventional magnetron sputtering systems. The introduction of a grid in front of the target increases the metal ion ratio. Using OES and observing both Ti neutrals and ions, it was confirmed that the relative ionization could be qualitatively extended with grid-attached magnetron sputtering compared with a conventional magnetron system. On the other hand, the relative ionization of Ar decreased. Our results also show that the Ti films deposited by conventional magnetron exhibit (100) preferred orientation as the bias voltage increased. On the other hand, in the case of the grid-attached magnetron, the Ti films exhibit highly preferred (002) orientation with increasing bias voltage. The experiments clearly demonstrated that a dense Ti film with a smooth, specular reflecting surface can be produced using the grid-attached magnetron with increased Ti ion flux compared to the conventional magnetron.

- by Leonid Shaginyan
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- Engineering, Technology, Physical Vapor Deposition, Thin Films
- by Soo Kim
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- Engineering, Plasma Physics, Technology, Microstructure
- by Neal Butler
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- Packaging, Radar, Diffusion Tensor Imaging, Magnetosphere

A new pulse-operated microwave-induced plasma (MIP) source is described. To avoid operational difficulties of the MIP due to Joule heating and to obtain spectral emission lines of high peak intensities, one energizes the MIP source with a TM010 cavity with a microwave pulse of large peak power and short duration, which is superposed on a low-bias dc microwave. A peak power of 400 W, which is two times the maximum output ratings of a magnetron under a normal dc operation, can be generated by applying a −500 V pulse to the cathode of the magnetron operating under the bias mode. The pulsed-MIP requires no special cooling system since the mean power remains low during the entire operation. Some of the considerations taken into account in the design and construction of the microwave generator are presented. The electrical and spectral characteristics of the MIP source are also described in detail.

- by Moustafa ahmed
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- Mechanical Engineering, Optics, Chemistry, Analytical Chemistry
- by Rainer Hippler
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- Nanotechnology, Dusty Plasma, Flow, Mathematical Sciences

We cannot imagine the world without electric power. Generally the power is transmitted through wires. Imagine a future in which wireless power transfer is feasible. In this paper, we present the concept of transmitting power without using wires i.e., transmitting power as microwaves from one place to another in order to reduce the transmission and distribution losses. This concept is known as Microwave Power transmission (MPT). We also discussed the technological developments in Wireless Power Transmission (WPT). The advantages & biological impacts of WPT are also presented. This paper includes the techniques of transmitting power without using wires with an efficiency of about 95%.

- by Hiroshi Furuta
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- Multidisciplinary, Thin Films, Process, Annealing
- by Ivan Perez Wurfl
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- Engineering, Solar Cell, Photoluminescence, Quantum Confinement
- by Duk Young Jeon
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- Engineering, Technology, Scanning Electron Microscopy, Morphology

Los radares tienen múltiples aplicaciones y su uso es vital en el sector aeroespacial; de ahí la importancia de formar especialistas en esta área y, por lo tanto, la de contar con herramientas pedagógicas adecuadas. Se plantea la necesidad de implementar algún equipamiento a nivel educativo para potenciar el proceso de enseñanza-aprendizaje de aquellas personas que se encuentran transitando la etapa universitaria de ingeniería. Más precisamente, se busca desarrollar un sistema integral para el aprendizaje de los estudiantes de Ingeniería en Electrónica que cursan asignaturas vinculadas al área de microondas y radares en la Facultad de Ingeniería de la Universidad de Mendoza. El presente trabajo expone un caso de resolución práctica que permite satisfacer esta necesidad, al adaptar un equipo existente.

- by Mauricio Vilanova
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- Education, RF Propagation, Microwave, Radar

This paper aims to get an optimal high voltage magnetic flux leakage transformer design of a three-phase shell type. Optimal design of transformer requires determination of design variables to optimize a particular objective and satisfying a set of constraints. The objective function is to minimize the total mass and reduce the volume of the transformer. This function depends on inputs, which are divided into optimization variables. Each optimization variable varies within a certain interval thus defining a global search space. It is within this space that we seek the optimal solution. The constraints: maximum and average current of magnetron anode are part of the problem in order to limit the overall search space. The results obtained indicate that the method has provided a global optimum. The computation time and cost of active material are much reduced compared with the conventional design results.

- by beei iaes
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- Microwave, Modeling, Optimization, Magnetron
- by N. Brenning
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- High Voltage, Deposition, Natural Sciences, Sputtering
- by Mohan Rao Gowravaram
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- Engineering, Materials Science, Technology, Annealing

This paper presents smart charging of vehicle batteries using the microwave technology, the main objective is to increase the overall battery charging efficiency using microwave technology of a magnetron. This method helps in increasing the systems charging efficiency to 80% compared to the conventional plug in chargers, Also the problem with the charging ports can be res olved using this wireless technology. Another add on advantage in this technology is that it requires less amount of time for charging. The system consists of a transmitting system and a receiving system. The main component used are magnetron, rectenna, dc controller, metering device.

- by GRD JOURNALS
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- Wireless Charging, Magnetron, Efficiency
- by Keith Cartwright
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- Distributed Computing, High Performance Computing, Power System, Science
- by janet towner
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- Engineering, Technology, Microstructure, Crystal Growth
- by Malki Pinkas
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- Materials Engineering, Condensed Matter Physics, Wear, Tribology
- by Malki Pinkas
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- Materials Engineering, Tribology, Physical Vapor Deposition, Nanocomposite
- by A. Pauschitz
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- Carbon, Nanoindentation, Scanning Electron Microscopy, Atomic Force Microscopy
- by Ming-show Wong
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- Materials Engineering, Condensed Matter Physics, Adhesion, Nitrides
- by miyoung kim
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- Materials Engineering, Mechanical Engineering, Heat Treatment, Thin Films
- by Esteban Broitman and +1
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- Engineering, Materials Engineering, Chemical Engineering, Technology
- by R. Fornari
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- Engineering, Raman Spectroscopy, Near Infrared, Ellipsometry
- by Joan ESTEVE PUJOL
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- Carbon, Tribology, Hardness, Magnetron
- by JOSE L SOLIS VELIZ
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- Materials Engineering, Analytical Chemistry, Magnetron
- by Martin Peckerar
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- Si, Solid State electronics, Silicon Nitride, Band Gap

The Ta–Si–N thin films were prepared using a reactive magnetron co-sputtering with and without an alternating target shutter control at different N2 flow ratios (FN2%=FN2/(FAr+FN2)×100%) of 3–20%. The evolution of microstructure, composition, morphology, resistivity, and nanomechanical properties of Ta–Si–N films was characterized by X-ray diffraction (XRD), energy dispersive X-ray spectrum (EDS), scanning electronic microscopy, four-point probe technique and nanoindentation, respectively.

The energy distribution and composition of the ion flux on a substrate during reactive magnetron sputtering of TiN and TiWN films were studied by the energy resolved mass spectroscopy. The entrance flange of the probe Hiden EQP500 was positioned in a distance of 50 mm from the Ti or WTi (70:30 at.%) target 100 mm in diameter. The sputtering was carried out in a mixture of argon and nitrogen of various compositions at pressures from 0.05 to 10 Pa and discharge currents from 0.5 to 7 A. The energy spectra of ions at low pressures were characterized by extended high-energy tails. The high energy of sputtered (metal) atoms follows from their distribution at the cathode after being sputtered. The high-energy gas ions (Ar+, N2+, N+) stem from two sources. One is the transfer of energy in the collisions with the sputtered metal atoms. The other is the reflection of the energetic ions from heavy elements in the target. A strong reduction of the ion energy at the substrate was found when the...

- by Ivan Kolev
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- Modeling, Monte Carlo, Monte Carlo Methods, Sputtering
- by Gary Doll
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- Materials Engineering, Materials Science, Tribology, Physical Vapor Deposition
- by A. Sproul
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- Engineering, Technology, Near Infrared, Doping
- by Daniel Simek
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- Engineering, Thin Films, Mathematical Sciences, Thin Film
- by Etienne Quesnel
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- Engineering, Technology, Carbon, Physical Vapor Deposition
- by Richard Temkin
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- Design, Electron Gun, Magnetron, Temperature measurement
- by Yong Lei
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- Engineering, Materials Engineering, Mechanical Engineering, Chemical Engineering
- by Teresa Vieira
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- Materials Engineering, Condensed Matter Physics, Materials Science, Titanium
- by mohamed Seif
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- Engineering, Aerospace Engineering, Condensed Matter Physics, Electron Microscopy
- by Ron Gutmann
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- Engineering, Technology, Kinetics, Tribology